選擇性雷射燒結鋁摻雜氧化鋅奈米顆粒及其 熱電方面的應用

Abstract

隨著科技的發展，人類對於能源的消耗日益上升，換言之，廢熱的總量也在日益的增加，工業上的廢熱因其熱源溫度較高，已經有許多人在探討回收的方法，一般生活上也會有廢熱的產生，但其規模、時長及溫差大多不向工業廢熱一樣容易回收利用，因此如何將讓電裝置的體積縮小、提高轉換效率甚至是對人體無害就變成是重要的議題，而熱電薄膜就是為此而誕生的里程碑。 選擇鋁摻雜氧化鋅作為此研究之材料是由於高導電性、易取得(成本低)，對環境的汙染程度較低，使其成為近年來研究發現頗具潛力的熱門熱電材料之一，本研究利用波長532 nm、脈衝波時間8 ns的雷射，利用雷射高能量密度以及極短的加熱時間，搭配2D振鏡系統，高效和低成本的方式。將摻雜鋁的氧化鋅燒結沉積在石英上。 本實驗表面質量密度固定為5.1 mg/cm^2，並將雷射掃面之線段間距固定為20 μm，藉由調整不同脈衝重疊率及雷射能量大小來找出最佳的鋁摻雜氧化鋅奈米顆粒(0.5 wt%)薄膜製成的區間參數，並以相同的雷射能量區間及相同的脈衝重疊率來對不同摻雜濃度(0.5 wt%、1 wt%、2 wt%)的鋁摻雜氧化鋅奈米顆粒的雷射燒結結果進行表面型態、電性急熱電性質的比較。

With increasing energy consumption, the amount of waste heat generated has become a pressing issue. Industrial waste heat, known for its high temperature, has attracted attention for potential recovery methods. However, recovering waste heat from everyday life poses challenges due to its smaller scale, shorter duration, and lower temperature differentials. To address this, researchers have focused on developing thermoelectric thin films. Aluminum-doped zinc oxide has been chosen for this research due to its high conductivity, availability, low cost, and minimal environmental impact. It has emerged as a promising thermoelectric material. In this study, a laser with specific parameters and a 2D scanning mirror system were utilized for efficient and cost-effective fabrication. Aluminum-doped zinc oxide was sintered onto quartz substrates using laser-induced forward transfer. The experiment involved a fixed surface mass density and controlled line spacing of the scanned laser. By adjusting pulse overlap ratios and laser energy levels, the optimal parameters for fabricating thin films with aluminum-doped zinc oxide nanoparticles (0.5 wt%) were determined. Surface morphology and electrical and thermoelectric properties of the laser-sintered films were compared among different doping concentrations (0.5 wt%, 1 wt%, 2 wt%) of aluminum-doped zinc oxide nanoparticles, using the same laser energy range and pulse overlap ratio.