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http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/86738
標題: | 微型壓電能量擷取器封裝至PCB技術開發 The Development of Micro Piezoelectric Energy Harvester Packaged to PCB |
作者: | Yi-Yen Liu 劉亦晏 |
指導教授: | 吳文中(Wen-Jong Wu) 吳文中(Wen-Jong Wu | wjwu@ntumems.net | ), |
關鍵字: | 壓電能量擷取器,異質介面接合,不鏽鋼焊接,微機電製程,電極改善, Heterogeneous Bonding,MEMS,Stainless Steel,Energy harvester,Electrode improvement, |
出版年 : | 2022 |
學位: | 碩士 |
摘要: | 隨著科技不斷進步,文明生活中不乏許許多多的電子產品、攜帶式裝置伴隨左右,因此,能量需求亦是同步增長。壓電材料是可以將物體應變轉換成電能的一種材料,若是可以將環境中相對穩定的振動源之振動做應用,勢必是一個具有發展潛力的發電方式。 本研究使用本團隊製程技術成熟的懸臂樑式壓電能量擷取器,但根據本團隊過去研究:極化後焊接會導致輸出電壓下降44%,輸出功率下降69%。因此本研究提出先焊接後極化的方法,避免去極化的狀況發生。並且在成功焊接至PCB板後,輸出表現沒有因為焊接而下降,常壓狀況焊接後輸出電壓上升18%,輸出功率上升40%。已焊接元件匹配最佳阻抗之輸出電壓與功率為:輸出電壓為2.82V,輸出功率為9.94μW;真空狀況焊接後輸出電壓上升19%,輸出功率上升42%。已焊接元件匹配最佳阻抗之輸出電壓與功率為:輸出電壓為3.65V,輸出功率為16.7μW。為達成此目標首先需要研究電極層,突破不鏽鋼不能焊接的困難。 主要的研究脈絡首先透過改變表層電極層尋找可以焊接且穩定的電極層,測試電極層機械強度的方式為進行拉力試驗,根據國際電子工業聯接協會(Association Connecting Electronics Industries, ICP)規定推算在本應用中200gw為判斷足夠強的標準,電極層耐熱溫度標準為520度,是實際退火承受製程中的最高溫度,測試成功的電極才進入焊接階段,匹配最佳阻抗量測輸出功率,探討本研究提出的新式導出電極訊號方式是否導致輸出降低。 With the advancement of science and technology, there are many electronic products and portable devices in the civilized life. Therefore, the energy demand is also increasing at the same time. Piezoelectric material is a material that can convert the strain into electrical energy. If the vibration of a relatively stable source of vibration can be applied, it is bound to be the way to get electricity for the development potential. This study is based on the micro piezoelectric energy harvester with mature process technology of our team. According to the past research of our team: soldering after polarization leads to a 44% drop in output voltage and a 69% drop in output power. Therefore, this study proposes a method of first soldering and then polarization to avoid depolarization. And after successfully soldering to the PCB, the output performance did not decrease due to soldering. The output voltage increased 18% and the output power increased 40% after soldering under normal pressure. The output voltage is 2.82V and the output power is 9.94μW. The output voltage increased 19% and the output power increased 42% after soldering under vacuum. The output voltage is 3.65V and the output power is 16.7μW. In order to achieve this goal, the top priority is to research the electrode layer, to break through the difficulty that stainless steel cannot be soldered. The main research context is first to find a solderable and stable electrode by changing the surface electrode layer. The way to confirm the mechanical strength is the pull-off test. According to the standard of Association Connecting Electronics Industries (ICP), the strength better than 200gw is adequate. The temperature resistance standard of the electrode layer is 520 degrees, which is the highest temperature in the actual annealing. Only the electrodes which have been successfully tested achieve the soldering. Then, match the optimal impedance to measure output power. It is discussed whether the new method of extending electrode signals proposed in this study leads to a decrease in output or not. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/86738 |
DOI: | 10.6342/NTU202101855 |
全文授權: | 同意授權(全球公開) |
電子全文公開日期: | 2022-09-30 |
顯示於系所單位: | 工程科學及海洋工程學系 |
文件中的檔案:
檔案 | 大小 | 格式 | |
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U0001-2807202116145800.pdf | 1.44 MB | Adobe PDF | 檢視/開啟 |
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