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http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/79518完整後設資料紀錄
| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 蘇國棟(Guo-Dung J. Su) | |
| dc.contributor.author | Ming-Yu Tsai | en |
| dc.contributor.author | 蔡明侑 | zh_TW |
| dc.date.accessioned | 2022-11-23T09:02:35Z | - |
| dc.date.available | 2022-02-16 | |
| dc.date.available | 2022-11-23T09:02:35Z | - |
| dc.date.copyright | 2022-02-16 | |
| dc.date.issued | 2022 | |
| dc.date.submitted | 2022-02-09 | |
| dc.identifier.citation | 1. Hecht, Optics, 3rd Edition ed. (Addison-Wesley, New York, 1998). 2. M. Khorasaninejad, W. T. Chen, R. C. Devlin, J. Oh, A. Y. Zhu, and F. Capasso, 'Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging,' Science 352, 1190-1194 (2016). 3. C.-Y. Fan, T.-J. Chuang, K.-H. Wu, and G.-D. J. Su, 'Electrically modulated varifocal metalens combined with twisted nematic liquid crystals,' Optics Express 28, 10609-10617 (2020). 4. H. Ren and S.-T. Wu, 'Variable-focus liquid lens by changing aperture,' Applied Physics Letters - APPL PHYS LETT 86(2005). 5. C. W. Fowler and E. S. Pateras, 'Liquid crystal lens review,' Ophthalmic and Physiological Optics 10, 186-194 (1990). 6. S. Kuiper and B. H. W. Hendriks, 'Variable-focus liquid lens for miniature cameras,' Applied Physics Letters 85, 1128-1130 (2004). 7. N. Sugiura and S. Morita, 'Variable-focus liquid-filled optical lens,' Applied Optics 32, 4181-4186 (1993). 8. G. Beni and S. Hackwood, 'Electro‐wetting displays,' Applied Physics Letters 38, 207-209 (1981). 9. H.-C. Lin, M.-S. Chen, and Y.-H. Lin, 'A Review of Electrically Tunable Focusing Liquid Crystal Lenses,' Transactions on Electrical and Electronic Materials 12(2011). 10. Y.-H. Lin, H. Ren, Y.-H. Wu, S.-T. Wu, Y. Zhao, J. Fang, and H.-C. Lin, 'Electrically tunable wettability of liquid crystal/polymer composite films,' Optics Express 16, 17591-17598 (2008). 11. Y.-H. Lin, Y.-J. Wang, and V. Reshetnyak, 'Liquid crystal lenses with tunable focal length,' Liquid Crystals Reviews 5, 111-143 (2017). 12. S. Sato, 'Applications of Liquid Crystals to Variable-Focusing Lenses,' Optical Review 6, 471-485 (1999). 13. Y. Li and S.-T. Wu, 'Polarization-independent adaptive microlens with a blue phase liquid crystal,' Optics Express 19, 8045-8050 (2011). 14. C.-T. Lee, Y. Li, H.-Y. Lin, and S.-T. Wu, 'Design of polarization-insensitive multi-electrode GRIN lens with a blue phase liquid crystal,' Optics Express 19, 17402-17407 (2011). 15. C. H. Gooch and H. A. Tarry, 'The optical properties of twisted nematic liquid crystal structures with twist angles ⩽90 degrees,' Journal of Physics D: Applied Physics 8, 1575-1584 (1975). 16. E. P. Raynes and I. A. Shanks, 'Fast-switching twisted nematic electro-optical shutter and color filter,' Electronics Letters 10, 114-115 (1974). 17. M. Schadt and W. Helfrich, 'Voltage‐Dependent Optical Activity of a Twisted Nematic Liquid Crystal,' Applied Physics Letters 18, 127-128 (1971). 18. X. Chen, M. Chen, M. Q. Mehmood, D. Wen, F. Yue, C.-W. Qiu, and S. Zhang, 'Longitudinal Multifoci Metalens for Circularly Polarized Light,' Advanced Optical Materials 3, 1201-1206 (2015). 19. W. Wang, Z. Guo, K. Zhou, Y. Sun, F. Shen, Y. Li, S. Qu, and S. Liu, 'Polarization-independent longitudinal multi-focusing metalens,' Optics Express 23, 29855-29866 (2015). 20. S. Y. Chou, P. R. Krauss, and P. J. Renstrom, 'Imprint of sub‐25 nm vias and trenches in polymers,' Applied physics letters 67, 3114-3116 (1995). 21. M.-H. Chen, W.-N. Chou, V.-C. Su, C.-H. Kuan, and H. Y. Lin, 'High-performance gallium nitride dielectric metalenses for imaging in the visible,' Scientific reports 11, 1-8 (2021). 22. Z.-B. Fan, Z.-K. Shao, M.-Y. Xie, X.-N. Pang, W.-S. Ruan, F.-L. Zhao, Y.-J. Chen, S.-Y. Yu, and J.-W. Dong, 'Silicon nitride metalenses for unpolarized high-NA visible imaging,' in CLEO: Science and Innovations, (Optical Society of America, 2018), STh3I. 8. 23. S. Zhou, B. Cao, and S. Liu, 'Optimized ICP etching process for fabrication of oblique GaN sidewall and its application in LED,' Applied Physics A 105, 369-377 (2011). 24. K. Dogheche, B. Alshehri, G. Patriarch, and E. Dogheche, 'Development of micron-sized photonic devices based on deep GaN etching,' in Photonics, (Multidisciplinary Digital Publishing Institute, 2021), 68. 25. Y. Sun, X. Kang, Y. Zheng, K. Wei, P. Li, W. Wang, X. Liu, and G. Zhang, 'Optimization of mesa etch for a quasi-vertical GaN Schottky barrier diode (SBD) by inductively coupled plasma (ICP) and device characteristics,' Nanomaterials 10, 657 (2020). 26. C. D. Frye, S. B. Donald, C. E. Reinhardt, R. J. Nikolic, L. F. Voss, and S. E. Harrison, 'Ultrahigh GaN: SiO2 etch selectivity by in situ surface modification of SiO2 in a Cl2-Ar plasma,' Materials Research Letters 9, 105-111 (2021). 27. H. Ren, Y.-H. Fan, and S.-T. Wu, 'Liquid-crystal microlens arrays using patterned polymer networks,' Optics Letters 29, 1608-1610 (2004). 28. Y.-S. Hwang, T.-H. Yoon, and J. C. Kim, 'Design and Fabrication of Variable Focusing Lens Array Using Liquid Crystal for Integral Photography,' Japanese Journal of Applied Physics 42, 6434-6438 (2003). | |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/79518 | - |
| dc.description.abstract | 透鏡被廣泛應用在生活中來達到成像、聚焦的效果。隨著電腦計算能力的進步以及製程技術的成熟，設計次波長結構的人造表面，我們稱之為超穎介面。以許多次波長組成的介面調製電磁波相位、偏振、振幅，來達到超越傳統透鏡的光學特性，也就成了我們熟知的超穎透鏡。在本篇論文中，我們使用半導體製程技術的方法來製造超穎透鏡。在藍寶石基板上選擇氮化鎵作為元件材料，使用電子束微影的技術使用負光阻(NEB22-A2)畫出奈米線寬圖形，再由上而下的蝕刻方法得到氮化鎵奈米柱。本篇論文的最後，架設光路量測自製設計的超穎透鏡，結合扭曲向列型液晶(TN-LC)。成功量測到在不同極化下的入射光，通過自製超穎透鏡有著不同的聚焦點。 | zh_TW |
| dc.description.provenance | Made available in DSpace on 2022-11-23T09:02:35Z (GMT). No. of bitstreams: 1 U0001-0802202211552700.pdf: 5888530 bytes, checksum: 259a246873241ab04b6e26366e56e97b (MD5) Previous issue date: 2022 | en |
| dc.description.tableofcontents | 誌謝 i 中文摘要 ii ABSTRACT iii CONTENTS iv LIST OF FIGURES vi Chapter 1 Introduction 1 1.1 Traditional Lens 1 1.2 Planar Metalens in Optics 2 1.3 Principle of Metalens System 3 1.4 Motivation 5 Chapter 2 Fabrication Technology 6 2.1 Lithography 6 2.2 Etching Process 16 2.2.1 Dry etching 16 2.2.2 Wet Etching 18 2.3 Process Material 19 Chapter 3 Experimental Methods 20 3.1 Fabrication of Metalens 20 3.1.1 Process Equipment in Metalens 20 3.1.2 Process Flow of Metalens 30 3.2 Fabrication of TN-LC 32 3.2.1 Process Materials in TN-LC 32 3.2.2 Process Flow of TN-LC 35 3.3 Measurement Setup 36 Chapter 4 Results and Discussion 38 4.1 Fabricated of Metalens 38 4.1.1 Photoresist Pattern by E-beam 38 4.1.2 Hard Mask 42 4.1.3 RIE Etching Process 44 4.1.4 ICP-RIE Etching Process 49 4.2 Electrically Modulated Varifocal Metalens Measurement 57 Chapter 5 Conclusion 61 REFERENCE 62 | |
| dc.language.iso | en | |
| dc.title | 快速變焦的超穎透鏡製程技術 | zh_TW |
| dc.title | Rapid varifocal metalenses fabrication technology | en |
| dc.date.schoolyear | 110-1 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 吳忠幟(Chung-Ruey Yen),黃定洧(Tan-Cha Lee) | |
| dc.subject.keyword | 超穎介面,超穎透鏡,氮化鎵,電子束微影,奈米柱,扭曲向列型液晶, | zh_TW |
| dc.subject.keyword | metasurface,metalens,Gallium Nitride,e-beam lithography,nanopillar,twisted nematic liquid crystal, | en |
| dc.relation.page | 64 | |
| dc.identifier.doi | 10.6342/NTU202200367 | |
| dc.rights.note | 同意授權(全球公開) | |
| dc.date.accepted | 2022-02-11 | |
| dc.contributor.author-college | 電機資訊學院 | zh_TW |
| dc.contributor.author-dept | 光電工程學研究所 | zh_TW |
| 顯示於系所單位： | 光電工程學研究所 | |
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| U0001-0802202211552700.pdf | 5.75 MB | Adobe PDF | 檢視/開啟 |
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