全域性彩色共焦顯微量測系統之設計與驗證

Abstract

在本論文開頭所標明設計與驗證,分別針對照明系統、彩色共焦系統以及感測系統個別進行,此三部分為一個共焦系統所必備的,因此本篇論文特別針對此三種部分進行設計與驗證;照明為針對傳統使用 DMD 搭配準直光所產生的不連續光譜問題進行修正,提出一套新的照明系統,利用柯勒照明和 DMD 組合的架構來解決光譜失真的問題,使得光打在樣本端上時可以使用到完整的光譜;而彩色共焦物鏡則是利用市售的透鏡搭配商業化的顯微物鏡進行組合以達成軸向色散,而對此部分,特別針對其光譜響應曲線的半高全寬進行模擬及討論,在感測器方面由於 DMD 特殊的設計,使得相機成像平面與數位微鏡平面需呈現特殊的角度,然而此角度會造成影像產生歪斜、中央聚焦邊緣失焦等問題,其會大幅度的影響成像品質,本研究針對此問題,在感測器中增加了準直物鏡組使數位微鏡在進到相機鏡頭前準直,藉以修正中央聚焦邊緣失焦的問題,使得成像點大幅度的縮小,並且利用縮小感測器前方成像鏡頭的光圈大小以增加成像品質。本論文內容主要為分析上述所說之問題以及提出改善方案,並且將共焦系統各項元件進行設計與驗證。

The design and optimization are indicated at the beginning of this thesis are illumination system, chromatic confocal system, and sensing system. These three parts are necessary for a confocal system. Therefore, this research are focused on the design and Verificati-on of these three parts. In the illumination by using the Köhler illumination combine with digital micro-mirror devise(DMD) solve the problem of spectral distortion, so that complete spectrum can be used when hitting the sample The chromatic confocal objective lens is a combination of a commercially available lens and a commercial microscope objective to achieve axial dispersion. In this part, the full width at half maximum of the spectral response curve is simulated and discussed. In the sensing system, due to the special design of the digital micro-mirror device, the image plane of the camera and the DMD plane need to have a special angle, but this angle will cause the image to be skewed and the edge of image blur. This will greatly affect the image quality. In this study, a collimation objective lens group was added to the sensor to align the digital micro-mirror before entering the camera lens so as to correct the defocus of the edge. The problem is that the imaging point is greatly reduced, and the aperture of the imaging lens is reduced to increase the imaging quality. The content of this paper is mainly to analyze the above-mentioned problems and propose improvement plans.