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Analyses of Material Characteristics for Ag-4Pd Alloy Wire after Ultrasonic Wire Bonding
ultrasonic wire bonding,silver alloy wire,parameters,substrate,high-temperature annealing,
|Publication Year :||2016|
比較不同線材(線徑為200μm鋁線、195μm銀合金線、195μm 4N銅線、195μm 6N銅線)接合於金鎳銅墊發現，銀合金線有最大的拉線強度，界面強度略小於銅線。經過150℃、500小時的高溫時效後，銀合金線的拉線強度僅次於6N銅線；界面強度雖仍比4N和6N銅線小。但是，因金銀固溶體生成，使界面強度下降幅度比銅線小、機械性質相對穩定。經時效退火後，粗線徑的異質超音波接合的界面平整度低、介金屬化合物生長與水平分布不均勻，界面強度下降、可靠度降低。
To improve the application of the gold aluminum copper wire bonding, this study focuses on improving the reliability of silver alloy wire in the ultrasonic wire bonding, in the aspect of bonding parameters, process and annealing. In the same parameters, the silver alloy wire (ϕ = 25.6μm) bonded to the aluminum pad. It is found that the pull strength of silver alloy wire is about 1.6 to 2 times than that of aluminum wire. After annealing, this study has found that found Ag2Al is stable phase. After optimizing the parameter, the wire pull strength of the silver alloy wire (ϕ = 25.6μm) is near 11gf, and the shear strength is near 87.67MPa. However, the optimized interface has more mechanical bonding, the flatness of the bonding interface decreases. This situation could be improved, since heating on aluminum pad for a short-time could improve the shear strength.
When ultrasonic wire bonding on different substrates, aluminum pads cause short parameter range of the silver alloy wire (ϕ = 195μm) according to its lower hardness. Because silver is nickel-immiscible and softer than nickel, the nickel substrates were easily damaged by silver alloy wire during the ultrasonic wire bonding. Gold-nickel-copper pads is a workable choice for silver alloy wire on ultrasonic wire bonding. Gold is completely miscible with silver and its hardness is slightly less than that of silver, so gold-silver solid solution can lubricate the substrate to avoid damaging the structure of the substrate.
Comparing different wire (aluminum wire with the diameter of 200μm, silver alloy wire with the diameter of 195μm, 4N copper wire with the diameter of 195μm and 6N copper with the diameter of 195μm) bonding to the gold -nickel-copper pad, the wire pull strength of the silver alloy wire is maximum, and the shear strength of the silver alloy wire is slightly smaller than the copper wire. After 500 hours of annealing at 150 ℃, the wire pull strength of the silver alloy wire is slightly less than the 6N copper wire ,and the shear strength of the silver alloy wire is less than the 4N and 6N copper wire. However, since gold and silver generate a solid solution, the decline of the shear strength is smaller than the copper wire. This means the mechanical properties of the silver alloy wire is relatively stable.
After high-temperature annealing, the flatness of the interface has positive correlation with the diameter of the bonding wire. The shear strength and reliability get worse because the uneven bonding interface result in inhomogeneous growth of the IMCs.
|Appears in Collections:||材料科學與工程學系|
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