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標題: | 矽基紅外光譜偵測關鍵技術之研究 The Investigation of Si-based Infrared Spectrum Detection Critical Techniques |
作者: | Hung-Chieh Chuang 莊閎傑 |
指導教授: | 林清富(Ching-Fuh Lin) |
關鍵字: | 閃耀式光柵,可撓式彎曲光柵,矽基光偵測器,紅外光,矽基蕭特基二極體,局域表面電漿共振,超寬頻局域表面電漿共振, blazed grating,bendable grating,infrared,Si-based photodetector,Si-based Schottky diode,localized surface plasmon resonance,extremely broadband LSPR, |
出版年 : | 2017 |
學位: | 碩士 |
摘要: | 隨著工業科技日益蓬勃發展,於人類生活中逐漸充斥著各種汙染物,如農藥、空氣汙染、食品添加物與藥物,因此發展即時、隨身與高可信度之檢測裝置將成為未來生活安全的重要議題,於本論文中將提出如何以矽基奈微米技術搭配光譜檢測技術,發展隨身攜帶光譜檢測裝置,並以矽奈微米技術克服現有光譜檢測儀之笨重、昂貴、體積大、無法隨身攜帶等問題。
於本論文中將提出兩大研究主題:可撓式彎曲光柵與矽基超寬頻光偵測技術,首先以半導體製程技術發展成熟之矽基閃耀式光柵,並結合有機塑膠基板之轉印技術,將光柵結構完整轉印至塑膠基板上,此光柵不僅具備高可靠度之可撓性更同時擁有高效率之分光效果,同時具備分光與聚光之功能。另一則是以金屬半導體界面發展之蕭特基二極體光偵測元件,並透過金屬材料選擇、元件製程改善與元件偏壓操作之方式,成功製作出電性表現穩定且可應用於偵測1550奈米光通訊波段之光偵測元件。最後本研究將此光偵測元件導入局域表面電漿共振結構,全面提升元件之光電響應表現與拓寬元件偵測截止波長,於本論文中更設計出擁有超寬頻局域表面電漿共振之結構,成功突破以往局域表面電漿共振僅能窄頻誘發電漿子共振之限制。 本論文已成功研發出成熟且可靠之可撓式彎曲光柵、矽基超寬頻光偵測元件與其製程技術,並實際將此可撓式彎曲光柵應用於OPO可調頻雷射之分光光路中,於元件量測中,此光偵測元件已可應用於量測各種入射光強度與量測300 ~ 2700奈米之入射光訊號,此二成熟關鍵技術將為後續發展之可攜式氣體偵測器奠定良好研究基礎。不僅如此,本研究發展之超寬頻局域表面電漿結構將有極大潛力發展成下一世代之研究主軸題目。 With the increasingly vigorous development of industrial technology, human life is full of various contaminants, such as pesticides, air pollution, food additives and drugs. Therefore, it become a necessary issue to develop a detection device which is immediate, portable and highly reliable. In this thesis, we demonstrate a concept on how to develop a miniature smart spectrometers based on nano-micro semiconductor technologies and infrared (IR) detection techniques for a smart device which is user-friendly, low-cost, light-weight and portable. Here two main research subjects are studied; bendable grating and Si-based ultra-broadband detection technology. First, we develop a Si-based blazed grating by standard semiconductor process. Such a Si-based grating is used to collocate PDMS imprinting process to fabricate a PDMS-based bendable grating. This grating is equipped with the ability of reliable bending performance and high splitting efficiency. The other study is Schottky photodetector. With the metal selection, fabrication process and measurement mothed, we successfully produce a photodetector with stable IV-performance and be used to detect 1550 nm laser signal. Finally, this research combines the Schottky photodetector and localized surface plasmon resonance structure to form very broadband IR detectors. We can totally enhance the photo-responsivity and broaden the detection cutoff frequency of this Si-based Schottky photodetector. Furthermore, we design a structure which can induce a broadband LSPR in spectrum region. It overcomes the limit of traditional LSPR that only excites plasmon resonance in a narrow bandwidth. In summary, reliable bendable gratings and extremely broadband detection photodiodes are successfully developed. The bendable grating has been applied in splitting OPO tunable laser light. The broadband photodetector has been applied to detect 300 ~ 2700 nm spectrum region. These two critical techniques will lay a great groundwork for the future development of smart portable spectrum. Furthermore, the broadband LSPR structure in this research exhibits great potential for IR-detection in the next generation. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/77883 |
DOI: | 10.6342/NTU201702964 |
全文授權: | 有償授權 |
顯示於系所單位: | 光電工程學研究所 |
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