以微機電製程、三維列印成型、精密製造三種技術製作可調變立方角回射器與其陣列

Abstract

在本論文中，以微機電系統製程、三維列印成型、精密製造之三大技術製作可調變立方角回射器元件與陣列。 在微機電系統製程技術方面，首先設計三葉草型可調變立方角回射器元件，展示單顆立方角回射器元件的動態調變，並同時驗證以驅動鏡面破壞正交性作為訊號傳輸之可行性。其次，設計了蜈蚣型可調變立方角回射器元件，展示立方角回射器元件彼此可以相互倚靠、站立，形成1 × N的回射器陣列。接著，設計具有調變功能之旋轉驅動鏡面的1 × 3蝙蝠型可調變立方角回射器陣列，同時更進一步提出了N × N蝙蝠型可調變立方角回射器陣列之組裝概念。 在三維列印成型技術方面，以熱壓法製作可調變立方角回射器陣列，其製程步驟包括了：以市售反光片Arylic CCR作為母模，利用鑄模蠟翻成Wax CCR，經脫蠟鑄造後產生Metal CCR，經研磨、拋光後，以熱壓法對Printed CCR模型加壓加熱，最後，將經表面修飾的立方角回射器陣列翻模成PDMS CCR。此外，單獨針對熔融沉積成型的試片進行表面修飾實驗，其中包括了收縮率、反射率與表面粗糙度等數據量測。 在精密製造技術方面，首先設計以銑削加工製作的3D CCR，此3D CCR乃由數顆立方塊塔與對應之底座所組成。其次，設計以線切割加工製作的2D CCR，此2D CCR乃二維平面圖案經凹摺組裝後形成三維立體結構之可調變立方角回射器元件；過程中先以有限元素法對元件進行應力集中與結構力之靜態分析，同時也進行模態振形與簡諧激振之動態分析，接著利用光追跡軟體計算元件之回射效率；最後，將三種厚度(0.3、0.1、0.07 mm)的金屬鋼板加工製作成元件，組裝後並量測元件之正交性與回射效率。

In this dissertation, tunable corner cube retro-reflector (CCR) arrays fabricated by three methods of micro-electro-mechanica system (MEMS), three-dimensional (3D) printing, and precision machining technologies are presented. In MEMS field, firstly, a Clover CCR is developed. The dynamic modulation of a MEMS switchable single CCR is demonstrated and it can be used as the CCR tuning mechanism to break its orthogonality, making it possible to change on or off state of the CCR. Secondly, a Centipede CCR has been demonstrated that shows CCRs lean against each other and lining up the CCRs side by side to form a 1 × N array becomes possible. Thirdly, a 1  3 surface-micromachined of Bat CCR is designed. Tunability can be achieved by employing a drivable mirror as one of the CCR’s three mirrors. A novel idea of assembling an N  N CCR array is also proposed. In 3D printing field, a new fabrication to create CCR arrays by means of heating and pressing method is invented. Test specimens for reforming surfaces of fused deposition modeling (FDM) parts are investigated, and experiment data including shrinkage, reflectivity, and surface roughness is measured. In precision machining field, firstly, a milling machining 3D CCR is developed. Secondly, a wire electrical discharge machining (EDM) 2D CCR suspended on a cantilever beam are demonstrated. Static and dynamic mechanical modeling and optical ray tracing are performed. The displacement and tilt angle of the cantilever tip versus applied force and the retro-reflection efficiency versus tilt angle are calculated. Finally, CCR devices with three thicknesses (0.3, 0.1, and 0.07 mm) are tested; the orthogonality and optical efficiencies are measured.