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標題: | 以陽極氧化鋁及奈米球微影製程作仿生黏著結構 Fabrication of Biomimetic Dry-Adhesion Structures Using Anodic Aluminum Oxide and Nanosphere Lithography |
作者: | Po-Chun Kuo 郭柏均 |
指導教授: | 楊申語 |
關鍵字: | 無膠黏著,陽極氧化鋁,奈米球微影,氣體輔助熱壓, Dry adhesive,AAO,Nanosphere lithography,Gas-assisted hot embossing, |
出版年 : | 2017 |
學位: | 碩士 |
摘要: | 仿生黏著結構能夠應用於醫藥、民生、工業用途上,其具有多樣之未來發展可能性,目前大多使用生長奈米碳管或是孔洞模具進行結構複製得到所需的結構。本研究開發陽極氧化鋁模具及奈米球微影製程,來製作不同種類模具,應用氣輔熱壓複製出仿生黏著結構。
第一部分製作陽極氧化鋁孔洞模具,透過改變陽極氧化鋁過程中的電壓參數,進行兩次陽極氧化鋁製程,第一次及第二次的陽極處理皆以磷酸作為電解液,改變電壓參數得到不同孔洞間距的AAO模具。 第二部份透過自行架設之拉伸奈米球機台,以浸潤塗佈方式,製作規律排列單層500 nm及800 nm奈米球結構,藉改變基板材料為玻璃基板、PMMA基板、微米點狀陣列結構基板,能夠配合奈米球微影製程的蝕刻參數製作不同的結構,最終能夠得到奈米吸盤結構、柱狀結構及微奈米複合結構的模具。 接著以製作出來的四種模具為模進行結構複製,以PDMS為材料透過澆鑄方式及氣輔熱壓方式得到成品。最後,對複製成品進行黏著力及接觸角量測,以驗證試片對於PDMS之黏著力增強效果及抗汙效果。使用拉伸角度45˚、速度6 mm/s的自組裝800 nm奈米球規律結構經RIE 390秒後所得柱狀結構能使PDMS接觸角達135.2°,平均黏著力達4.0 N/cm2。此論文證實奈米球微影製程以快速、簡易、低成本方式製作仿生黏著結構的潛力。 Structure of biomimetic dry-adhesion has a variety of application. Many researchers used AAO, e-beam lithography, porous polymer and carbon nanotube to fabricate the microstructure for dry-adhesion. In this study, two approaches, namely anodic aluminum oxide process and nanosphere lithography process, were developed to fabricate the mold for microstructure. First, through two-step anodization process, AAO nanostructure were obtained using 0.1 M phosphoric acid as electrolyte. AAO templates with different pitches and pore diameter can be fabricated by changing the anodization voltage and the widening time. Second, nanosphere lithography was employed. Monolayer PS spheres template were assembled orderly on different substrate.Using the mechanism with step motor, it could stabilize the drag force in the dip coating process. By controlling tilt angle and lift speed, orderliness of self-assembled nanospheres can be improved. Reactive ion etching was then used to create structure of high aspect ratio by adjusting the etching time, micro-structure of different shaped can be fabricated. Then a Ni mold with inversed nanostructure were replicated by the electroforming process. Finally, using casting method and gas-assisted hot embossing method, the PDMS with high aspect ratio structure were fabricated. The results showed that, using nanosphere lithography structure with 1146 nm can enhance the adhesion force to 4.05 N/cm2 and the contact angle on the PDMS with nanostructure is 135.2°. This columnar structure can effectively enhance the adhesion ability and hydrophobicity of PDMS, demonstrating the potential of using the nanosphere lithography process for fast, simple and low cost to frabricate micro structure for adhesion and hydrophobicity. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/7703 |
DOI: | 10.6342/NTU201702641 |
全文授權: | 同意授權(全球公開) |
顯示於系所單位: | 機械工程學系 |
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