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標題: | 紅外線光譜儀微型化之設計與製作 Designing and Manufacturing of Miniaturization of the Infrared Spectrometer |
作者: | Shao-Chun Chen 陳紹淳 |
指導教授: | 林清富 |
關鍵字: | 繞射光柵,可撓,中紅外光,羅蘭圓,解析度,光譜儀, Diffraction grating,Flexible,Mid-infrared light,Roland circle,Resolution,Spectrometer, |
出版年 : | 2018 |
學位: | 碩士 |
摘要: | 隨著科技進步與人們生活方式的改變,環境汙染與食品安全問題已成為近年備受注重的議題,如甲醛、二氧化碳等氣體在一定的濃度下會造成人體的不適,又如農藥殘留、食品添加物等化學物質亦會危害人體的健康。然而現今仍無一種有效率且相對便宜的檢測技術供一般民眾對於居家常見未知物質來進行檢測;因此,本研究以光譜學的構想以及光路設計,搭配本團隊之製程技術開發紅外高解析度之微型化光譜儀,欲求達到「隨身攜帶」光譜檢測與「即時偵測」之目的。
本論文係以二維凹面光柵高解析度之光譜儀光學系統在3.5 μm ~ 4.5 μm進行設計與量測,而其共可分為三個主要部分。第一部分係利用MATLAB軟體自行撰寫以滿足「曲面反射條件」和「光柵分光條件」兩大因素下分析在不同物距、焦距、入射角度等起始變因下其最後分光且聚交的位置及其解析度之探討。並綜合該結果以最小解析度作為優化條件來找出在3.5 μm ~ 4.5 μm波段下之起始條件。第二部分則是建立在本研究團隊已成熟的半導體製程技術下,藉由一種高分子有機化合物利用轉印技術將所開發的矽基閃耀式光柵結構拓印在該軟性基板上,進而成功發展出低成本的可撓式彎曲光柵。而本研究所開發之轉印後的光柵不但同時兼具了「完美的可撓特性」與「很好的分光效果」,而且因其可撓程度不受限於單一曲率,促使本可撓光柵可應用層面將更廣泛,同時也相對地大幅降低了製作彎曲光柵的成本。最後第三部分為光譜儀系統的雛型建製與分辨二氧化碳氣體之檢測。綜觀前述,吾從最初之光路模擬與起始條件之選擇到低成本分光關鍵技術之研製以及最後光譜儀微型化製作與實際量測驗證,完整地製作了紅外光譜儀之雛型,並藉本研究應可奠定未來開發其它波段之微型光譜儀之基礎。 As technology progresses and human lifestyle changes, environmental pollution and food safety issues have become huge concerns in recent years. Pollutants such as formaldehyde, carbon dioxide and other gases might cause discomfort to human body when reaching a certain level of concentration. Other chemicals such as pesticide residues and food additives could also pose serious hazards to human health. Despite these potential risks, there still exists no efficient and relatively inexpensive detection technology for the general public to detect common but unknown substances. In this regard, this research is devoted to the development of infrared high-resolution detection by applying the concept of spectroscopy and optical path design. The miniaturized spectrometer is intended to achieve the purpose of “portable” and “real-time” spectral detection. This thesis investigates a high-resolution spectrometer optical system of two-dimensional concave grating designed and measures the spectrum at 3.5 μm ~ 4.5 μm. The first part in this thesis is based on the MATLAB software to realize the specular reflection condition” and “grating conditions, thus to further analyze the position of the final split and the intersection of different object distance, focal length, incident angle, and so on. The results are treated as an optimal condition to find the best condition in the 3.5 μm ~ 4.5 μm with the minimum resolution. The second part in this thesis is based on the mature semiconductor process technology developed by our research team, in which a low cost flexible curved grating is transferred onto the flexible polymer substrate by transfer technology. The transferred grating has the advantages of “perfect flexible characteristics” and “excellent spectroscopic effect.” Since the flexibility is not limited to a single curvature, it makes the flexible Grating applications be used more widely. In this sense, the cost of making curved gratings will be greatly reduced. The final part in this thesis discusses the manufacture of the spectrometer system prototype and the detection of carbon dioxide gas. Above all, from the initial selection of optical path simulation, the development of low-cost spectroscopic key technology to the final spectrometer miniaturization and actual measurement verification, I have completely produced the prototype of infrared spectrometer. This study should help lay the groundwork for the future development of miniature spectrometers in other wavelength ranges |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/7436 |
DOI: | 10.6342/NTU201803496 |
全文授權: | 同意授權(全球公開) |
電子全文公開日期: | 2023-08-23 |
顯示於系所單位: | 光電工程學研究所 |
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ntu-107-1.pdf | 6.47 MB | Adobe PDF | 檢視/開啟 |
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