用於酒精偵測的多波段紅外線發射器

Abstract

本論文主要研究將金屬柵欄嵌入波導型紅外線發射器的結構。主要構想為利用中間的金屬柵欄將原本存在的波導型表面電漿子模態分成兩個極化方向，另外再加上金屬柵欄與底層金屬互相耦合所產生的侷域型表面電漿子模態。這種新型的多波段紅外線發射器可以被應用在傳統的非色散式紅外線分析系統來降低系統的複雜度以及減少所需要耗費的能量。 酒精用的三波段窄頻紅外線發射器會被製作出來藉由在嵌有金屬柵欄的波導型紅外線發射器上添加額外的 金/二氧化鈦/金 三層島狀結構。這個額外的三層島狀結構可以產生一個侷域型的表面電漿子模態。藉由原本的波導型及侷域型的表面電漿子模態再加上額外添加的侷域型表面電漿子模態來實現三波段的窄頻紅外線發射器。

In this thesis, the metallic grating embedded in waveguide thermal emitter would be investigated. The grating embedded in the dielectric could split the waveguide mode into two polarization modes and the localized surface plasmon mode coupled between the grating layer and bottom metal layer would be generated. It can be applied in NDIR system to simply the complexity of the system and reduce the power consumption. The triple-wavelength narrow bandwidth infrared thermal emitter for alcohol would also be fabricated by adding the Au / TiO2 / Au island structure on top of the waveguide thermal emitter inserted by the metallic grating. This island structure could generate the localized surface plasmon mode. With two localized surface plasmon modes and one waveguide mode, the triple-wavelength emitter can be realized.