以電子束微影技術製作之二氧化鈦奈米線氣體感測器

Abstract

儘管製作使用於微氣相層析儀的感測器已經被廣泛地探討，使用電子束微影技術製作的奈米線感測層至今卻尚未被廣泛的研究。本論文的研究主要在於製作對乙醇有高靈敏度的奈米線感測器。我們結合了電子束微影和二氧化鈦薄膜沉積來製作奈米線，並且以製程技術製造形狀整齊規律的奈米線結構來當作氣體感測層。現今已經有文獻證明二氧化鈦感測層對有機揮發性氣體有高敏感度。我們使用電子束微影和光微影技術來製作二氧化鈦氣體感測器並比較奈米線感測器和微米線感測器對氣體的反應，結果顯示在相同溫度和氣體濃度下，奈米線感測器有較明顯的氣體反應。我們進一步在二氧化鈦感測層上面鍍上鉑以及在製程上增加退火來改善晶片的良率及靈敏度，並將感測器用於氣相層析儀上量測得到相當好的氣體反應結果。

While the development of detector for micro gas chromatography (μGC) has been extensively investigated, the fabricated nanowire sensing film with electron beam lithography technology is relatively unexplored. This thesis study is focusing on developing a highly sensitive nanowire detector. We combined e-beam lithography and TiO2 thin film deposition for nanowire fabrication, and designed engineered, well-aligned nanostructures for gas sensing film. The detector with TiO2 sensing film was proved to be sensitive to volatile organic compounds (VOC). We fabricated TiO2 detectors using both E-beam lithography and photolithography. In comparison with microwire detectors, nanowire detectors showed better performances at the same temperature and the same gas concentration. We further deposit the platinum on the TiO2 sensing film and added annealing in fabrication process to improve the yield. Great performances of these Pt-doped and annealed nanowire detectors were demonstrated through connecting to a commercial GC system.