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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 田維誠(Wei-Cheng Tian) | |
dc.contributor.author | Chao-Hao Chen | en |
dc.contributor.author | 陳晁豪 | zh_TW |
dc.date.accessioned | 2021-06-17T00:54:49Z | - |
dc.date.available | 2013-10-21 | |
dc.date.copyright | 2011-10-21 | |
dc.date.issued | 2011 | |
dc.date.submitted | 2011-09-30 | |
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dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/66742 | - |
dc.description.abstract | 儘管製作使用於微氣相層析儀的感測器已經被廣泛地探討,使用電子束微影技術製作的奈米線感測層至今卻尚未被廣泛的研究。本論文的研究主要在於製作對乙醇有高靈敏度的奈米線感測器。我們結合了電子束微影和二氧化鈦薄膜沉積來製作奈米線,並且以製程技術製造形狀整齊規律的奈米線結構來當作氣體感測層。現今已經有文獻證明二氧化鈦感測層對有機揮發性氣體有高敏感度。我們使用電子束微影和光微影技術來製作二氧化鈦氣體感測器並比較奈米線感測器和微米線感測器對氣體的反應,結果顯示在相同溫度和氣體濃度下,奈米線感測器有較明顯的氣體反應。我們進一步在二氧化鈦感測層上面鍍上鉑以及在製程上增加退火來改善晶片的良率及靈敏度,並將感測器用於氣相層析儀上量測得到相當好的氣體反應結果。 | zh_TW |
dc.description.abstract | While the development of detector for micro gas chromatography (μGC) has been extensively investigated, the fabricated nanowire sensing film with electron beam lithography technology is relatively unexplored. This thesis study is focusing on developing a highly sensitive nanowire detector. We combined e-beam lithography and TiO2 thin film deposition for nanowire fabrication, and designed engineered, well-aligned nanostructures for gas sensing film. The detector with TiO2 sensing film was proved to be sensitive to volatile organic compounds (VOC). We fabricated TiO2 detectors using both E-beam lithography and photolithography. In comparison with microwire detectors, nanowire detectors showed better performances at the same temperature and the same gas concentration. We further deposit the platinum on the TiO2 sensing film and added annealing in fabrication process to improve the yield. Great performances of these Pt-doped and annealed nanowire detectors were demonstrated through connecting to a commercial GC system. | en |
dc.description.provenance | Made available in DSpace on 2021-06-17T00:54:49Z (GMT). No. of bitstreams: 1 ntu-100-R98945047-1.pdf: 6578534 bytes, checksum: 59bcc7b2cf8d49fb69d4366b2f0a6327 (MD5) Previous issue date: 2011 | en |
dc.description.tableofcontents | 誌謝 II
Abstract III 中文摘要 IV List of Figures VII Chapter 1 Introduction 1 1.1 Objective 1 1.2 General Overview of Micro Gas Detectors 3 1.3 Metal Oxide Detector Sensing Mechanism 7 Chapter 2 Experimental Methods 11 2.1 The Equipments 11 2.1.1 Electron Beam Lithography 11 2.1.2 E-beam Evaporator 13 2.2 Electrode & Sensing Film Design on Si Chips 14 2.3 Fabrication Process 15 2.3.1 Fabrication of Nanowire Detectors 15 2.3.2 Fabrication of Microwire Detectors 20 2.3.3 Fabrication of Pt-doped TiO2 Sensing Film 24 2.3.4 Fabrication of annealed TiO2 Sensing Film 26 2.4 Equipment and Performance Testing 28 Chapter 3 Results and Discussion 31 3.1 X-ray Diffraction (XRD) analysis 31 3.2 Thermal Responses of TiO2 Detectors 33 3.3 Gas Responses of TiO2 Nanowire Detectors 37 3.4 Temperature Effect on Detector Performance 40 3.5 Concentration Effect on Detector Performance 41 3.6 Performances of Pt doped TiO2 Nanowire Detectors 42 3.7 Performances of annealed TiO2 Nanowire Detectors 50 Chapter 4 Conclusions and Future Work 65 References 67 | |
dc.language.iso | en | |
dc.title | 以電子束微影技術製作之二氧化鈦奈米線氣體感測器 | zh_TW |
dc.title | Development of TiO2 Nanowire Detectors Fabricated by Electron Beam Lithography Technology | en |
dc.type | Thesis | |
dc.date.schoolyear | 100-1 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 呂家榮(Chia-Jung Lu),宋孔彬(Kung-Bin Sung) | |
dc.subject.keyword | 二氧化鈦,奈米線,氣體感測器,電子束微影,微氣相層析儀,電子束蒸鍍, | zh_TW |
dc.subject.keyword | TiO2,nanowire,gas detector,E-beam lithography,micro gas chromatography,E-beam evaporation, | en |
dc.relation.page | 69 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2011-09-30 | |
dc.contributor.author-college | 電機資訊學院 | zh_TW |
dc.contributor.author-dept | 生醫電子與資訊學研究所 | zh_TW |
顯示於系所單位: | 生醫電子與資訊學研究所 |
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