金屬介電質奈米複合光柵結構之表面電漿性質

Abstract

由於奈米金屬結構的表面電漿性質,可使光聚縮到奈米等級、操控 表面電場分佈等諸多光學特性,電漿子學在奈米光子學的領域中有非 常好的應用前景,這篇論文我們將探討金屬介電質奈米複合光柵結構 的表面電漿性質,並提出利用奈米壓印顯影術製作此大面積特殊結構 的方法。在實驗與模擬變入射角反射光譜的分析中,發現此結構有位 於可見光波段的法布裡 -珀羅共振性質,且與理論有相當好的一致性, 也對表面電漿極化子與法布裡 -珀羅共振的電漿子偶合現象做出定性的 解釋。此元件的共振腔結構具有強電場增強、高品質因子及高敏感度 的特性,在電漿子積體電路、生物感測元件或原子陷阱等應用方面有 很好的潛力。

Plasmonics metallic nanostructures can confine and manipulate light down to nanoscale, and give promising scenarios for nanophotonic applications. In this thesis, we have designed and fabricated a new hybrid nanostructure, dielectric-embedded metallic grating, via large patterning nanoimprimt lithog- raphy technique. The plasmonics properties of Fabry-Perot resonance in such device are investigated both experimentally and theoretically. The anticross- ing behavior due to the strong coupling between the surface plasmon polari- tons and Fabry-Perot resonace is observed and explained qualitatively quite well. Our newly designed geometry possesses high electric field enhance- ment, high quality factors and great sensitivity, which will open up a new potential in applications such as integrated plasmonic circuits, bio sensing, atom-trap, etc.