以嵌入式系統控制單層雙軸定位平台之系統控制設計

Abstract

現今隨著高科技產業的蓬勃發展，對於精密定位平台達成高精度、高速度等性能的要求日益升高，精密定位技術成為眾多科公司研發投入的目標之一。 對此，本論文旨在探討針新穎的單層雙軸精密定位平台的控制策略。為解決二維平面運動在同一層之中所具有的機構耦合問題，研究可行的控制架構，並以數位訊號處理器實現嵌入式系統控制。 本論文研究了一般能達成單軸同步運動的控制理論，探討其中最適用於本論文所研究之平台的控制方式。將控制理論應用於本系統的過程之中，首先應用於一維運動的單軸雙平行馬達定位控制，驗證控制理論於本系統的可行性，再實現二維運動的雙軸雙平行馬達於單層的定位控制。最後根據本新穎機構的特性加以精進控制策略，有效達到良好的控制系統穩定性，使控制性能更臻於完善。

The requirement for accuracy and velocity of precision positioning stage are increasing with the thriving high-tech industry. The precision-positioning approaches are becoming one of the techniques what various high-tech companies are investing to vigorously. Therefore, the research aims at exploring a control strategy for a novel single-deck, dual-axis precision-positioning stage. To resolve the problem to mechanical coupling in the single deck where two-dimension motion occurs, the research studies for a feasible control structure, and realizes the embedded system control with digital signal processor. The research studies for a general theory of single-axis synchronized motion control and explores the most suitable method for the positioning stage. Firstly, in the progress of implementing the control system, the research utilizes the controller in one-dimension motion system and confirms the feasibility of control theory for the system. Secondly, the research implements the positioning control in two-dimension motion system of single-deck structure. In the end, the research ameliorates the control strategy according to the property of novel mechanism, achieves the great stability of control system, and perfects the control performance eventually.