雙光子聚合微製造之材料與製程最佳化

Abstract

本文研究雙光子微製造之材料與製程最佳化，所建立之雙光子聚合製造系統使用低成本的130kHz高頻率Nd:YAG雷射，另需要使用兩種不同物鏡的光學顯微鏡，其中一個物鏡之放大倍率為100倍、數值孔徑為1.3，另一個物鏡之放大倍率為50倍、數值孔徑為0.8。雙光子聚合製造使用兩種不同之材料，分別是Photomer 3015以及ORMOCOMP。首先，在不同材料與物鏡組合下，以各種不同製造參數製造一系列直線，再藉由這些直線之高解析度電子顯微鏡影像，以量測所製造線之橫向及縱向解析度。從線製造結果擬合獲得的雙光子聚合製程特性，可和使用PSF Lab軟體得到的模擬結果進行比較。接著，基於線製造之實驗所得結果，已成功製造數個微型產品，不同材料及不同物鏡所製造出的微透鏡皆具有將光線聚焦以及物體成像的功能。最後成功製造出13x13之微透鏡陣列，其陣列尺寸為1.3mm x 1.3mm；此外微型光柵、微型台北101、微型馬等也已製造完成並擁有好品質。

This thesis studies the optimization of materials and fabrication process for micro fabrication by Two-Photon Polymerization (TPP). The established TPP fabrication system uses a low-cost 130kHz high repetition rate Nd:YAG laser. In addition, an optical microscope with two different objective lenses is required. One objective lens has magnification of 100 times (100x) with numerical aperture (NA) of 1.3, the other is 50x-NA0.8. Two different materials, Photomer 3015 and ORMOCOMP are used in TPP production. First, a series of lines are fabricated with various manufacturing parameters under different combination of material and objective lens. From measurement of high resolution scanning electronic microscope (SEM) images of these lines, the lateral and longitudinal resolutions of lines can be obtained. The characterization of TPP process obtained from fitting of line fabrication results can be compared with simulation result obtained from PSF Lab software. Then, based on the information provided from the experiment of line fabrication, several micro products are fabricated successfully. Micro lenses are fabricated with different combination of materials and objective lenses, and they are able to focus the light and image objects. Finally, a 13x13 micro lens array (MLA) with size 1.3mm x 1.3mm are fabricated. Furthermore, micro grating, micro Taipei 101, and micro horse are also fabricated with good quality.