噴墨式二氧化氮感測材料之研發

Abstract

二氧化氮為一嚴重的空污氣體，偵測其濃度自然成為現今環保與綠能的一大課題。上世紀九零年代人類即開始使用具有簡單製程、低成本、低溫操作特性的高分子材料進行二氧化氮的感測。本論文利用半導體製程與自行架設之噴墨系統，在金電極上合成聚比各並以此作為感測材料，由於聚比各溶劑具有高毒性，故採取分別噴印氯化鐵以及比各並讓其在晶片上聚合。透過參雜氧化鋅鋁以及氧化鐵的奈米粒子，感測元件的穩定度與反應量有顯著的提升。此外，與濕度有關的討論亦在文中提及，以期在噴墨式感測陣列中，能藉由各感測元件的聯立解，達到互相校正的效果。此方法可解決有機高分子材料選擇性較低的問題，提升其經濟價值。

Nitrogen dioxide(NO2) is a severe air pollutant. It is a significant problem to detect the concentration of nitrogen dioxide for an eco-friendly environment. In 1990's, researchers had developed a NO2 sensor that made by organic material. It had the advantage of simple process, low cost and low operation temperature. In this paper, our group has set up an inkjet printing system that operate at room temperature. We use this system to develop a NO2 sensor by polypyrrole on gold electrode. However, the common polypyrrole solvent is toxic, we have to print ferric chloride and pyrrole monomer separately and synthesis on the chip. By adding Al-doped zinc oxide(AZO) and ferric oxide, the sensor's stability and sensitivity is improving. Also, the effect of humidity is also discussed. If different sensing materials is printed on one chip, each sensor can calibrate with each other to solve the selectivity problem. The gas sensors have big potential in various application.