常壓電漿燒結氮化鋁/奈米碳管複合材料

Abstract

本研究成功利用網印法和常壓噴射電漿燒結出氮化鋁/奈米碳管複合材料，氮化鋁/奈米碳管複合材料漿料是由氮化鋁奈米粉末、奈米碳管、乙基纖維素和無水萜品醇混合而成，漿料網印至基板後，再利用常壓噴射電漿進行燒結。由光放射頻譜可知CN violet譜系放射強度隨著燒結時間增加而快速先增加再衰減，且常壓噴射電漿顏色會由藍紫色轉變為粉紅色，表示氮氣常壓噴射電漿和漿料中的含碳化合物反應劇烈，反應由開始到結束所需時間約4 ~ 6 s；由掃描式電子顯微鏡照片可知，氮化鋁/奈米碳管複合材料經由常壓噴射電漿燒結後會呈現多孔隙結構，氮化鋁/5 wt%奈米碳管複合材料經常壓噴射電漿燒結5 s和10 s時，可清楚看到奈米碳管分散在複合材料表面，燒結30 s和60 s時則難以觀察到奈米碳管，表示表面的奈米碳管會被常壓噴射電漿移除；由X射線繞射頻譜可知，氮化鋁/奈米碳管複合材料中的氮化鋁呈現六方晶體結構；由導電率隨常壓電漿處理時間變化圖可知，氮化鋁/5 wt%奈米碳管複合材料之導電率會隨常壓噴射電漿燒結時間增加會先上升而後下降，常壓噴射電漿燒結之氮化鋁/5 wt%奈米碳管複合材料具有良好抵抗感應耦合電漿能力，複合材料提升之導電率可避免電弧放電、表面電荷累積發生。此一常壓噴射電漿快速燒結製程製作單位面積鍍層所需能量僅約傳統爐管燒結的1/3至1/5，為一低能源消耗、省時間且低成本的綠色製程。

A nanoporous AlN/CNT composite is successfully sintered using an atmospheric-pressure plasma jet (APPJ). The screen printing pastes were made by mixing AlN nanoparticles, CNTs, ethyl celluloses, and terpineol. Optical emission spectroscopy (OES) results indicate that the CN violet emission intensity rapidly increases and then decreases owing to the vigorous interaction between the nitrogen APPJ and the organic compounds in the printed pastes. The processing time can be as short as 4-6 s. Nanoporous feature is clearly revealed in SEM images after APPJ sintering process. The AlN in an APPJ sintered AlN/CNT composite shows a pure hexagonal crystal structure. Because the vigorous interaction may over-burn the CNTs, the conductivity of AlN/5 wt%CNT composite first increases and then decreases as the APPJ sintering duration increases. APPJ-sintered AlN/5 wt%CNT composites exhibit good CF4 inductively coupled plasma erosion resistant property. APPJ sintering is an energy- and time-saving green fabrication process. The required energy per unit processing area is estimated to be ~1/5-1/3 that of the conventional furnace sintering process.