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| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 陳建彰 | |
| dc.contributor.author | Yi-Fan Chiu | en |
| dc.contributor.author | 丘一汎 | zh_TW |
| dc.date.accessioned | 2021-06-15T12:45:01Z | - |
| dc.date.available | 2021-06-01 | |
| dc.date.copyright | 2016-10-14 | |
| dc.date.issued | 2016 | |
| dc.date.submitted | 2016-07-25 | |
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| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/50535 | - |
| dc.description.abstract | 本研究成功利用網印法和常壓噴射電漿燒結出氮化鋁/奈米碳管複合材料，氮化鋁/奈米碳管複合材料漿料是由氮化鋁奈米粉末、奈米碳管、乙基纖維素和無水萜品醇混合而成，漿料網印至基板後，再利用常壓噴射電漿進行燒結。由光放射頻譜可知CN violet譜系放射強度隨著燒結時間增加而快速先增加再衰減，且常壓噴射電漿顏色會由藍紫色轉變為粉紅色，表示氮氣常壓噴射電漿和漿料中的含碳化合物反應劇烈，反應由開始到結束所需時間約4 ~ 6 s；由掃描式電子顯微鏡照片可知，氮化鋁/奈米碳管複合材料經由常壓噴射電漿燒結後會呈現多孔隙結構，氮化鋁/5 wt%奈米碳管複合材料經常壓噴射電漿燒結5 s和10 s時，可清楚看到奈米碳管分散在複合材料表面，燒結30 s和60 s時則難以觀察到奈米碳管，表示表面的奈米碳管會被常壓噴射電漿移除；由X射線繞射頻譜可知，氮化鋁/奈米碳管複合材料中的氮化鋁呈現六方晶體結構；由導電率隨常壓電漿處理時間變化圖可知，氮化鋁/5 wt%奈米碳管複合材料之導電率會隨常壓噴射電漿燒結時間增加會先上升而後下降，常壓噴射電漿燒結之氮化鋁/5 wt%奈米碳管複合材料具有良好抵抗感應耦合電漿能力，複合材料提升之導電率可避免電弧放電、表面電荷累積發生。此一常壓噴射電漿快速燒結製程製作單位面積鍍層所需能量僅約傳統爐管燒結的1/3至1/5，為一低能源消耗、省時間且低成本的綠色製程。 | zh_TW |
| dc.description.abstract | A nanoporous AlN/CNT composite is successfully sintered using an atmospheric-pressure plasma jet (APPJ). The screen printing pastes were made by mixing AlN nanoparticles, CNTs, ethyl celluloses, and terpineol. Optical emission spectroscopy (OES) results indicate that the CN violet emission intensity rapidly increases and then decreases owing to the vigorous interaction between the nitrogen APPJ and the organic compounds in the printed pastes. The processing time can be as short as 4-6 s. Nanoporous feature is clearly revealed in SEM images after APPJ sintering process. The AlN in an APPJ sintered AlN/CNT composite shows a pure hexagonal crystal structure. Because the vigorous interaction may over-burn the CNTs, the conductivity of AlN/5 wt%CNT composite first increases and then decreases as the APPJ sintering duration increases. APPJ-sintered AlN/5 wt%CNT composites exhibit good CF4 inductively coupled plasma erosion resistant property. APPJ sintering is an energy- and time-saving green fabrication process. The required energy per unit processing area is estimated to be ~1/5-1/3 that of the conventional furnace sintering process. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-15T12:45:01Z (GMT). No. of bitstreams: 1 ntu-105-R03543003-1.pdf: 4620956 bytes, checksum: d9b65105b669bffc0a6f05d25f3fb39f (MD5) Previous issue date: 2016 | en |
| dc.description.tableofcontents | 致謝 i
中文摘要 ii ABSTRACT iii 目錄 iv 圖目錄 vii 表目錄 x 第一章 緒論 1 1.1 前言 1 1.2 研究動機 2 1.3 論文架構 3 第二章 理論與文獻回顧 4 2.1 常壓電漿 (Atmospheric pressure plasma, APP) 4 2.1.1 電漿簡介 4 2.1.2 電漿組成 4 2.1.3 電漿生成 5 2.1.4 電漿碰撞 6 2.1.5 常壓電漿種類 8 2.2 氮化鋁 (Aluminium nitride, AlN) 9 2.2.1 簡介 9 2.2.2 結構與化學特性 10 2.2.3 導電特性 11 2.2.4 光學特性 11 2.3 奈米碳管 (Carbon nanotubes, CNTs) 12 2.3.1 簡介 12 2.3.2 結構與特性 13 2.3.3 製備方式 14 第三章 實驗方法 16 3.1 實驗藥品與儀器 16 3.2 製程儀器與原理 18 3.2.1 迴旋濃縮機 (Rotary evaporator) 18 3.2.2 網版印刷機 (Screen print machine) 19 3.2.3 常壓噴射電漿 (Atmospheric pressure plasma jet, APPJ) 20 3.2.4 電子束蒸鍍機 (E-beam evaporator) 22 3.2.5 感應耦合電漿機 (Inductively coupled plasma, ICP) 23 3.3 量測儀器與原理 24 3.3.1 光放射光譜儀 (Optical emission spectroscopy) 24 3.3.2 掃描式電子顯微鏡 (Scanning electron microscopy, SEM) 25 3.3.3 X射線繞射儀 (X-ray diffraction, XRD) 27 3.3.4 紫外光/可見光光譜儀 (UV-VIS-NIR spectrometer) 28 3.3.5 電性量測 (Electrical measurement) 29 3.4 實驗流程 30 3.4.1 基板清洗 30 3.4.2 氮化鋁/奈米碳管複合材料漿料配製 31 3.4.3 氮化鋁/奈米碳管複合材料試片製備流程 32 3.4.4 電性量測試片製作 33 3.4.5 電漿蝕刻試片製作與電漿參數 34 第四章 實驗結果與討論 35 4.1 常壓噴射電漿之燒結溫度 35 4.2 常壓噴射電漿之光放射光譜分析 36 4.3 氮化鋁/奈米碳管複合材料之表面型態 39 4.4 氮化鋁/奈米碳管複合材料之晶體結構分析 43 4.5 氮化鋁/奈米碳管複合材料之光學性質分析 46 4.6 氮化鋁/奈米碳管複合材料之電性分析 49 4.7 氮化鋁/奈米碳管複合材料經感應耦合電漿蝕刻後之電性分析 50 4.8 氮化鋁/奈米碳管複合材料之抗感應耦合電漿蝕刻分析 51 第五章 結論與未來展望 53 附錄 A：常壓電漿燒結奈米多孔隙氮化鋁 54 附錄 B：電子束蒸鍍法沉積氮化鋁 62 附錄 C：3D列印微流體感測晶片 67 參考文獻 76 | |
| dc.language.iso | zh-TW | |
| dc.subject | 奈米多孔性材料 | zh_TW |
| dc.subject | 常壓噴射電漿 | zh_TW |
| dc.subject | 奈米碳管 | zh_TW |
| dc.subject | 氮化鋁 | zh_TW |
| dc.subject | 陶瓷 | zh_TW |
| dc.subject | 奈米多孔性材料 | zh_TW |
| dc.subject | 常壓噴射電漿 | zh_TW |
| dc.subject | 奈米碳管 | zh_TW |
| dc.subject | 氮化鋁 | zh_TW |
| dc.subject | 陶瓷 | zh_TW |
| dc.subject | ceramics | en |
| dc.subject | AlN | en |
| dc.subject | carbon nanotubes | en |
| dc.subject | atmospheric pressure plasma jet | en |
| dc.subject | nanoporous materials | en |
| dc.subject | ceramics | en |
| dc.subject | AlN | en |
| dc.subject | carbon nanotubes | en |
| dc.subject | atmospheric pressure plasma jet | en |
| dc.subject | nanoporous materials | en |
| dc.title | 常壓電漿燒結氮化鋁/奈米碳管複合材料 | zh_TW |
| dc.title | Atmospheric-Pressure-Plasma-Jet Sintered Nanoporous AlN/Carbon Nanotube Composites | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 104-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 陳林祈,張世航,陳奕君 | |
| dc.subject.keyword | 氮化鋁,奈米碳管,常壓噴射電漿,奈米多孔性材料,陶瓷, | zh_TW |
| dc.subject.keyword | AlN,carbon nanotubes,atmospheric pressure plasma jet,nanoporous materials,ceramics, | en |
| dc.relation.page | 84 | |
| dc.identifier.doi | 10.6342/NTU201601241 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2016-07-26 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 應用力學研究所 | zh_TW |
| 顯示於系所單位： | 應用力學研究所 | |
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