藍光雷射聚焦探頭於邊緣觸發超解析度之研究

Abstract

本研究發展出一套高精度的藍光雷射聚焦探頭系統，包括非接觸式探頭和精密定位平台。探頭部份以市售的藍光光碟機內之光學讀取頭為光路基礎，其聚焦之方式為像散法，利用聚焦曲線之線性區域與位置進行對應，來判斷待測物與讀寫頭之相對距離，此探頭系統具有22nm的準確度。 精密定位平台採用超音波馬達直接驅動平台，搭配高精度之雷射繞射式光學尺，50倍細分電路，此精密定位平台精度可達到60 nm。

In this research, a high-precision blue laser focus probe system was developed. The system includes non-contact measurement probe and precision positioning stage. The measurement probe is based on the optical pick-up head of blu-ray player. Because the focus principle of optical-pickup head is astigmatic method, the linear region of the focus range could correspond the position of workpiece and OPU. The precision positioning stage is actuated by the ultrasonic motor and with laser diffraction grating interferometer and the 50x interpolator circuit. The accuracy of blue laser focus probe is 22 nm and the accuracy of precision positioning stage is 60 nm.