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| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 范光照 | |
| dc.contributor.author | Chia-Wei Chen | en |
| dc.contributor.author | 陳家葦 | zh_TW |
| dc.date.accessioned | 2021-06-15T06:47:03Z | - |
| dc.date.available | 2016-07-06 | |
| dc.date.copyright | 2011-07-06 | |
| dc.date.issued | 2011 | |
| dc.date.submitted | 2011-06-14 | |
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| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/48135 | - |
| dc.description.abstract | 本研究發展出一套高精度的藍光雷射聚焦探頭系統，包括非接觸式探頭和精密定位平台。探頭部份以市售的藍光光碟機內之光學讀取頭為光路基礎，其聚焦之方式為像散法，利用聚焦曲線之線性區域與位置進行對應，來判斷待測物與讀寫頭之相對距離，此探頭系統具有22nm的準確度。
精密定位平台採用超音波馬達直接驅動平台，搭配高精度之雷射繞射式光學尺，50倍細分電路，此精密定位平台精度可達到60 nm。 | zh_TW |
| dc.description.abstract | In this research, a high-precision blue laser focus probe system was developed. The system includes non-contact measurement probe and precision positioning stage. The measurement probe is based on the optical pick-up head of blu-ray player. Because the focus principle of optical-pickup head is astigmatic method, the linear region of the focus range could correspond the position of workpiece and OPU. The precision positioning stage is actuated by the ultrasonic motor and with laser diffraction grating interferometer and the 50x interpolator circuit. The accuracy of blue laser focus probe is 22 nm and the accuracy of precision positioning stage is 60 nm. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-15T06:47:03Z (GMT). No. of bitstreams: 1 ntu-100-R97522716-1.pdf: 3972813 bytes, checksum: 73aba7d51fe31b01c36b7194ad765eb3 (MD5) Previous issue date: 2011 | en |
| dc.description.tableofcontents | 誌謝 i
中文摘要 ii Abstract iii 目錄 iv 圖目錄 vi 表目錄 x 第一章 緒論 1 1-1 研究動機 1 1-2 文獻回顧 2 1-3 研究方法與內容概要 10 第二章 光學讀取頭的感測原理與應用 12 2-1 光學讀取頭相關文獻回顧 12 2-2 光學讀取頭之結構與元件介紹 15 2-3 光學讀取頭量測原理和應用 22 第三章 藍光雷射聚焦探頭系統 36 3-1 藍光雷射聚焦探頭系統簡介 36 3-2 雷射聚焦探頭奈米定位系統簡介 40 3-3 雷射聚焦探頭性能測試 48 第四章 雷射聚焦探頭應用於邊緣觸發 54 4-1 邊緣量測相關文獻 54 4-2 雷射聚焦探頭於邊緣處發之理論推導 59 4-3 實驗結果 64 第五章 結論與未來展望 71 5-1 結論 71 5-2 未來展望 71 參考文獻 73 附錄A SIOS雷射干涉儀規格 77 附錄B SUNNYTEC PZT規格 79 附錄C NI-DAQ 6229規格 81 附錄D AISYS Camera U130C 82 附錄E NANOMOTION AB2 Driver 83 | |
| dc.language.iso | zh-TW | |
| dc.subject | 像散法 | zh_TW |
| dc.subject | 藍光光學讀取頭 | zh_TW |
| dc.subject | 雷射聚焦探頭 | zh_TW |
| dc.subject | 邊緣觸發 | zh_TW |
| dc.subject | Blue compatible optical head | en |
| dc.subject | Astigmatic method | en |
| dc.subject | Edge detection | en |
| dc.subject | Laser focus probe | en |
| dc.title | 藍光雷射聚焦探頭於邊緣觸發超解析度之研究 | zh_TW |
| dc.title | Research of Blue Laser Focus Probe on Super Resolution Edge Detection | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 99-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 覺文郁,朱志良 | |
| dc.subject.keyword | 藍光光學讀取頭,雷射聚焦探頭,邊緣觸發,像散法, | zh_TW |
| dc.subject.keyword | Blue compatible optical head,Laser focus probe,Edge detection,Astigmatic method, | en |
| dc.relation.page | 84 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2011-06-15 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
| 顯示於系所單位： | 機械工程學系 | |
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