氧化鋁與水氣對不鏽鋼基板成長高排列性奈米碳管叢之研究

Abstract

由於奈米碳管具有優異的機電、熱傳性質，因此受到廣泛地研究，進而開始應用到電極與各式感測器上，而上述應用大多需要可導電的基板。不鏽鋼(SS 304)之所以會成為熱門的基板人選，是因為它本身組成含有大量的鐵，而且經過一些處理之後，這些鐵就能裸露出來，具有催化奈米碳管析出的活性。如果能直接在金屬基板上成長碳管叢，勢必能提升電極與碳管間的附著性以及獲得更好地電子/熱量傳輸。 發展一套簡單有效而且能直接在不鏽鋼基板上成長碳管叢的製程是相當重要的。在金屬基板上成長碳管叢目前已經有許多的方法提出，但是大多數成長效果都有限，而且製程也相當複雜。因此，本研究針對如何直接在不鏽鋼基板上成長高排列性與高良率的碳管叢進行探討。 本製程利用容易架設的水輔助化學氣相沉積法，加上氧化鋁緩衝層，可以成功地在不鏽鋼基板上直接成長高排列性與高良率的碳管叢。此外，因為二茂鐵裂解後可同時做為碳源、鐵催化劑與填鐵材料，所以在成長過程中加入二茂鐵，可以成功地在不鏽鋼基板上直接成長填鐵碳管叢。

Carbon nanotubes (CNTs) are widely studied and are starting to be used for electrode and sensor applications. In such cases, a conducting substrate is most often required. Particularly, stainless steel (SS) seems an attractive candidate for CNT growth due to its high iron content and the possibility to tailor active sites for the growth process. A direct growth of the CNT on the bulk metal substrate should enhance the adherence of the tube to the electrodes and favor a better electron/thermal transfer. A facile and robust method to grow CNT forests directly on SS substrates will be important. Methods to grow CNT forests directly on metal substrates have been explored previously, but these entailed certain limitations or complicated processes. Therefore, it will be critical to develop a facile method for growing vertically-aligned CNT forests of high quality directly on SS substrates. In this research, we demonstrate that CNT forests can be successfully synthesized on SS 304 by a simple water-assisted CVD with Al2O3 buffer layer as pattern. In addition, we demonstrate that iron-filled CNT forests can be successfully synthesized on SS 304 by adding ferrocene, which serves as carbon source, catalyst, and iron-filled material.