調控金奈米週期性結構之表面電漿共振效應以增強聚三己基噻吩與聚甲基丙烯酸甲酯混摻材料光學性質之研究

Abstract

隨著半導體科技不斷進步，電子元件尺寸縮小化為技術之重點與趨勢，而傳統製程在進入奈米領域後面對了更多挑戰。在尋找解決方法的過程中，電子束微影術由於其高解析度以及無光罩直寫之優勢，而成為世人注目之焦點。為此，必須進行高解析度、熱穩定性佳、價格低廉、多功能之電子束光阻之研究開發。本研究建構了具有週期性結構之聚三己基噻吩與聚甲基丙烯酸甲酯(P3HT:PMMA)混摻材料P3HT:PMMA 為一種新穎之可發光型電子束光阻，其具有良好之熱穩定性，應用在電子束微影術中具有良好之解析度以及應用性。並使用熱蒸鍍來製備覆蓋於P3HT:PMMA 表面之金薄膜。並利用結構之設計來調控表面電漿共振效應，進而增強P3HT:PMMA/Au 混摻材料之光學性質。本研究進行比較顯微薄膜量測系統之消光光譜量測，以及共焦距顯微鏡之平面定位掃描兩種光學量測之異同，進而探討表面電漿共振效應之性質。而由不同結構之消光曲線，得到結構之間距離越近，共振效應越強之結果。此外，利用拉曼散射光譜平面定位掃瞄，可判別週期性結構與無結構區域之間的差異性，因表面電漿效應影響使得產生的拉曼散射光譜增強約500 倍左右。另外，本研究改變旋鍍時之旋轉速度以改變P3HT:PMMA 光阻之膜厚，而 探討表面電漿共振效應中，介電物質之厚度對光學性質之影響。結果為發現厚度增加，其消光光譜峰值產生紅移現象。除此之外，本研究提供FDTD 理論計算之結果，驗證與實驗量測之結果互相匹配。

Traditional semiconductor fabrication processes have faced enormous challenging when the electronic devices become nanoscaled. Because of the high resolution and mask-free fabrication, E-beam lithography has become one of the most popular in next generation fabrications. Therefore, the research of high resolution, thermal stable, low cost and muti-function e-beam resist are necessary. This research have fabricated poly-(3- hexylthiophene), polymethylmethacrylate (P3HT:PMMA) hybrid film with periodic structure which is a photoluminence e-beam resist with good thermal stability and high resolution. After thermal evaporate a gold film to cover the surface, we can modulating the surface plasmon resonance of periodic structure to enhance the optical properties of P3HT:PMMA/Au hybrid materials. We compared the difference between extinction measurement and confocal mapping to discuss the properties of surface plasmon resonance. The resonance effect is increased with increasing hole diameter. The difference between patterned and non-patterned area could identified easily by Raman mapping images, moreover, the intensity of Raman spectra of patterned P3HT:PMMA/Au film has been increased about 500 times compared with P3HT:PMMA film. In addition, we alter the spin speed of spin coater to modulate the thickness of P3HT:PMMA and discuss the influence on optical properties. The peak of extinction spectra is red shifted with increasing the thickness of P3HT:PMMA. Our experimental data are consistent with theoretical FDTD calculation.