高分子製作V型微流道之研究及在可撓式微熱管上之應用

Abstract

本篇文章提出了V型微流道的研究及其在可撓式微熱管的應用。V型微流道是以聚氨酯(PU)在矽模上進行圖型轉移製作而成。而矽模則是以曝光顯影搭配定向蝕刻產生共軛V型槽於矽晶元上。而此V型流道在微熱管中是應用於毛細結構。整個可撓式微熱管是以聚氨酯(PU)構成，此外在蒸發及冷凝端加入具有立方結構的鋁片增加熱傳遞的效果，也增加與聚氨酯結構的接觸面積，提升附著的效果。為了使微熱管可以正常運作，測量了不同流體在聚氨酯試片上的接觸角，以及進行了不同流體的毛細測試來評估其抵抗重力的能力。而甲醇被選為適合的工作流體，並且進行了在V型微流道中的毛細蒸發測試，在有加熱源的情況下針對了不同傾斜角度量測其所能爬升的高度。

This work presents the investigations of the V-shaped microchannels and its application on the flexible micro heat pipe. The V-shaped microchannel structure is fabricated by polyurethane (PU) from pattern transfer. The lithography and orientation dependent etching is applied to silicon substrate to fabricate the mold with conjugated V-shape grooves. The whole flexible micro heat pipe is composed of PU structure, and the microchannel structure is applied to the micro heat pipe as the wick section. In addition, the aluminum plates with cubic structure are embedded in the micro heat pipe to increase the heat transfer ability at the condenser and evaporator. The design of the cubic structure could increase the contact area which enhanced the bonding with the polyurethane structure. To find the adequate working fluid, the contact angle of different fluids are measured and capillary test are applied. And the different criterions are also utilized. The methanol is chosen as the adequate working fluid. And the capillary evaporation is applied to the V-shaped microchannel structure with methanol as the testing fluid to measure the dry-out length under different tilting angles.