高科技廠房之設備及管線振動量測系統

Abstract

隨著高科技產業在台灣蓬勃發展，半導體及光電顯示產業更已成為台灣重要經濟支柱。由於半導體製程的進步，導致高科技廠之製程設備對微振動控制要求更加嚴格。不過目前潔淨室裡針對振動較敏感儀器工作環境之微振設計技術仍須依賴國外顧問公司，因此透過振動量測分析對於振源與振動傳遞性能的瞭解，將有助於環境微振動的掌握，對於未來廠房在設計規劃時，也能作為相關的參考。 為了探討高科技廠房內微振動的來源與隔振狀況，本文進行現地量測，並建立一套精確、迅速、有效率的量測訊號處理系統，來分析振動量測之數據。本文以LabVIEW環境建立一套即時量測及分析系統，應用LabVIEW系統的圖示指令，建立圖形化使用者介面，增加量測與分析時的操作簡便性，可將量測數據進行快速傅立葉轉換、短時傅立葉轉換、功率頻譜密度及三分之ㄧ倍頻頻譜，以時頻譜等轉換作為試驗量測結果進行不同方式判斷振動訊號所蘊含之動態特性準則，包括振動發生之頻率與振動量。 本研究針對馬力較大、振動量較高之動力幫浦及其冷卻水輸送管線進行振動量測及分析，期能了解廠房設備運轉引致管線振動及振動傳遞之特性，以利將來後續建廠實務之參考評估。

As the high-technology industry develops vigorously in Taiwan, the industries of semiconductor and optoelectronic have become the important economic foundations in Taiwan. Owing to the progress of the manufacturing technology of semiconductor, control of the micro vibration for the manufacturing equipment in high-technology factories is strictly demanded. However, the design of ambient vibration mitigation for the vibration sensitive instruments is still dependent on the foreign consultancy at present. Therefore, it is helpful to understand the ambient vibration induced by facilities by the field measurement and analysis. Furthermore, it can provide useful reference when the Fabs are designed and planned in future. To study the vibration transmission of high power source in the high-technology Fabs, the field measurement was carried out. Furthermore, a set of precise, quick, and effective measurement system has been set up measure and analyze the vibration data. In this study, a set of real-time measurement and analysis system has been established under LabVIEW environment, a graphical user interface (GUI) was established for the operational convenience during measurement and analysis. Furthermore, the Fast Fourier Transformation (FFT), Short Time Fourier Transformation (STFT), power spectrum density (PSD), one-third octave band spectrum and the time-frequency spectrum for the measured data were built for the evaluation the dynamic characteristics contained in the vibration system. The vibration measurement and analysis are carried out for the power pumps with higher vibration magnitude, as well as their cooling-water feeding pipeline. It is expected to understand the characteristics of the pipeline vibration resulted from the micro-scale vibration of the factory building and the equipment operation, thus it is helpful to the reference estimation of the factory construction in future.