請用此 Handle URI 來引用此文件:
http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/39443
標題: | 超精密定位系統整合與雙致動平台控制策略設計 Integrated High Speed Precision Positioning System and Designing for the Controlled Strategy of Dual Stage Actuator |
作者: | Wang-Han-Fu 翁漢甫 |
指導教授: | 李世光 |
關鍵字: | 超高速精密定位,雙致動器,振動控制,繞射式干涉儀, vibration control,dual stage actuator,hight speed positioning, |
出版年 : | 2004 |
學位: | 碩士 |
摘要: | 超高精密定位技術(ultra precision positioning technique)在發展高精密機械系統中是重要一部份。其中量測系統的開發在本實驗室的研究下,已經累積了不少經驗,然針對定位技術的需求,系統開發將由量測次系統延伸為定位系統架構,論文將討論在高頻寬、高動態範圍以及高精度的應用需求下,整合量測系統設計所面臨的基本問題。本文將藉由介紹各系統中的頻寬、動態範圍以及精度等特性,提出量測、訊號處理、控制與平台等次系統間的介面匹配問題,於過程中發現,定位平台頻寬將有可能成為基本瓶頸,進而提出雙致動器(dual stage actuators)為架構的可行性。
一般雙致動器架構由一粗動及細動控制平台(Macro/Mini-manipulator)所組成,此組合擷取了兩者優點,如粗動平台長行程及與細動平台高精度性等,使平台整體效能提高。而一般對於粗動/細動驅動架構的控制器設計,直接的方法將設計一控制系統,此控制系統包含兩獨立控制器,分別為粗動與細動平台控制,而細動平台控制器的參考輸入(reference input)將為粗動平台端點(end-point)位置與設計位置(desired position)差值,藉由細動致動平台的高頻寬與高精度特性,補償定位系統中所有可能的誤差來源,而達到精準定位。然而進一步分析此裝置,當架於粗動平台之上的細動平台執行高頻的定位任務時,致動器所產生力量將偶合到粗動平台上,這動態單向耦合(one way dynamic coupling )現象,激發粗動平台微小但高頻的振動行為,繼而影響端點的定位效能。 因此控制策略分析將建立於原本的控制架構下,加入振動控制器設計時所面臨的相關問題,並由模擬控制迴路與平台響應的關聯,分析系統效能的變化與驗證實行的可能性,以提供未來控制系統實現時參考資訊。 The ultra precision positioning technique has become one of the important parts in the development of the precision machines. Our lab has many experiences on developing metrology’s system; but to the positioning tech, the subsystem will extend for the positioning system. The thesis will be discussed under the high-frequency, high dynamic range and high-accuracy application demand, whole resultant examines and designs the basic problems faced systematically. This text will introduce the characteristics, such as bandwidth, dynamic range and precision issues, etc. From every subsystem of the introductions, like the metrology, signal process and controls system, it examined the match problems with the interface among the each subsystem, find in the discussions, it may become the basic bottleneck to orient the platform, and then it is the feasibility of the structure to put forward dual stage actuators. The combination of a macro-stage and a short reach mini-stage enables fast, precise stage through an orient task. The most straight forward method of designing the control system is to develop independent controllers for the macro and mini subsystem and from a control architecture, where the reference input for the mini is the difference between the desired tip position and the macro position, by the mini-stage actuating fast and high accuracy, it compensates all possible error sources in the position tasks. But analyze this device further, the mini rides on the macro, there will be coupling from the mini control force to the macro. This one way dynamic coupling leads to interactions that degrade performance. For the effectors, control strategy will adding a vibration controller into the architecture, and discussing what kinds of problems will be occurred, finally simulation works will offer information on implement and preparations for the future works. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/39443 |
全文授權: | 有償授權 |
顯示於系所單位: | 工程科學及海洋工程學系 |
文件中的檔案:
檔案 | 大小 | 格式 | |
---|---|---|---|
ntu-93-1.pdf 目前未授權公開取用 | 1.5 MB | Adobe PDF |
系統中的文件,除了特別指名其著作權條款之外,均受到著作權保護,並且保留所有的權利。