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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 李世光 | |
dc.contributor.author | Wang-Han-Fu | en |
dc.contributor.author | 翁漢甫 | zh_TW |
dc.date.accessioned | 2021-06-13T17:28:39Z | - |
dc.date.available | 2005-10-19 | |
dc.date.copyright | 2004-10-19 | |
dc.date.issued | 2004 | |
dc.date.submitted | 2004-10-11 | |
dc.identifier.citation | 1.吳文中 (1998),”高性能量測平台之高速信號處理平台”,國立台灣大學應用力學研究所碩士論文,中華民國,台北市。
2.吳錦源 (1998),”創新雷射都卜勒振動/干涉儀之研製-高性能微光機電系統之量測”,台灣大學應用力學研究所博士論文,台灣台北。 3.Alan V. Oppenheim, Ronald W. Schafer, “Discrete Time Signal Processing” , Pretice Hall , New York, NY USA (1989). 4.Analog Devices (1998), “ADSP-21000 Family Applications Handbook”, Analog Devices, Inc (http://www.analog.com). 5.L.Meitrovitch.(1986), Elements Of Vibration Analysis, McGraw-Hill International Editions. 6.C.W. Lee, S.W. Kim (1997), An ultraprecision stage for a lignment of wafers in advanced microlithography, Engineering 21 113–122. 7.O. Khatib. 1996. The Impact of Redundancy on the Dynamic Performance of Robots. Laboratory Robotics and Automation, 8(1):37 –48 8.O. Khatib. 1987. A unified approach for motion and force control of robot manipulators:the operational space formulation. IEEE Trans. on Robotics and Automation, 3(1):43 – 53. 9.Book, W and Lee, S.H. (1989), Vibration Control of a Large Flexible Manipulator by a Small Robotic Arm, Proc. Of the American Control Conf., Vol. 12, 1377-1380. 10.Book, W. and Loper, J. (1999):Inverse Dynamics for Commanding Micromanipulator Inertial Forces to Damp Macromanipulator Vibration, Proc. IEEE Robot Society of Japan International Conf. on Intelligent Robots and Systems, Vol.2, 707-714. 11.Book, W. (1993): Recursive Lagrangian Dynamics of Flexible Manipulator Arms, The International Journal of Robotics Research, Vol.3, No.3, 87-100. 12.Burr-Brown Corporation (1996), “ADS 801 SpeedPlus 12-Bit, 25MHz Sampling Analog-to-Digital Converter”, Burr-Brown Corporation, Tuscon, AZ USA (http://www.burr-brown.com). 13.George, L. (2002), Active Vibration Control of a Flexible Base Manipulator, Ph.D. Thesis, Georgia Institute of Technology, Atlanta, GA. 14.Lew, J. and Moon, S-M (2001): A Simple Active Damping Control for Compliant Base Manipulators, IEEE/ASME Transactions on Mechatronics, Vol.2, 707-714. 15.Sciavicco, L., and Siciliano, B. (2000): Modeling and Control of Robot Manipulators, McGraw-Hill, New York, 151-162. 16.Senda, K. (1993): Dynamics and Control of Rigid/Flexible Space Manipulators, Ph.D. Thesis, University of Osaka Prefecture, Sakai, Osaka. 17.Singhose, W., Singer, N., and Seering, W. (1995):Comparison of Command Shaping Methods forReducing Residual Vibration, Proc. 3rd European Control Conf., Vol. 2, 1126-1131. 18.Texas Instruments Incorporated (1998), “TMS320 DSP Development Support Reference Guide”, Texas Instruments Incorporated, Dollas ,TX USA (http://www.ti.com). 19.Torres, M. and Dubowsky, S. (1993): Path Planning for Elastically Constrained Space Manipulator Systems, Proc. IEEE International Conf. on Robotics and Automation, Vol.1, 812-817. | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/39443 | - |
dc.description.abstract | 超高精密定位技術(ultra precision positioning technique)在發展高精密機械系統中是重要一部份。其中量測系統的開發在本實驗室的研究下,已經累積了不少經驗,然針對定位技術的需求,系統開發將由量測次系統延伸為定位系統架構,論文將討論在高頻寬、高動態範圍以及高精度的應用需求下,整合量測系統設計所面臨的基本問題。本文將藉由介紹各系統中的頻寬、動態範圍以及精度等特性,提出量測、訊號處理、控制與平台等次系統間的介面匹配問題,於過程中發現,定位平台頻寬將有可能成為基本瓶頸,進而提出雙致動器(dual stage actuators)為架構的可行性。
一般雙致動器架構由一粗動及細動控制平台(Macro/Mini-manipulator)所組成,此組合擷取了兩者優點,如粗動平台長行程及與細動平台高精度性等,使平台整體效能提高。而一般對於粗動/細動驅動架構的控制器設計,直接的方法將設計一控制系統,此控制系統包含兩獨立控制器,分別為粗動與細動平台控制,而細動平台控制器的參考輸入(reference input)將為粗動平台端點(end-point)位置與設計位置(desired position)差值,藉由細動致動平台的高頻寬與高精度特性,補償定位系統中所有可能的誤差來源,而達到精準定位。然而進一步分析此裝置,當架於粗動平台之上的細動平台執行高頻的定位任務時,致動器所產生力量將偶合到粗動平台上,這動態單向耦合(one way dynamic coupling )現象,激發粗動平台微小但高頻的振動行為,繼而影響端點的定位效能。 因此控制策略分析將建立於原本的控制架構下,加入振動控制器設計時所面臨的相關問題,並由模擬控制迴路與平台響應的關聯,分析系統效能的變化與驗證實行的可能性,以提供未來控制系統實現時參考資訊。 | zh_TW |
dc.description.abstract | The ultra precision positioning technique has become one of the important parts in the development of the precision machines. Our lab has many experiences on developing metrology’s system; but to the positioning tech, the subsystem will extend for the positioning system. The thesis will be discussed under the high-frequency, high dynamic range and high-accuracy application demand, whole resultant examines and designs the basic problems faced systematically. This text will introduce the characteristics, such as bandwidth, dynamic range and precision issues, etc. From every subsystem of the introductions, like the metrology, signal process and controls system, it examined the match problems with the interface among the each subsystem, find in the discussions, it may become the basic bottleneck to orient the platform, and then it is the feasibility of the structure to put forward dual stage actuators.
The combination of a macro-stage and a short reach mini-stage enables fast, precise stage through an orient task. The most straight forward method of designing the control system is to develop independent controllers for the macro and mini subsystem and from a control architecture, where the reference input for the mini is the difference between the desired tip position and the macro position, by the mini-stage actuating fast and high accuracy, it compensates all possible error sources in the position tasks. But analyze this device further, the mini rides on the macro, there will be coupling from the mini control force to the macro. This one way dynamic coupling leads to interactions that degrade performance. For the effectors, control strategy will adding a vibration controller into the architecture, and discussing what kinds of problems will be occurred, finally simulation works will offer information on implement and preparations for the future works. | en |
dc.description.provenance | Made available in DSpace on 2021-06-13T17:28:39Z (GMT). No. of bitstreams: 1 ntu-93-R91525034-1.pdf: 1539238 bytes, checksum: 910cc1a0c30d33cd8ee5f705d562a5d8 (MD5) Previous issue date: 2004 | en |
dc.description.tableofcontents | 第1章 序論 - 1 -
1.1研究背景 - 1 - 1.2研究目的 - 5 - 第2章 量測系統與控制介面分析 - 6 - 2.1 雷射都卜勒干涉儀架構分析 - 8 - 2.1.1 Quadrature干涉儀架構 - 9 - 2.2 訊號處理系統 - 14 - 2.2.1量測系統動態分析 - 18 - 2.3 控制系統分析 - 20 - 第3章 定位平台動態特性分析 - 27 - 3.1平台機構分析 - 28 - 3.1.1 一般定位平台架構 - 28 - 3.1.2 雙致動伺服平台 - 31 - 3.1.3 壓印平台設計 - 32 - 3.2 雙伺服致動平台動態特性分析 - 36 - 第4章 雙致動平台控制策略設計與分析 - 42 - 4.1 基本雙伺服控制設計 - 44 - 4.2 雙伺服系統運動特性與定位控制 - 46 - 4.3 平台振動控制設計 - 50 - 第5章 初步實驗架設與模擬分析 - 61 - 5.1 細動定位平台量測 - 61 - 5.2 振動控制器模擬驗證 - 66 - 第6章 結論 - 74 - 文獻參考 - 76 - | |
dc.language.iso | zh-TW | |
dc.title | 超精密定位系統整合與雙致動平台控制策略設計 | zh_TW |
dc.title | Integrated High Speed Precision Positioning System and Designing for the Controlled Strategy of Dual Stage Actuator | en |
dc.type | Thesis | |
dc.date.schoolyear | 93-1 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 宋家驥,林輝政 | |
dc.subject.keyword | 超高速精密定位,雙致動器,振動控制,繞射式干涉儀, | zh_TW |
dc.subject.keyword | vibration control,dual stage actuator,hight speed positioning, | en |
dc.relation.page | 78 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2004-10-11 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 工程科學及海洋工程學研究所 | zh_TW |
顯示於系所單位: | 工程科學及海洋工程學系 |
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