含反應性染料光阻劑之UV光硬化膜的製備 及性質探討

Abstract

本實驗首先以具有黃色染料加入IPDI。染料上的一級胺基(-NH2)會與IPDI上的異氰酸基(-NCO)產生合成反應。再加入HEMA。HEMA上的氫氧基會和IPDI上剩下的異氰酸基繼續進行合成反應。第二部分以具有氫氧基(-OH)的epoxy acrylate加入IPDI進行反應，再接上黃色染料。經由這樣的過程，可以將原本的染料合成為具有碳碳雙鍵的反應性染料。由改變不同的反應物，來增加每分子反應性染料的官能基數，進而提高含反應性染料光阻劑在UV光硬化時的交聯度。 兩種反應性染料再搭配上oligomer、binder和光起始劑，配成含反應性染料光阻劑。藉由改變不同的配方、各配方不同的比例以及不同的曝後烤溫度，觀察對光阻劑之光硬化膜的色彩度、耐溶性、耐鹼性以及耐酸性的影響。

In this research, we used yellow dye to add IPDI. The first amine group of dye was synthesized with the isocyanate group of IPDI, then add HEMA. The hydroxy group of HEMA was synthesized with the rest isocyanate group of IPDI. Second, we used epoxy acrylate to added IPDI. The isocyanate group of IPDI was synthesized with the hydroxy group of epoxy acrylate. It synthesized yellow dye later. In these processes, we can synthesize yellow dye to converse reactive dye that contains CC double bonds. With changing the reactant, the function groups of reactive dye were increased. That as well as can increase the functionality of photoresist with reactive dye after UV curing. Afterward this reactive dye was diluted in monomer, oligomer, solvent, and photoinitiator to formulate color photo-resists. With changing the different composition, different ratio and the different temperature of post-baking, the color degree of the color photo-resists and the properties of chemical, basic and acidic resistance were observed.