ZnO/ST-cut Quartz震盪式層狀表面聲波黏度感測器

Abstract

本文旨在量測與研究於石英基材上鍍上氧化鋅(ZnO/ST-90˚ quartz)之拉福波共振，隨著不同表層厚度比例所產生之效能差異。為確保所量測的數據差異並非由氧化鋅材料性質之不同所產生，故在製程中所有感測器裝置則是利用相同氧化鋅波導層。在本研究中製造五組不同的拉福波感測器，並配合以聚二甲基矽氧化硫(PDMS)所製成之流穿式樣品偵測槽，以量測不同濃度甘油水溶液的黏滯性。藉由PDMS流穿式樣品槽，我們可將微量樣品集中於兩組交指叉狀電極所組成的感測表面上，以減少液體電性對於電極邊界條件所產生之不良影響。進一步我們則利用此系統量測各拉福波感測器，量測不同黏滯性樣品之所造成之異同。在此架構下，所設計出的感測器可與市面上常見的流動注入分析(FIA)儀器搭配綜合使用，以確保準確的控制量測樣品的使用量，而能提高感測器的穩定性。

In this work, we aim at measuring and discussing the performance difference between ZnO/ST-cut quartz based Love wave resonator type liquid sensor with different normalized thickness. The devices were designed such that they share the same ZnO film identical material properties. Five Love wave acoustic devices based on ZnO/90˚ rotated ST-quartz layered structure with different normalized are fabricated and incorporated with Polydimethylsiloxane (PMDS) flow cell. This allows a tiny controlled amount of analyte to be confined solely upon the sensing area between the IDTs of our Love wave sensors, preventing unwanted electric interactions with IDTs. This system is designed to be compatible with commercially available Flow Injection Analyzers (FIA) for accurate and efficient delivery of minuscule amounts of test samples into our sensor. Finally, we put this system and our sensors to the test by using it for viscosity sensing of different solutions.