微型能量擷取器之研究

Abstract

近幾年來有越來越多人對於應用在低功率電子零件的能量擷取技術產生高度興趣與廣泛討論，像是在無線網路感測或者是生物醫學檢測等的各種應用。在各種可能提供能量來源方面，機械震動能已經被認定為可以提供作為能量擷取裝製能量來源的最佳選擇，並且可以適用在各種方面的的用途上。 本論文將利用微機電製程技術製作一個有機會擷取周圍環境的震動能轉換為電能輸出的微型發電機，將可應用在各樣的感測器上。利用微機電製程技術製作的微型發電機主要是由鋯鈦酸鉛所組成之壓電材料，包含上、下電極所構成之懸臂樑結構將機械力的能量轉換成電能的形式輸出。在懸臂樑的末端將長上一層質量塊用來調整壓電微型發電機之共振頻以期能配合周圍環境的震動頻率。為了能夠提升壓電式發電機的製程步驟，研究團隊自行設計了一台能夠利用噴鍍的方式在短時間內沈積數十微米的壓電薄膜在微型發電機懸臂樑上的噴鍍機台，結合此一創新設備與微機電製程技術，成功建構了本研究所建置完成之微型壓電發電機結構。

Over the years, there has been a growing interest in the field of power harvesting technologies for low-power electronic devices such as wireless sensor networks and biomedical sensor applications. Out of all possible energy sources, the mechanical vibrations have been considered a potential choice for power harvesting in a wide variety of applications. This paper presents the development of a piezoelectric MEMS generator which has the ability to scavenge mechanical energy of ambient vibrations from their surroundings and transform it into electrical energy that can be used in sensor applications. The piezoelectric MEMS generator comprises a beam structure built with laminated lead zirconate titanate (Pb(Zr,Ti)O3, PZT) material sandwiched between the upper and the lower electrodes to transform mechanical strain energy into electrical charge. A proof mass is built at the end of the beam to adjust the structure resonant frequency of the piezoelectric MEMS generator for most adaptable to the ambient vibration of their surroundings. To improve the piezoelectric MEMS generator fabrication process, a self-made PZT deposition chamber which could deposit PZT thin film up to tens micron in minutes was used to deposit the piezoelectric layer on the beam structure of the piezoelectric MEMS generator. Combine this newly developed instrument with other MEMS technologies forms the basis to fabricate the micro piezoelectric MEMS generator.