Benzocyclobutene高分子藍光光波導之研製

Abstract

本論文首次成功的以波長248nm的KrF準分子雷射，藉由直接照射 benzocyclobutene(BCB)的方式改變BCB的折射率而製作出導單模態藍光(473nm)的埋入式BCB光波導。 本研究同時也以稜鏡耦合系統，頻譜式橢偏儀等儀器，量測各波長下以不同雷射發數及雷射重複率照射後BCB的折射率；藉由調整雷射照射發數與光罩寬度，我們可以得到不同長寬比的光場場型。此外，本研究提出的藍光BCB光波導製程，相較於傳統乾式蝕刻製程來的簡單而且容易變化。

In this work, buried-type single-mode benzocyclobutene (BCB) channel waveguides fabricated by 248nm krypton fluorine (KrF) excimer laser for a blue laser of wavelength 473nm are first demonstrated. The ultraviolet-induced refractive index changes, measured by prism coupler and spectroscopic ellipsometer, are dependent on the number of laser shots and the pulse repetition rate. By arranging the number of laser shots and the mask width, mode sizes with different aspect ratios can be obtained. Moreover, the proposed UV illumination method is much simpler and more flexible than the conventional dry etching method.