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標題: | 以聚醯亞胺高分子基板製備高導電度金屬薄膜及圖案化電極於電子元件應用 Highly Conductive Metallic Film and Patterned Electrode on Polyimide Substrate for Electrical Device Applications |
作者: | Cheng-Yu Chung 鍾承佑 |
指導教授: | 陳文章(Wen-Chang Chen) |
關鍵字: | 感光型聚醯亞胺,聚醯胺酸,孤對電子,圖案化電極,奈米銀線, photosensitive polyimides,Poly(amic acid),lone pair,patterned electrode,?silver nanowires, |
出版年 : | 2015 |
學位: | 碩士 |
摘要: | 聚醯亞胺為傳統高性能高分子,已經泛用於各個領領域與產業中。近年來來由於可撓式及穿戴式裝置蓬勃發展,軟性透明基材的需求也日益益漸增,聚醯亞胺以其優異異的性質表現使其為研究開發的重點。然而一般金屬導體於軟性基材的附著力力 極差,使其於軟性電路路板的應用上受限。本論文以兩步升溫閉環製備聚醯亞胺結 合噴塗金金屬導體的方式,使金屬導體均勻塗佈並配位鍵結於聚醯亞胺以及感光型聚醯亞胺,成功製備出具有高導電度度以及良好附著力力的聚醯亞胺金屬導電膜以及 圖案化金屬電極,茲敘述如下:
論文第一部分由分子設計的概念以脂環族雙胺(CHDA)與剛硬芳香族雙酸酐 (BPDA) 以開環聚合成聚醯亞胺前驅物,半脂環族聚醯氨酸, poly[t-1,4-cyclohexyldiamine amic acid]) (CHBPDAPAA), 並將之塗布於基材上。 聚醯胺酸 CHBPDAPAA,可藉由升溫製備局部閉環聚醯亞胺,保留胺基以及羧酸基來來提供足量的孤對電子與奈奈米金金屬做配位鍵結。本實驗以噴塗製程將奈奈米銀顆粒以及奈米銀線均勻塗佈於局部閉環聚醯亞胺,利用局部閉環聚醯亞胺上孤對電子與所使用之奈米銀進行配位鍵結,製備出具有高導電度及良好吸附力之導電薄膜。本實驗可進一步以少量奈米銀線以及奈米銀顆粒以無電鍍方式激發銅還原沈積於奈米銀顆粒以及奈米銀線聚醯亞胺薄膜。最後成功製備出在波長 550nm 下透光度度 64%,且具有片電阻 0.63 Ω/□的高導電度度透光膜。本實驗結果成功以聚醯亞胺兩步閉環法製備出高導電度度以及具有良好吸附力力的聚醯亞胺導電薄膜。 論文第二部分以不同黏度度之聚醯胺酸ﰀHﰁPﰂﰃPﰃﰃ混入光鹼劑,藉由光罩以顯影蝕刻製程製備出圖案化聚醯胺酸。結合曝後烤製程的侷部閉環圖案化聚醯亞胺其表面保有親水表面以及足夠孤對電子使奈米銀線可與表面配位鍵結。 本實驗以噴塗製程將奈米銀線均勻噴塗後再以膠帶將圖案化外奈米銀線剝除,成功製備出厚度度800nm解析度度40 μm之圖案化奈米銀線電極。此外,本實驗將並五苯熱鍍上此圖案化奈米銀線電極製備以並五苯為主動層的場效應電晶體.製備出具有電子遷移率 0.12 cm2/Vs 以及開關比 1.2x 107 的場效應電晶體。本結果成功以奈米銀線溶液噴塗製程結合圖案化聚醯亞胺製備出解析度微米等級的圖案化奈米銀線電極。 Polyimides (PIs) have been widely used for high-performance functional materials in electronics. In display and wearable electronics, PIs gradually attracted considerable attention due to their flexibility and transparency. However, the weak adhesion of the metal conductors to the substrate remains challenges. In this study, we deposited metal conductors and their patterned electrodes on PIs and photosensitive polyimides (PSPIs) by spray-coating and two-step condensation of PIs, as described in the following: In the Chapter 2, a semialicyclic poly( amic acid) (PAA), poly(trans-1,4- cyclohexylenediphenylene amic acid) (CHBPDAPAA), were synthesized from the monomers of tetracarboxylic dianhydride (BPDA) and trans-1,4-cyclohexyldiamine (CHDA) and deposited on glass by spin-coating. In the following, it was then partially imidized to retain the hydrophilic surface and the moieties with enough lone pair electrons for binding with silver nanoparticle (Ag NPs) or silver nanowire (Ag NWs). The highly-dispersed Ag NPs or Ag NWs were deposited on the partially imidized PI surface by solution spray coating and their adhesion on the PI film could be maintained after complete thermal imidization. Furthermore, by the post-treatment of electroless copper plating the highly conductive thin film could be also successfully fabricated on PI film, exhibiting an 64% optical transmittance at 휆 = 550nm with an average sheet resistance of 0.63 Ω/□ for the application of transparent electrodes. Our results provide a new approach for fabricating high conductive film on polyimide substrate by simply combining two-step condensation of PI. In the Chapter 3 of the thesis, we synthesized CHBPDAPAA with different viscosity and patterned with shadow masks and followed by partially imidized to retain the hydrophilic surface and the moieties with enough lone pair electrons for binding with Ag NWs. The highly dispersed Ag NWs solution was deposited on the patterned surface by spray coating. The well-patterned Ag NWs electrodes in 40μm channel length was obtained by cleaning the Ag NWs residue with scotch tapes. The pentacene-based field-effect transistor (FET) was fabricated with well patterned Ag NWs electrodes, which exhibited the charge carrier mobility of 0.12 cm2/Vs with a high ON/OFF ratio up to 1.2x 107. Our results demonstrate that this patterning methodology can provide a new approach for fabricating Ag NW patterns in a high resolution using a solution process. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/51795 |
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顯示於系所單位: | 高分子科學與工程學研究所 |
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