以AFM測量參雜ZnO之載子種類及濃度

Abstract

摘要 我們用原子力顯微鏡(AFM)的非接觸模式來測量參雜氧化鋅樣品的表面電位。透過掃描式克爾文探針顯微鏡技術(Scanning Kelvin probe microscopy)，我們可以得到樣品表面電位的二維分布圖。藉由比較所得影像之明暗對比，也就是電位高低，我們可以判斷出探針下方的樣品是p-type 或是n-type doping。由此建立起一個方便而經濟的定性判斷方法。

Abstract Non-contact mode of atom force microscopy (AFM) is used in detecting the surface potential of doping ZnO. Using the scanning Kelvin probe microscopy technique, we can get the two dimensional profile of surface potential of the sample. We could determine the region under the probe is either p-type or n-type doped ZnO by comparing the relative light and shade contrast, i.e. the relative height of surface potential, on the image. Thus a simple and economical qualitative method is established.