摻氧化鋅鈮酸鋰二維非線性光子晶體之研究

Abstract

本論文主要可以分為準相位匹配原理的介紹、二維週期性極化反轉非線性光子晶體的設計與製作，與晶體的光學量測等三部分。 首先，在原理部分，吾人簡略的介紹了非線性頻率轉換，與準相位匹配的原理。 接著，在製程部分，吾人介紹了幾種週期性結構的製作方式，包含利用厚光阻作為絕緣層製作週期性結構，與利用表面淺層反轉製作週期性結構，並比較其優缺點。在反轉區域觀察法上，介紹以加熱觀察法取代氫氟酸蝕刻法的優點。目前，已經成功在厚度500μm摻氧化鋅鈮酸鋰中製作出週期29.5μm二維週期性結構，且有效長度可以達到6mm左右。 最後，在光學量測部分，吾人發現摻氧化鋅鈮酸鋰有較大的轉換頻譜，並能產生二倍頻紅外、三倍頻紅光、四倍頻藍綠光同時輸出。

This thesis is organized into three parts: (i)an introduction to the theory of quasi-phase matching,(ii)the design and fabrication of two-dimensional periodically poled nonlinear crystal(2D NPC),and (iii) the optical measurement. At first, the theory of nonlinear frequency conversion and quasi-phase matching is briefly introduced. And then, several fabrication processes are introduced, including using thick photoresist as insulator to make periodically poled structure, and using the surface domain inversion to make periodically poled structure. In terms of domain observation, etching free observation on lithium niobate has been introduced. Now, we have successfully fabricated a 500μm thickness two dimensional periodically poled ZnO:lithium niobate(ZnO:LN) with 29.5μm period and 6mm effective length. In terms of optical measurement, infrared ray (second harmonic), red(third harmonic) and blue-green laser(fourth harmonic) has been generated and observed simultaneously. The result seems that ZnO:LN has larger FWHM than congruent LN.