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| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 洪英超 | zh_TW |
| dc.contributor.advisor | Ying-Chau Hung | en |
| dc.contributor.author | 郭沛恩 | zh_TW |
| dc.contributor.author | Pei-En Kuo | en |
| dc.date.accessioned | 2025-09-10T16:22:21Z | - |
| dc.date.available | 2025-09-11 | - |
| dc.date.copyright | 2025-09-10 | - |
| dc.date.issued | 2025 | - |
| dc.date.submitted | 2025-07-30 | - |
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| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/99465 | - |
| dc.description.abstract | 本研究針對半導體製造中高架軌道運輸系統（Overhead Hoist Transport）之動態搬運挑戰，提出一套結合「動態反應曲面法（Dynamic Response Surface Methodology, Dynamic RSM）」與模擬最佳化技術之決策支援模型。傳統 RSM 方法雖能有效於固定參數條件下擬合系統輸出，惟在高度時變的製造環境中，易因情境轉變而失效。因此，本研究採用動態 RSM，於各模擬時間區段內建立階段性實驗設計(Design of Experiments)，結合分段資料擬合與持續修正，建構動態搬運時間預測模型。透過與基準線模型比較，在平均搬運時間、任務等待時間、緊急任務反應時間等績效指標均獲顯著改善，尤其在多事件壅塞條件下表現尤為穩定。最終，本研究證實動態 RSM 可於變動製程負載與調度規則下提供高韌性的調度決策基礎，並為未來結合強化學習與數位雙生技術之自動化物料搬運系統提供方法論基礎。 | zh_TW |
| dc.description.abstract | This study proposes a decision-support model combining Dynamic Response Surface Methodology (Dynamic RSM) with simulation-based optimization to address the challenges of dynamic material transport in semiconductor fab Overhead Hoist Transport (OHT) systems. Traditional RSM methods are limited to static parameter spaces and fail to adapt to the high variability in modern fab environments. In contrast, the proposed Dynamic RSM approach constructs segmented Design of Experiments(DOE) designs across simulation time windows, enabling stage-wise model fitting and continuous response updates. The approach was validated through simulations, showing significant improvements in average Front Opening Unified Pod (FOUP) transport time, task waiting time, and emergency response time compared to baseline models. Under event-intensive congestion scenarios, the model maintained robust performance. This study demonstrates that Dynamic RSM offers a resilient foundation for adaptive dispatching decisions and paves the way for future integration with reinforcement learning and digital twin frameworks in Automated Material Handling System. | en |
| dc.description.provenance | Submitted by admin ntu (admin@lib.ntu.edu.tw) on 2025-09-10T16:22:21Z No. of bitstreams: 0 | en |
| dc.description.provenance | Made available in DSpace on 2025-09-10T16:22:21Z (GMT). No. of bitstreams: 0 | en |
| dc.description.tableofcontents | 誌謝 i
中文摘要 ii 英文摘要 iii 目次 iv 圖次 vi 表次 vii 第一章 緒論 1 1.1 研究背景與動機 1 1.2 研究目的 4 1.3 研究範圍與限制 4 1.4 研究方法與流程 6 1.5 論文架構 12 第二章 文獻探討 13 2.1 引言 13 2.2自動化物料搬運系統 13 2.3 國內外研究現況 14 2.4 路徑規劃演算法與技術演進 15 2.5 半導體製造高架軌道運輸系統路徑規劃相關研究 16 第三章 研究方法 19 3.1研究架構與流程 20 3.2 模擬資料建模邏輯 23 3.3 平台選型與模擬器建構策略 26 3.4 動態反應曲面模型建構流程 30 3.5 模型假設與邊界限制 41 3.6 KPI定義與模擬評估方法 43 3.7 DRSM模擬平台程式 45 第四章 研究結果 47 4.1 模擬環境參數設定 47 4.2基準線模型績效 49 4.3 DRSM 最佳化模型績效 51 4.4 敏感度分析結果 58 4.5 模型穩健性測試結果 62 4.6 動態模型於時變條件下之適應與更新機制 63 4.7 研究結果 65 第五章 結論與未來工作建議 67 5.1 結論 67 5.2 研究限制與反思 69 5.3未來研究方向 69 參考文獻 71 | - |
| dc.language.iso | zh_TW | - |
| dc.subject | 高架軌道運輸系統 | zh_TW |
| dc.subject | 半導體製造 | zh_TW |
| dc.subject | 模擬最佳化 | zh_TW |
| dc.subject | 數位雙生 | zh_TW |
| dc.subject | 強化學習 | zh_TW |
| dc.subject | 自動化物料搬運系統 | zh_TW |
| dc.subject | Simulation-based Optimization | en |
| dc.subject | Overhead Hoist Transport | en |
| dc.subject | Automated Material Handling System | en |
| dc.subject | Reinforcement Learning | en |
| dc.subject | Digital Twin | en |
| dc.subject | Semiconductor Manufacturing | en |
| dc.title | 半導體高架吊運系統之動態適應性調度決策支援模型 | zh_TW |
| dc.title | Dynamic and Adaptive Dispatching Decision-Support Model for Semiconductor Overhead Hoist Transport Systems | en |
| dc.type | Thesis | - |
| dc.date.schoolyear | 113-2 | - |
| dc.description.degree | 碩士 | - |
| dc.contributor.oralexamcommittee | 黃奎隆;吳漢銘 | zh_TW |
| dc.contributor.oralexamcommittee | Kwei-Long Huang;Han-Ming Wu | en |
| dc.subject.keyword | 高架軌道運輸系統,半導體製造,模擬最佳化,數位雙生,強化學習,自動化物料搬運系統, | zh_TW |
| dc.subject.keyword | Overhead Hoist Transport,Semiconductor Manufacturing,Simulation-based Optimization,Digital Twin,Reinforcement Learning,Automated Material Handling System, | en |
| dc.relation.page | 77 | - |
| dc.identifier.doi | 10.6342/NTU202502797 | - |
| dc.rights.note | 同意授權(限校園內公開) | - |
| dc.date.accepted | 2025-08-01 | - |
| dc.contributor.author-college | 工學院 | - |
| dc.contributor.author-dept | 工業工程學研究所 | - |
| dc.date.embargo-lift | 2030-07-28 | - |
| 顯示於系所單位： | 工業工程學研究所 | |
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