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  1. NTU Theses and Dissertations Repository
  2. 工學院
  3. 機械工程學系
請用此 Handle URI 來引用此文件: http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/98834
完整後設資料紀錄
DC 欄位值語言
dc.contributor.advisor廖先順zh_TW
dc.contributor.advisorHsien-Shun Liaoen
dc.contributor.author林崇旭zh_TW
dc.contributor.authorChung-Hsu Linen
dc.date.accessioned2025-08-19T16:22:52Z-
dc.date.available2025-08-20-
dc.date.copyright2025-08-19-
dc.date.issued2025-
dc.date.submitted2025-08-11-
dc.identifier.citation[1] Bera, B. and M.D. Sarkar. 2016. Piezoelectric effect, piezotronics and piezophototronics: a review. Imperial Journal of Interdisciplinary Research (IJIR), 2(11): pp. 1407-1410.
[2] Goldfarb, M. and N. Celanovic. 2002. Modeling piezoelectric stack actuators for control of micromanipulation. IEEE Control Systems Magazine. 17(3): pp. 69-79.
[3] Haonan Jin, Xiangyu Gao, Kaile Ren, Jinfeng Liu, Liao Qiao and Mingzi Liu. 2022. Review on piezoelectric actuators based on high-performance piezoelectric materials. IEEE Transactions on ultrasonics, ferroelectrics, and frequency control. 69(11): pp. 3057-3069.
[4] Stewart Sherrit, Christopher M. Jones, Jack B. Aldrich, Chad Blodget, Xioaqi Bao, Mircea Badescu and Yoseph Bar-Cohen. 2008. Multilayer piezoelectric stack actuator characterization. Behavior and Mechanics of Multifunctional and Composite Materials. 2008 SPIE.
[5] Xu, W. and T. King. 1996. Flexure hinges for piezoactuator displacement amplifiers: flexibility, accuracy, and stress considerations. Precision engineering. 19(1): pp. 4-10.
[6] Nicolae Lobontiu, Jeffrey S. N. Paine, Ephrahim Garcia and Michael Goldfarb. 2000. Corner-Filleted Flexure Hinges. Journal of Mechanical Design. 123(3): pp. 346-352.
[7] Stuart T. Smith, Vivek G. Badami, Jami S. Dale and Ying Xu. 1997. Elliptical flexure hinges. Review of Scientific Instruments. 68(3): pp. 1474-1483.
[8] Yong, Y.K., T.-F. Lu, and D.C. Handley. 2008. Review of circular flexure hinge design equations and derivation of empirical formulations. Precision engineering. 32(2): pp. 63-70.
[9] Mingxiang Ling, Junyi Cao, Minghua Zeng, Jing Lin and Daniel J Inman. 2016. Enhanced mathematical modeling of the displacement amplification ratio for piezoelectric compliant mechanisms. Smart Materials and Structures. 25(7): p. 075022.
[10] Y. K. Yong, S. O. R. Moheimani, B. J. Kenton and K. K. Leang. 2012. Invited Review Article: High-speed flexure-guided nanopositioning: Mechanical design and control issues. Review of Scientific Instruments. 83(12). p. 121101
[11] Wei Dong, Fangxin Chen, Futian Gao, Miao Yang, Lining Sun, Zhijiang Du, Jiong Tang and Dan Zhang. 2018. Development and analysis of a bridge-lever-type displacement amplifier based on hybrid flexure hinges. Precision Engineering. 54: pp. 171-181.
[12] Lobontiu, N. and E. Garcia. 2003. Analytical model of displacement amplification and stiffness optimization for a class of flexure-based compliant mechanisms. Computers & Structures. 81(32): pp. 2797-2810.
[13] Jinglong Chen, Chunlin Zhang, Minglong Xu, Yanyang Zi and Xinong Zhang. 2015. Rhombic micro-displacement amplifier for piezoelectric actuator and its linear and hybrid model. Mechanical Systems and Signal Processing. 50-51: pp. 580-593.
[14] Hong-Wen Ma, Shao-Ming Yao, Li-Quan Wang and Zhi Zhong. 2006. Analysis of the displacement amplification ratio of bridge-type flexure hinge. Sensors and Actuators A: Physical. 132(2): pp. 730-736.
[15] Fangxin Chen, Qianjun Zhang, Yongzhuo Gao and Wei Dong. 2020. A review on the flexure-based displacement amplification mechanisms. IEEE Access. 8: pp. 205919-205937.
[16] 吳起雲。2024。巢狀式位移放大壓電致動器之設計與開發。碩士論文。台北: 國立臺灣大學機械工程研究所。
[17] Nguon, B. and M. Jouaneh. 2004. Design and characterization of a precision fluid dispensing valve. The International Journal of Advanced Manufacturing Technology. 24: pp. 251-260.
[18] Jianping, L. and D. Guiling. 2004. Technology development and basic theory study of fluid dispensing-a review. Proceedings of the Sixth IEEE CPMT conference on high density microsystem design and packaging and component failure analysis (HDP'04). IEEE: pp. 198-205.
[19] Juncheol Jeon, Seung-Min Hong, Minkyu Choi and Seung-Bok Choi. 2004. Design and performance evaluation of a new jetting dispenser system using two piezostack actuators. Smart Materials and Structures. 24(7): p. 015020.
[20] XiaYun Shu, HongHai Zhang, HuaYong Liu, Dan Xie and JunFeng Xiao. 2010. Experimental study on high viscosity fluid micro-droplet jetting system. Science in China Series E: Technological Sciences 53: pp. 182-187.
[21] Xiang Huang, Siying Lin, Zhenxiang Bu, Xiaolong Lin, Weijin Yi, Zhihong Lin, Peiqin Xie and Lingyun Wang. 2020. Research on nozzle and needle combination for high frequency piezostack-driven dispenser. International Journal of Adhesion and Adhesives. 96: p. 102453.
[22] Shizhou Lu, Yaxin Liu, Yufeng Yao, Bo Huang and Lining Sun. 2014. Design and analysis of a piezostack driven jetting dispenser for high viscosity adhesives. 2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics. IEEE.
[23] Fliess, M. 2022. Dosing system with actuator unit and fluidic unit which can be coupled in a detachable manner. VERMES MICRODISPENSING GMBH: US. U.S. Patent No. 11385088B2.
[24] Macindoe, W., D. Jones John, and B. Teece. 2016. Piezoelectric jetting system with quick release jetting valve .NORDSON CORP: US. U.S. Patent No. 11498091B2.
[25] Reuter, M., Dosierventil und Dosierverfahren. 2019. MARCO SYSTEMANALYSE ENTW: DE. Germany Patent No. 102017121600A1.
[26] Reuter, M., Verfahren zur Regelung einer piezoelektrischen Stellvorrichtung. 2018. MARCO SYSTEMANALYSE ENTW: DE. Germany Patent No. 19905340C2.
[27] 林育群。2015。鋯鈦酸鉛塊材的機械性質研究。碩士論文。台中: 國立中興大學機械工程研究所。
[28] Hoffmann, K. 1989. An Introduction to Measurements using Strain Gages. Darmstadt, Germany: Hottinger Baldwin Messtechnik GmbH. p. 273.
[29] Dobkin, R.C. and R.J. Widlar. 1971. Electrical regulator apparatus including a zero temperature coefficient voltage reference circuit. NATIONAL SEMICONDUCTOR CORP.: US. U.S. Patent No. 3617859A.
[30] Currie, C. 1954. Silicone Fluids. Industrial & Engineering Chemistry. 46(11): pp. 2331-2333.
[31] Ronaldo Ariati, Flaminio Sales, Andrews Souza, Rui A. Lima, and João Ribeiro. 2021. Polydimethylsiloxane composites characterization and its applications: a review. Polymers. 13(23): p. 4258.
[32] Kataoka, T. and S. Ueda. 1967. Viscosity of polydimethylsiloxane blends. Journal of Polymer Science Part A‐1: Polymer Chemistry. 5(12): pp. 3071-3089.
[33] Sutera, S.P. and R. Skalak. 1993. The history of Poiseuille's law. Annual review of fluid mechanics. 25(1): pp. 1-20.
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dc.identifier.urihttp://tdr.lib.ntu.edu.tw/jspui/handle/123456789/98834-
dc.description.abstract目前主流的壓電噴射閥使用各式壓電放大機構,提供噴射閥撞針擊發膠水所需之運動行程。然而普通的放大機構為獲得足夠的放大倍率,佔據的體積往往較為龐大,造成壓電噴射閥的尺寸無法進一步小型化。為此,本研究提出一款採用改進型巢狀式撓性放大機構的壓電噴射閥。此巢狀式撓性放大機構結合了菱形式、槓桿式及半菱形式三種撓性放大機構設計以提升空間利用率。實際完成之巢狀式撓性放大機構尺寸為33.5 mm × 34.2 mm × 10 mm,透過13.65倍的位移放大率達到207.5 μm之最大行程。壓電致動器之最大推力23.14 N、機構剛性為0.1115 N/μm、共振頻率為1946 Hz,兼顧了結構緊湊性並滿足壓電噴射閥的工作情境。在此放大機構之基礎上,本研究設計一款尺寸為72.7 mm × 69.5 mm × 20 mm之小型壓電噴射閥,並進行對壓電噴射閥實際點膠實驗,以瞭解膠水黏度、擊發間距、開啟時間與壓力等參數對點膠穩定性的影響。量測結果顯示在擊發1000 cP 黏度矽油時,相同擊發參數下之液珠尺寸的一致性相當高,其尺寸數據變異係數皆在1.7 % 以下;且液珠尺寸也隨壓力和撞針開啟時長呈線性的變化。然而在應對較高黏度的矽油時,則遭遇因放大機構出力不足而無法保持穩定擊發的狀況。未來可進一步對壓電噴射閥的輸出力量性能進行改進,以期提升壓電噴射閥的應用範圍。zh_TW
dc.description.abstractPiezoelectric jetting dispensing valves commonly adopt various displacement amplification mechanisms to achieve the stroke necessary for precise glue dispensing. However, conventional mechanisms often require bulky volume to realize sufficient amplification ratios, resulting in low spatial utilization and limiting valve miniaturization. To address this, this thesis proposed a compact piezoelectric jetting dispensing valve incorporating an improved nested compliant amplification mechanism. This mechanism integrates three compliant designs—diamond-type, lever-type, and semi-diamond-type—within a compact rectangular space, maximizing spatial efficiency. The developed mechanism measured 33.5 mm × 34.2 mm × 10 mm, achieving a maximum displacement of 207.5 μm and an amplification ratio of 13.65. Its maximum output force, stiffness, and resonant frequency were 23.14 N, 0.1115 N/μm, and 1946 Hz, respectively, demonstrating compactness and jetting suitability. Based on this mechanism, a compact valve was developed. Dispensing experiments investigated the effects of fluid viscosity, firing frequency, opening time, and input pressure on jetting stability. Results showed that with 1000 cP silicone oil, droplet sizes were highly consistent under identical firing conditions and varied linearly with parameter changes. At higher viscosities, limited output force led to unstable jetting. These findings suggest future work should enhance output performance to expand applicability to a broader range of fluids.en
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dc.description.tableofcontents口試委員審定書 i
致謝 ii
摘要 iii
Abstract iv
目次 v
圖次 viii
表次 xii
第一章 緒論 1
1.1 研究背景 1
1.2 文獻回顧 2
1.2.1 層積式壓電致動器 2
1.2.2 撓性放大機構 3
1.2.3 槓桿式撓性放大機構 4
1.2.4 菱形撓性放大機構 5
1.2.5 複合式撓性放大機構 7
1.2.6 點膠閥概述 9
1.2.7 噴射式點膠閥設計 10
1.2.8 商用噴射閥 13
1.3 研究動機與目標 15
1.4 內容簡介 15
第二章 原理與設計 16
2.1 巢狀式撓性放大機構 16
2.1.1 層積式壓電致動器 16
2.1.2 巢狀式放大機構設計 17
2.1.3 放大機構組裝 19
2.1.4 有限元素分析 21
2.1.5 模態分析 25
2.2 噴射閥 27
2.2.1 噴射閥設計 27
2.2.2 噴射閥控制 29
第三章 量測系統架構與實驗儀器 31
3.1 實驗架構與量測系統概述 31
3.2 量測系統架構 32
3.2.1 行程量測系統 32
3.2.2 推力量測系統 33
3.2.3 頻率響應量測系統 35
3.2.4 液珠量測系統 36
3.3 壓電驅動設備 38
3.3.1 嵌入式控制器 38
3.3.2 壓電驅動器 39
3.3.3 鎖相放大器 40
3.3.4 商用噴射閥控制器 40
3.4 量測設備 41
3.4.1 雷射位移計 41
3.4.2 荷重元與應變規 42
3.4.3 穩壓電路 44
3.4.4 前置放大器 45
3.4.5 線掃描相機 46
第四章 實驗結果 47
4.1 實驗前準備 47
4.1.1 荷重元校正 47
4.1.2 矽油調配 49
4.2 行程量測結果 50
4.3 推力與剛性量測結果 53
4.4 放大機構頻率響應量測結果 56
4.5 液珠量測結果 57
4.5.1 連續擊發 58
4.5.2 壓力與開啟時間差異 58
4.5.3 黏度差異 61
第五章 結論與未來展望 65
參考文獻 67
附錄 71
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dc.language.isozh_TW-
dc.subject壓電噴射閥zh_TW
dc.subject位移放大機構zh_TW
dc.subject撓性機構zh_TW
dc.subject液體分配zh_TW
dc.subject非接觸式點膠zh_TW
dc.subjectFlexible mechanismen
dc.subjectPiezoelectric jetting valveen
dc.subjectNon-contact dispensingen
dc.subjectLiquid dispensingen
dc.subjectDisplacement amplification mechanismen
dc.title基於巢狀式撓性放大機構之壓電噴射閥設計zh_TW
dc.titleDesign of a Piezoelectric Jetting Dispensing Valve based on a Nested-Type Amplified Actuatoren
dc.typeThesis-
dc.date.schoolyear113-2-
dc.description.degree碩士-
dc.contributor.oralexamcommittee蘇偉儁;高豐生zh_TW
dc.contributor.oralexamcommitteeWei-Jiun Su;Feng-Sheng Kaoen
dc.subject.keyword壓電噴射閥,位移放大機構,撓性機構,液體分配,非接觸式點膠,zh_TW
dc.subject.keywordPiezoelectric jetting valve,Displacement amplification mechanism,Flexible mechanism,Liquid dispensing,Non-contact dispensing,en
dc.relation.page76-
dc.identifier.doi10.6342/NTU202503712-
dc.rights.note同意授權(全球公開)-
dc.date.accepted2025-08-14-
dc.contributor.author-college工學院-
dc.contributor.author-dept機械工程學系-
dc.date.embargo-lift2025-08-20-
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