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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 楊申語 | |
dc.contributor.author | Chih-Lung Lee | en |
dc.contributor.author | 李志隆 | zh_TW |
dc.date.accessioned | 2021-05-20T20:43:13Z | - |
dc.date.available | 2010-07-21 | |
dc.date.available | 2021-05-20T20:43:13Z | - |
dc.date.copyright | 2008-07-21 | |
dc.date.issued | 2008 | |
dc.date.submitted | 2008-07-21 | |
dc.identifier.citation | A. D. Feinerman, R. E. Lajos, V. White and D. D. Denton, “X-ray lathe: an X-ray lithographic exposure tool for nonplanner objects”, Journal of Microelectromechanical systems, Vol. 5, No.4 (1996).
C. Marques, Y. M. Desta, J. Rogers, M. C. Murphy, and Kevin Kelly, “Fabrication of High-aspect-ratio microstructures on planar and nonplanar surfave using a modifies liga process”, Journal of Microelectromechanical systems, Vol. 6, No. 4 (1997). C. R. Martin and I. A. Aksay, “Microchannel molding: A soft lithography inspired approach to micrometer scale patterning”, J. Mater. Res., Vol. 20, No. 8 (2005). C. Y. Chang, S. Y. Yang, J. L. Sheh, “A roller embosiing process for rapid fabrication of microlens arrays on glass substrates”, Microsyst. Technol (2006) 12, pp. 754-759. C. Y. Chang, S. Y. Yang, M H Chu, “Rapid fabrication of ultraviolet-cured polymer microlens arrays by soft roller stamping process”, Microelecronics Engineering, v84, n2, pp. 355-361 (2007). Chao-Heng Chien, Zhi-Peng Chen, “Fabrication of a novel integrated light guiding plate by microelectromechanical systems technique for backlight system”, Journal of Microlithography, Microfabrication and Microsystems, v5, n4, pp. 043011 (2006). Chan I. Chung, “Extrusion of polymers : theory and practice”. (2000). Ed. Lowenheim, “Modern electroplating”, John Wiley & Sons, (1974) E. Kukharenka, M. M. Farooqui, L. Grigore, M. Kraft and N. Hollinshead, “Electroplating moulds using dry film thick negative photoresist”, J. Micromech. Microeng. 13. pp.67-74 (2003). G. O. Mallory and J. B. Hajdu, “Electroless Plating, Fundamentals and Applications”, AESF (1990). H. Lorenz, L. Paratte, R. Luthier, N. F. de Rooij and P. Renaud, “Low-cost technology for multilayer electroplated parts using laminated dry film resist”, Sensors and Actuators A 53 pp.364-368 (1996). H. Tan, A. Gilbertson and S. Y. Chou, “Roller nanoimprint lithography”, J. Vac. Sci. Technol. B 16(6), (1998). H.Ito, I.Satoh, T.Saito, K.Yakemoto, “A Melt-Transcription process to fabricate thermoplastic products with homogeneous surface micro structures applied to display parts and micro-fluidic devices”, Proc. of PPS-22, SP6.17 (2006). James R. Sheats, “Roll-to-roll manufacturing of thin film electronics”, Proceedings of SPIE - The International Society for Optical Engineering, v 4688, n 1, pp. 240-248 (2002). J. Zhu, A. S. Holmes, J. Arnold, R. A. Lawes and P.D. Prewett, “Laminated dry film resist for microengineering applications”, Microelectronics Engineering.30 pp.365-368(1996). K. Fujimoto, S. Fujita, B. Ding and S. Shiratori, “Fabrication of layer-by-layer self-assembly films using roll-to roll process”, Japanese Journal of Applied Physics, Vol. 44, No.3, (2005), pp. 126-128. K Stephan, P Pittet, L Renaud, P Kleimann, P Morin, NOuaini and R Ferrigno, “Fast prototyping using a dry film photoresist: microfabrication of soft-lithography masters for microfluidic structures”, J. Micromech. Microeng. 17. N69-N74(2007). M. B. Chan-Park, W. K. Neo, “Ultraviolet embossing for patterning high aspect ratio polymeric microstructures”, Microsystem Technologies 9 pp.501–506 (2003). M. Meiler, M. Pfestorf, M. Geiger, M. Merklein, “The use of dry film in aluminum sheet metal forming”, Wear 255 pp.1455–1462 (2003). M. E. Sandison and H. Morgan, “Rapid fabrication of polymer microfluidic systems for the production of artificial lipid bilayers”, J. Micromech. Microeng. 15(2005) pp.139-144. M. He, X.-C. Yuan, N. Q. Ngo, J. Bu, and V. Kudryashov, “Simple reflow technique for fabrication of a microlens array in solgel glass”, OPTICS LETTERS ,Vol. 28 ,No. 9 (2003). M. T Gale, “Replication techniques for diffractive optical elements ”, Microelecronics Engineering 34 pp. 321-339(1997). M Heckele, W K Schomburg, “Review on micro molding of thermoplastic polymers”, Journal of Micromechanics and Microengineering, v 14, n 3, pp. R1-R14 (2004). Montgomery, “Design and Analysis of Experiments” 6 Edition”. Manaresi, M. Tartagni and R. Guerrieri, “Microfluidic channel fabrication in dry film resist for production and prototyping of hybrid chips”, Lab on a Chip, 5, pp.158-162 (2005). P. Vulto, N. Glade, L. Altomare, J. Bablet, L. Del Tin, G. Medoro, I. Chartier, N. K Stephan, P Pittet, L Renaud, P Kleimann, P Morin, NOuaini and R Ferrigno,” Fast prototyping using a dry film photoresist: microfabrication of soft-lithography masters for microfluidic structures” , J. Micromech. Microeng. 17 pp.69–74 (2007). R. Parkinson, ”Properties and applications of electroless nickel”, NiDI (1997). S. M. Seo, T. I. Kim, and H. H. Lee, “Simple fabrication of nanostructure by continuous rigiflex imprinting”, Microelectronics Engineering (2006). S. Ahn, M. Choi, H. Bae, J. Lim, H. Myung, H. Kim, and S. Kang, “Design and fabrication of micro optical film by ultraviolet roll imprinting ”, Japanese Journal of Applied Physics, Vol. 46, No.8B, pp. 5478-5484 (2007). T. Katoh, N. Nishi, M. Fukagawa, H. Ueno and S. Sugiyama, “Direct writing for three-dimensional microfabrication using synchrotron radiation etching”, Sensor and Actuators A 89 (2001) pp.10-15. T. Kololuoma, M. Tuomikoski, T. Makela, J. Heilmann, T. Haring, J. Kallioinen, J. Hagberg, I. Kettunen, and H. Kopola, “Towards roll-to-roll fabrication of electronics, optics and optoelectronics for smart and intelligent packaging”, Proceddings of SPIE Vol. 5363. T. Makela, S. Jussila, H. Kosonenm, T. G. Backlund, H. G. O. Sandberg, and H. Stubb, “Utilizing roll-to-roll techniques for manufacturing source-drain electrodes for all-polymer transistors”, Synthetic Metals 153 (2005) pp. 285-288. V. L. Spiering, J. W. Berenschot and M. Elwenspoek,”Planarization and fabrication of bridges across deep grooves or holes in silicon using a dry film photoresist followed by an etch back” , J. Micromech. Microeng. 5 pp.189–192 (1995). W. Riedel, “Electroless Nickel Plating”, Finishing Publication Ltd. (1991) W. M. Choi and O. O. Park, “The fabrication of submicron patterns on curved substrates using a polydimethylsiloxane film mould”, Nanotechnology 15 pp.1767-1770 (2004). W. P. Shih, Y. Cheng, C.Y. Lin and G. J. Hwang, “Low-cost X-ray conformal mask using dry film resist”, Microeleftronic Engineering 40 pp.43-50 (1998). Y. C. Tsai, H. P. Jen, K. W. Lin and Y. Z. Hsieh, “Fabrication of microfluidic devices using dry film photoresist for microchip capillary electrophoresis”, Journal of Chromatography A, 1111(2006) 267-271. Y. Xia and G. M. Whitesides, “Soft Lithography ”, Angew. Chem. Int. Ed. 37, pp.550-575 (1998). Z. T. Ke, C. S. Lee, K. H. Shen and E.Y. Chang, “A study of the fabrication of Flip-Chip bumps using dry-film photttoresist process on 300mm wafer”, IEEE (2004). 張哲豪, ”流體微熱壓製程開發研究” ,臺灣大學博士論文,民國93年6月。 黎正中,陳源樹編譯, “實驗設計與分析” ,高立出版,民國92年。 潘昆志, “微結構滾輪製造方法及結構” ,中華民國專利證書號數:I251266,民國94年。 謝正倫, “滾輪微結構壓印製程開發研究” ,臺灣大學碩士論文,民國94年6月。 | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/9818 | - |
dc.description.abstract | 精密光學元件多以射出或傳統微熱壓成型,效率有待提升,而且製作有反覆升降溫,耗時又成品殘留應力大且,複製面積也受限等缺點。因此,具連續生產特性之滾輪壓印製程便日受重視。滾輪壓印關鍵在於滾輪製作,一般是將具有微結構之薄金屬片包覆在滾輪上,導致在壓印過程中容易模具位移或翹曲等問題;若以軟性材料進行模具製作,模具不耐高溫、強度不足與耐久性不佳。
本研究應用乾膜光阻貼附於曲面滾輪基材,將微結構直接製作在滾輪上,達到一體成型之優點,可避免包覆式緊附不易與軟性模具強度不足等缺點。加上塑膠光罩可以AutoCAD繪製,輸出至PET可撓性基材,設計製作簡易、成本低廉且圖案製作彈性大,更是一大優點,曝光後之濕式蝕刻與無電鍍鎳,在滾輪上製作微結構技術也十分成熟。以乾膜光阻直接製作滾輪,大幅降低將圖案轉至滾輪之門檻。 利用乾膜光阻製作微結構滾輪有三種方式:(1)先貼合、後曝光再蝕刻;(2)先曝光、後貼合再蝕刻;(3)先曝光、後貼合再無電鍍鎳。本研究探討此三種製程順序,並探討貼合、曝光與蝕刻參數對品質影響,歸納出一完整之成型操作窗與最佳參數。 本研究進一步應用上述三種方法所製作之滾輪,裝設在擠出微壓印系統與氣體輔助平台轉印系統壓印微結構,實際進行微結構薄膜製作。擠出微壓印系統結合「滾輪微壓印」與「薄膜擠出成型」製程,以三種不同實驗設置:(1)微結構滾輪無紅外線加熱,驅動輪為矽膠滾輪;(2)微結構滾輪有紅外線加熱,驅動輪為矽膠滾輪;(3)微結構滾輪有紅外線加熱,驅動輪為剛性滾輪。以上述三種實驗設置,探討壓印後微結構於PC塑膠薄膜上成型之微結構高度,並成功將微結構轉印至PC塑膠薄膜上,且成功使用氣體輔助平台設備將無電鍍後於鋁輪上之微結構轉印至PET基材上。 最後,以結構直徑79.8μm之圓形陣列孔洞模具,成功壓印出直徑86.98μm,焦距為216μm之微透鏡陣列,量測觀察後可知以本研究之製作流程,可大量複製微結構並達到大面積且均勻之連續生產,有效提升微結構滾輪之製作與整合微結構壓印製程之開發及其應用。 | zh_TW |
dc.description.abstract | Conventionally, the precise optical elements are usually fabricated using injection molding and hot embossing processes. The disadvantages of these processes are long cycle time, residual stress in products, and limited replicating area. Hence, it is important and demanding to develop a continuous roller embossing process with the capacities of high throughput and rapid fabrication. A typical roller was made from that the thin metal sheet which had the microstructure was wrapped onto the roller. With this method, mold sliding and warping were observed during the process. On the other hand, if the mold was soft material, insufficient strength and poor durability of the mold were also problems.
This study proposes a process of fabricating microstructures on the surface of metal rollers. The direct metal roller fabricating process involves three methods including dry film resist (DFR) laminating, wet etching and electroless plating process. Additionally, the flexible film photomask can be easily designed using CAD software; it enhances the design simplicity and flexibility, so the cost is lowered. In this study, three kinds of roller fabrication processes are developed: (1) lamination before exposure, etching process; (2) exposure before lamination, etching process; and (3) exposure before lamination, electroless plating process. The parameters of lamination, exposure and etching are also investigated. After the microstructure rollers have been fabricated, the metal rollers with microstructures are used both in the hybrid extrusion embossing system and roller UV micro-stamping process. The hybrid extrusion embossing system combines “ roller embossing ” and “ film extrusion ” methods to fabricate microlens arrays and grating on PC film. In this experiment, we discuss three conditions in the hybrid extrusion embossing system: (1) non-infrapara radiant ceramic heater using silicon roller; (2) with infrapara radiant ceramic heater using silicon roller; and (3) with infrapara radiant ceramic heater using rigid roller. The height of the microstructures on PC film is discussed. Second, the fabricated roller is used as the mold in the roller UV micro-stamping process to replicate grating pattern on PET film. Finally, the microlens arrays with 86.98 μm diameter and 216 μm focal length are fabricated successfully using the roller mold with micro-holes array structures. This result proves that the rollers fabricated in this method can be used in roller embossing and UV micro-stamping for microstructure mass production. | en |
dc.description.provenance | Made available in DSpace on 2021-05-20T20:43:13Z (GMT). No. of bitstreams: 1 ntu-97-R95522703-1.pdf: 9532641 bytes, checksum: b93564db9c8241d92ca7e390d948f4a7 (MD5) Previous issue date: 2008 | en |
dc.description.tableofcontents | 致謝 I
摘要 II Abstract III 目錄 IV 表目錄 VIII 圖目錄 IX 第一章 導論 1 1.1 微結構元件量產開發的迫切性 1 1.2 各種精密複製成型技術 1 1.3 塑膠微滾壓成型 2 1.4 微結構滾輪製作與複製上之困難 2 1.5 乾膜光阻之應用 3 1.6 研究動機與主要目標 3 1.7 論文架構 4 第二章 文獻回顧 8 2.1 微結構滾輪壓印複製成型技術 8 2.1.1 滾輪應用於熱壓微成型 8 2.1.2 滾輪應用於軟微影文獻回顧 8 2.1.3 滾輪應用於UV固化微成型文獻回顧 9 2.2 乾膜光阻之性質介紹與其傳統應用 9 2.3 乾膜光阻應用於創新製程之相關文獻 10 2.3.1 高深寬比—可進行類LIGA製程 11 2.3.2 製程簡單致縮短製程所需時間—可製作微流道 11 2.3.3 平坦化與一致性之特性—製作橋狀微結構 12 2.3.4 其他應用 12 2.4 微結構滾輪製作之相關文獻 13 2.5 整體回顧總結與研究創新 14 第三章 應用乾膜光阻製作滾輪與微壓印機台之設計 32 3.1 實驗目的及整體流程規劃 32 3.2 滾輪微壓印機台之設計 32 3.2.1 滾輪組 33 3.2.2 滾輪組 33 3.2.3 滾輪組 33 3.2.4 滾輪加熱系統 33 3.2.5 滾輪圈數記數裝置 33 3.3 蝕刻法製作微結構滾輪 34 3.3.1 材料及設備 34 3.3.2 曲面曝光需使用之光罩 35 3.3.3 蝕刻法製作微結構滾輪之流程 35 3.4 無電鍍法製作微結構滾輪 37 3.4.1 材料及設備 37 3.4.2無電鍍法製作微結構滾輪之流程 37 3.5 滾輪微壓印實驗 38 3.5.1 擠出壓印成型 38 3.5.2 氣體輔助平台轉印 38 3.6 量測儀器與設備 38 3.6.1 數位式外徑測微器 38 3.6.2 紫外光源強度量測 38 3.6.3 表面輪廓儀與形狀量測儀 38 3.6.4 光學顯微鏡 38 3.6.5 掃瞄式電子顯微鏡 39 3.6.6 微透鏡陣列元件的光學性質檢測 39 第四章 滾輪製程參數探討與量測 53 4.1 應用銅片做初步之實驗參數探討 53 4.1.1 貼合參數探討 53 4.1.1.1 銅片貼合參數探討 53 4.1.2 貼合溫度 54 4.1.2.1 氣壓缸總推力、貼合轉速 54 4.1.3 材料與設備 54 4.1.4 平面曝光參數探討 54 4.1.4.1 平面曝光設置 54 4.1.4.2 平面曝光總能量計算 55 4.1.4.3 平面曝光參數結果探討 55 4.1.5 蝕刻法製作微結構於銅片之結果與討論 55 4.1.6 量測 55 4.1.6.1 光學顯微鏡量測 55 4.1.6.2 表面輪廓儀量測 56 4.2 在滾輪上貼合乾膜光阻之實驗參數探討 56 4.2.1 乾膜光阻貼合厚度2x2 因子實驗 57 4.2.2實驗設計與執行 57 4.2.3 乾膜光阻厚度量測 57 4.2.4 滾輪貼合溫度 58 4.2.5 氣壓缸總推力 58 4.2.6 滾輪貼合滾輪轉速 58 4.2.7 曲面貼合操作窗 58 4.2.8 材料與設備 58 4.2.9 滾輪曲面曝光參數探討 59 4.2.9.1 滾輪曲面曝光設置 59 4.2.9.2 滾輪曲面曝光總能量計算 59 4.2.9.3 滾輪曲面曝光參數結果探討 60 4.2.10 蝕刻法製作微結構滾輪結果與討論 60 4.2.10.1 低碳鋼 60 4.2.10.2 磷青銅 61 4.2.10.3 紅銅 61 4.2.11 量測 61 4.2.11.1 光學顯微鏡量測 61 4.2.11.2 形狀量測 62 4.3 乾膜光阻先曝光後貼合實驗參數探討 62 4.3.1 材料與設備 62 4.3.2 先貼合後曝光實驗流程 63 4.3.3 先曝光後貼合實驗流程 63 4.3.4 乾膜光阻先曝光後貼合蝕刻法製作滾輪結果與討論 63 4.3.5 量測 63 4.3.5.1 光學顯微鏡量測 64 4.3.5.2 表面輪廓儀量測 64 4.3.5.3 形狀量測 64 4.4 無電鍍鎳製作微結構滾輪 65 4.4.1 材料與設備 65 4.4.2 無電鍍介紹 65 4.4.3 無電鍍鎳鍍浴配置 66 4.4.4 鋁滾輪與無電鍍鎳製程探討 66 4.4.3.1 情況一 67 4.4.3.2 情況二 67 4.4.3.3 情況三 67 4.4.5 形狀量測 68 4.5 本章結論 68 第五章 滾輪壓印與量測 106 5.1 滾輪模具介紹 106 5.2 擠出滾輪微壓印 106 5.2.1. 實驗參數設定 107 5.2.2 壓印結果與量測 107 5.2.2.1微結構滾輪溫度對PC成型高度之影響 107 5.2.2.1.1 擠出壓印設置一(無紅外線加熱,驅動輪:矽膠滾輪) 107 5.2.2.1.2 擠出壓印設置二(有紅外線陶瓷加熱,驅動輪:矽膠滾輪) 108 5.2.2.2 施加於滾輪之推力對PC成型高度之影響 108 5.2.2.2.1 微結構滾輪模具A(先平面曝光,後貼合) 108 5.2.2.2.2 微結構滾輪模具B(先貼合,後曲面曝光) 109 5.2.2.3 驅動滾輪材質不同對PC成型高度之影響 109 5.2.2.3.1 驅動滾輪材質為矽膠滾輪 109 5.2.2.3.2 驅動滾輪材質為剛性滾輪 109 5.3 氣體輔助平台轉印 110 5.3.1 機台介紹 110 5.3.1.1 氣體輔助平台 110 5.3.1.2 平台移動傳輸機構 110 5.3.1.3 滾輪施壓機構 111 5.3.2 UV轉印流程 111 5.3.3實驗參數設定 111 5.3.4 壓印結果與量測 111 5.4 微透鏡陣列光學檢測 112 5.5 本章結論 112 第六章 結論與未來研究方向 131 6.1結論 131 6.2研究貢獻 133 6.3未來研究方向 134 參考文獻 135 附錄A CALIBRE™ 301-15性質表 140 附錄B UV1321性質表 141 附錄C 作者簡歷 143 | |
dc.language.iso | zh-TW | |
dc.title | 應用乾膜光阻直接製作微結構於金屬滾輪之技術開發與應用 | zh_TW |
dc.title | Direct Fabrication of Metal Rollers with Microstructures
Using Dry Film Resist and its Rolling Application | en |
dc.type | Thesis | |
dc.date.schoolyear | 96-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 陳仁浩,劉士榮,謝國煌 | |
dc.subject.keyword | 乾膜光阻,滾輪壓印, | zh_TW |
dc.subject.keyword | Dry Film Resist,Rolling, | en |
dc.relation.page | 143 | |
dc.rights.note | 同意授權(全球公開) | |
dc.date.accepted | 2008-07-21 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
顯示於系所單位: | 機械工程學系 |
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