基於俯視法之大面積親水性成像系統之設計與開發

Abstract

在先進製程與表面工程領域中，透過改變固體表面之親水性來提升其表面功能性，已成為常見且關鍵的技術手段，應用範疇包括增強表面接合強度、提升抗污性能等。座滴法是目前用於量測表面親水性的標準方法，其原理為將水滴滴加於材料表面後，從側面觀測其平衡狀態下的接觸角作為親水性強弱之指標。然而，此方法僅能針對樣品局部區域進行單點量測，難以提高其自動化程度以及量測效率，因此無法滿足需要快速量測大面積樣品親水性分布之工業應用。本研究建構一適用於大面積樣本之表面親水性成像系統，利用線相機配合超音波噴霧進行掃描，掃描擷取之影像再透過影像處理來獲得霧滴之平均面積，並進一步透過一檢量曲線轉換面積為量化之接觸角。本研究所開發之系統能量測樣品之最大範圍可達300 mm × 300 mm，接觸角成像解析度為2.52 mm。實驗中對局部表面改質之矽晶圓及聚醯亞胺膠帶樣品進行測試，驗證系統可於2分22秒完成65.52 mm × 75.6 mm範圍的表面親水性成像。結果顯示本研究之量測系統可明顯區分樣品表面之親水與疏水區域，並得到量化之接觸角影像。

In advanced manufacturing and surface engineering, modifying the hydrophilicity of solid surfaces is a crucial technique for enhancing surface functionalities, such as adhesion strength and anti-fouling properties. The sessile drop method, which measures the contact angle (CA) of a droplet, is the standard approach for evaluating surface hydrophilicity. However, this method is limited to measuring the CA at one position at a time, posing challenges for industrial applications that require automation, high throughput, and large-area assessment. In this study, a novel surface hydrophilicity imaging system was proposed for rapidly analyzing large-area samples. The system integrates a line-scan camera with a broadband ultrasonic generator to spray microdroplets while scanning the surface. Top-view images of the microdroplets are captured and processed to determine their average size, which is then converted to CA value using a calibration curve. The developed system enables measurements over areas up to 300 mm × 300 mm with a pixel resolution of 2.52 mm. In the experiments, a silicon wafer and polyimide tapes with surface treatments were imaged, demonstrating that an area of 65.52 mm × 75.6 mm can be imaged within 2 minutes and 22 seconds. Distinct hydrophilic and hydrophobic regions were clearly identified, and quantitative CA measurements were successfully obtained, confirming the potential of the developed system for industrial applications.