準相位匹配鉭酸鋰紅、綠、藍光倍頻雷射晶片之研製

Abstract

本篇論文主要分為相位匹配理論之介紹，一維週期性極化反轉鉭酸鋰雷射晶片之研製，以及紅、綠、藍光倍頻雷射晶片之光學量測與特性分析。原理部分闡述非線性頻率轉換與準相位匹配理論。製程部分則剖析數種研製方法，並論述其優缺。我們利用鎳金屬內擴散混合高電壓致區域反轉製程技術於厚度為0.5公釐共熔鉭酸鋰晶片；成功研製出週期為12.78微米、7.76微米、5.15微米之一維與二維週期性極化反轉鉭酸鋰倍頻雷射晶片。至於週期為7微米之一維週期性極化反轉鉭酸鋰光學參量振盪雷射晶片，以及週期為7.76與4.99微米之一維週期性極化反轉鉭酸鋰級聯雷射晶片，亦以前述方法製備。上述週期性極化反轉結構之有效長度皆可達20公釐，足以因應倍頻實驗以及光學參量振盪器架設研究之用。在光學實驗部分，先以波長為1064奈米之奈秒雷射進行綠光倍頻實驗，繼而以實驗室架設之光學參量振盪器做為泵浦光源，進行紅、藍光倍頻實驗，測量並分析雷射晶片之轉換效率。

In this thesis, the theory of quasi-phase-matching (QPM) and nonlinear optical generation and the fabrication techniques of periodically poled ferroelectric nonlinear crystals will be first introduced. I then will emphasize on the nickel-diffusion assisted electric poling method that leads to the realization of periodically poled QPM structures of 20 mm length on 0.5 mm thick congruent-grown lithium tantalate (PPCLT) substrates. The QPM-based PPCLT chips with periodicity of 12.78, 7.76, and 5.15 micrometer suitable for producing second harmonic generation (SHG) of red, green, and blue lasers and for optical parametric oscillator (OPO) of near infrared lasers have been demonstrated and characterized. Finally a green pumped cascaded OPO-SHG blue laser with double-periodicity of 7.76 and 4.99 micrometer in PPCLT will be demonstrated and discussed.