基於線圈自共振效應之測量方法研發

Abstract

本研究旨在探討基於線圈自共振效應的濾心測量方法，並評估其在不同介電溶液中的應用。研究中使用去離子水和異丙醇的混合溶液，驗證了介電常數與共振頻率之間的線性關係。實驗方法包括製備不同濃度的異丙醇與去離子水混合溶液，並利用線圈自共振效應進行頻率測量。結果顯示，隨著異丙醇濃度的增加，溶液的介電常數降低，導致線圈共振頻率上升，符合理論預測。此外，實驗還對比了不同設計的線圈測量結果，證實測量方法的穩定性和重現性。 在濾心測量中，發現使用過的濾心共振頻率低於新濾心，表明吸附粒子的存在增加了濾心的介電常數。這表明該方法能有效辨別濾心使用狀態，並檢測其吸附的粒子量。討論中指出，該技術有機會能夠應用於半導體製程中的濾心監控，以助於提高製程良率和產品品質。 結論部分強調，基於線圈自共振效應的濾心測量方法具有可行性與有效性，為未來在半導體製程及其他相關領域的應用奠定了基礎。未來研究方向包括提升測量精度、開發自動化測量系統以及結合其他檢測技術，以進一步提升檢測效率和準確性。

This study aims to explore the method of filter measurement based on the coil self-resonance effect and evaluate its application in different dielectric solutions. The research utilized mixtures of deionized water and isopropanol to verify the linear relationship between dielectric constant and resonance frequency. The experimental methods included preparing mixtures of varying concentrations of isopropanol and deionized water and measuring frequencies using the coil self-resonance effect. Results indicated that as the concentration of isopropanol increased, the dielectric constant of the solution decreased, causing the coil resonance frequency to rise, which aligned with theoretical predictions. Additionally, the study compared measurement results from coils of different designs, confirming the stability and reproducibility of the measurement method. In filter measurement, it was found that used filters had lower resonance frequencies compared to new filters, indicating that the presence of adsorbed particles increased the dielectric constant of the filters. This demonstrated that the method could effectively distinguish the usage status of the filters and detect the amount of particles adsorbed. The discussion pointed out that this technique has the potential to be applied in filter monitoring in semiconductor processes, which can help improve yield and product quality. The conclusion emphasized that the filter measurement method based on the coil self-resonance effect is feasible and effective, laying the foundation for future applications in semiconductor manufacturing and other related fields. Future research directions include improving measurement accuracy, developing automated measurement systems, and integrating other detection technologies to further enhance detection efficiency and accuracy.