雷射振鏡系統與運動平台同步控制與誤差分析

Abstract

雷射振鏡掃描系統已被廣泛應用於多樣化的雷射加工製程，例如打標、鑽孔、表面紋理化、雷射誘發材料轉移等技術。然而振鏡掃描系統的工作視野受限於物鏡焦距的限制，提高物鏡焦距可擴大工作視野範圍，但會導致雷射分辨率下降，降低加工精密度，不足以支持大範圍的高速加工需求。當前工業製造通常結合多軸運動平台機構與掃描系統實現大面積的雷射加工，然而該方法需要精確的校準程序，應用於工業需求之高速單一重複製程效率較差。 雷射飛行加工技術(Laser on-the-fly)為廣範圍、高速、高精密度的晶圓加工製程提供了可行性。根據加工系統設計可實現自動化的工件送料與機械校準，結合振鏡掃描系統即可達成高速、高精度的飛行加工。本研究旨在開發一結合等速運動平台與雷射振鏡掃描系統之動態雷射飛行加工系統，引入雷射加工監測技術，並應用於同步多軸運動控制系統以實現加工檢測與參數優化，並通過自主開發加工軟體建立便於操作與監控之使用者介面。本研究建構並整合開發一套動態雷射飛行加工系統，使用波長355奈米之紫外光脈衝雷射，並透過實驗以驗證其工作性能。所開發之系統具有良好之性能，在掃描尺寸為直徑10 μm之正圓時可達誤差在 ±0.5 μm以內之精度，並且在掃描速度3000 mm/s以下皆可維持該工作性能，並且足可適用於單軸或雙軸平面之大面積雷射加工製程，在覆蓋式掃描製程中可在全區域維持穩定之雷射注量，所開發之系統在保證加工品質之標準下可充分提高雷射加工效率，可期為未來產業發展之參考。

Laser galvanometer scanners have been widely used in a variety of laser processing processes, such as marking, drilling, surface texturing, laser-induced forward transfer, and other technologies. However, the working field of the laser galvo scanner is limited by the limitation of the focal length of the objective lens, and increasing the focal length of the objective lens can expand the working field of view, but it will lead to the decrease of laser resolution and reduce the processing precision, which is not enough to support a wide range of high-speed processing needs. At present, industrial manufacturing usually combines a multi-axis motion platform mechanism and a laser galvo scanner to achieve large-area laser processing, but this method requires accurate calibration procedures. The efficiency of the method applied to high-speed single reproduction process is relatively poor. Laser on-the-fly technology provides feasibility for a wide range, high-speed, high-precision wafer processing process. According to the design of the processing system, automatic workpiece feeding and mechanical calibration can be realized, and high-speed and high-precision on-the-fly processing can be achieved in combination with laser galvo scanners. The purpose of this research is to develop a dynamic laser on-the-fly processing system that combines a constant speed motion platform and a laser galvo scanner, introduce laser processing monitoring technology, and apply it to a synchronous multi-axis motion control system to achieve processing detection and parameter optimization. This research establishes a user interface for easy operation and monitoring through self-developed processing software. In this study, a dynamic laser on-the-fly processing system was constructed and integrated to use an ultraviolet pulse laser with a wavelength of 355 nm, and its working performance was verified through experiments. The developed system has a good performance in scanning the size of 10 μm diameter circle can reach the accuracy within ±0.5 μm, and the scanning speed of 3000 mm/s or less can maintain the performance, and is sufficient for single-axis or dual-axis planar large-area laser processing process, in the cover scanning process can be maintained in the whole area of the laser injection amount is stable, the developed system can fully improve the efficiency of laser processing under the standard of quality assurance, and is expected to be a reference for the future development of the industry. The developed system can fully improve the laser processing efficiency under the standard of guaranteeing the processing quality, which is expected to be a reference for the future development of the industry.