探針卡定位之光學系統設計與開發

Abstract

本研究致力於設計一套系統化的鏡頭設計方法，完全使用市售球面透鏡進行設計，並且用於半導體電氣檢測的機械視覺檢測上。該系統由兩組不同放大倍率鏡頭所組成，其中低倍率用於捕捉半導體檢測探針卡位置，而高倍用於精確定位探針位置。以下為系統需求規格：放大倍率1.5與18倍、工作距離4.12 mm、鏡頭長度不超過130 mm，由於檢測機台上的探針卡定位要求放大倍率不因物距改變，且畸變要非常小，因此本文以遠心鏡頭方向進行設計。 該系統可分為六個部分：1.列出需求2.設計規格3.光學模擬4.模擬分析與公差分析5.光機設計6.性能測試。首先列出檢測機台要求規格，挑選使用Cooke三透鏡進行初始設計，此設計具有校正所有初階像差的能力如球差、彗差、場曲、像散、畸變，因此適合做為設計的基礎，再來使用光學模擬軟體ZEMAX一步一步增加與優化透鏡，使系統的規格逐步地符合要求範圍，同時皆使用球面透鏡形式進行設計。利用調製傳遞函數(MTF)進行模擬分析，再進行蒙地卡羅公差分析(Monte-Carlo analysis)，確定良率符合一定水準，確保鏡頭的可製造性再進行光機設計。最後進行性能測試，使用顯微鏡矯正板、USAF標準板與網格標準板，以驗證本研究之模擬是否與實際相符，即完成鏡頭從無到有完整的設計流程。

This study is devoted to the design of a systematic lens design method for mechanical visual inspection in wafer acceptance test. The system consists of two sets of lenses with different magnifications, where the low magnification is used to capture the position of the probe card and the high magnification is used to precisely locate the probe position. The following are the specifications of the system requirements magnification 1.5 and 18 times, working distance 4.12 mm, the length of the system does not exceed 130 mm, due to the positioning of the probe card on the inspection machine requires magnification does not change due to the object distance, and the distortion should be very small, so this paper is designed in the direction of the telecentric lens. The system can be divided into several parts: 1. listed requirements, 2. design specifications, 3. optical simulation, 4. simulation and tolerance analysis, 5. optical machine design, 6. performance testing. First list of inspection machine requirements specifications, select the use of Cooke triplet for the initial design, this design has the ability to correct all the primary aberration, suitable for the basis of the design, and then the use of optical simulation software ZEMAX step by step to increase and optimize the lenses, so that the system's specifications gradually comply with the requirements of the range, while using spherical lenses for the design of the form. Simulation analysis is performed using the Modulation Transfer Function (MTF), and then Monte-Carlo analysis is performed to ensure that the yield meets a certain level and that the manufacturability of the lens is ensured before proceeding with the design of the optical machine. Finally, performance tests are conducted using various standard test boards to verify whether the simulation of this study matches the reality, which completes the complete design process of the lens from scratch.