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http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/93390完整後設資料紀錄
| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 廖先順 | zh_TW |
| dc.contributor.advisor | Hsien-Shun Liao | en |
| dc.contributor.author | 吳起雲 | zh_TW |
| dc.contributor.author | Chi-Yun Wu | en |
| dc.date.accessioned | 2024-07-30T16:16:39Z | - |
| dc.date.available | 2024-07-31 | - |
| dc.date.copyright | 2024-07-30 | - |
| dc.date.issued | 2024 | - |
| dc.date.submitted | 2024-07-19 | - |
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[2] B. Bera and M. Das Sarkar, "Piezoelectric effect, piezotronics and piezophototronics: A review," Imperial Journal of Interdisciplinary Research, vol. 2, pp. 1407-1410, 2016. [3] A. V. Carazo, "Piezoelectric transformers: An historical review," Actuators, vol. 5, p. 12, 2016. [4] M. A. Trimzi, Y. B. Ham, B. C. An, Y. M. Choi, J. H. Park, and S. N. Yun, "Development of a piezo-driven liquid jet dispenser with hinge-lever amplification mechanism," micromachines, vol. 11, p. 117, 2020. [5] H. S. Liao, S. H. Cheng, and E. T. Hwu, "Development of a resonant scanner to improve the imaging rate of astigmatic optical profilometers," IEEE/ASME Transactions on Mechatronics, vol. 26, pp. 1172-1177, 2021. [6] J. P. Lia, H. Huang, and T. Moritac, "Stepping piezoelectric actuators with large working stroke for nano-positioning systems: A review," Sensors and Actuators A: Physical, vol. 292, pp. 39-51, 2019. [7] W. Ma, R. Q. Wang, X. Q. Zhou, and G. W. Meng, "The performance comparison of typical notched flexure hinges," Mechanical Engineering Science, vol. 234, pp. 1859-1867, 2019. [8] J. Mizrahi, Kinematics: Analysis and Applications. BoD – Books on Demand, 2019. [9] Y. K. Yong, S. O. R. Moheimani, B. J. Kenton, and K. K. Leang, "Invited review article: High-speed flexure-guided nanopositioning: Mechanical design and control issues," Review of Scientific Instruments, vol. 83, 2012. [10] M. X. Ling, J. Y. Cao, M. H. Zeng, J. Lin, and D. J Inman, "Enhanced mathematical modeling of the displacement amplification ratio for piezoelectric compliant mechanisms," Smart Materials and Structures, vol. 25, p. 075022, 2016. [11] J. L. Chena, C. L. Zhang, M. L. Xub, Y. Y. Zia, and X. Zhang, "Rhombic micro-displacement amplifier for piezoelectric actuator and its linear and hybrid model," Mechanical Systems and Signal Processing, vol. 50, pp. 580-593, 2015. [12] Y. Z. Li, S.S. Bi, and C.X. Zhao, "Analytical modeling and analysis of rhombus-type amplifier based on beam flexures," Mechanism and Machine Theory, vol. 139, pp. 195-211, 2019. [13] Q. S. Xu and Y.M. Li, "Analytical modeling, optimization and testing of a compound bridge-type compliant displacement amplifier," Mechanism and Machine Theory, vol. 46, pp. 183-200, 2011. [14] K. Q. Qi, Y. Xiang, C. Fang, Y. Zhang, and C. S. Yu, "Analysis of the displacement amplification ratio of bridge-type mechanism," Mechanism and Machine Theory, vol. 87, pp. 45-56, 2015. [15] M. Muraokaa and S. Sanada, "Displacement amplifier for piezoelectric actuator based on honeycomb link mechanism," Sensors and Actuators A: Physical, vol. 157, pp. 84-90, 2010. [16]M. X. Ling, L. Yuan, Z. H. Luo, T. Huang, and X. M. Zhang, "Enhancing dynamic bandwidth of amplified piezoelectric actuators by a hybrid lever and bridge-type compliant mechanism," Actuators, vol. 11, p. 134, 2022. [17] X. Yang, L. Zhu, S. Li, W. Zhu, and C. Ji, "Development of a novel pile-up structure based nanopositioning mechanism driven by piezoelectric actuator," IEEE/ASME Trans. Mechatronics, vol. 25, pp. 502-512, 2020. [18] J. H. Kim, S. H. Kim, and Y. K. Kwak, "Development of a piezoelectric actuator using a three-dimensional bridge-type hinge mechanism," Review of Scientific Instruments, vol. 74, pp. 2918-2924, 2003. [19] S. B. Choi, S. S. Han, Y. M. Han , and B. S. Thompson, "A magnification device for precision mechanisms featuring piezoactuators and flexure hinges: Design and experimental validation," Mechanism and Machine Theory, vol. 42, pp. 1184-1198, 2007. [20] X. B. Zhu, X. Xu, Z. J. Wen, J. Q. Ren, and P. K. Liu, "A novel flexure-based vertical nanopositioning stage with large travel range," Review of Scientific Instruments, vol. 86, 2015. [21] P. R. Ouyang, W. J. Zhang, and W. J. Zhang, "A new compliant mechanical amplifier based on a symmetric five-bar topology," Journal of Mechanical Design, vol. 130, 2008. [22] I. S. Hwang, E. T. Hwu, K. Y. Huang, C. S. Chang, H. S. Liao, W. M. Wang, Y. H. Chen, C. H. Chen, C. H. Cheng, and H. F. Huang, "Astigmatic detection system: New tool for precision measurements," 科儀新知, vol. 200, pp. 46-65, 2014. [23] D. K. Cohen, W. H. Gee, M. Ludeke, and J. Lewkowicz, "Automatic focus control: The astigmatic lens approach," Applied Optics, vol. 23, pp. 565-570, 1984. | - |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/93390 | - |
| dc.description.abstract | 壓電式致動器是一種利用壓電效應將電能轉換為機械能的元件。壓電材料在受到電場作用時會產生形變，而這種形變可以用來驅動機械元件。壓電式致動器具有耐用度高、出力強、驅動頻率高等優勢，因此被廣泛應用於自動化工業、精密儀器等領域。然而，壓電材料的變形量較低，因此壓電式致動器的行程也較小。為了滿足某些應用場合的需求，需要對壓電式致動器的行程進行放大。壓電行程放大器是一種用於放大壓電式致動器行程的機構。現有的壓電行程放大器多為槓桿式。槓桿式放大器的原理是利用槓桿的力學原理，將壓電材料的微小形變放大為較大的行程。槓桿式放大器具有結構簡單的優點，但其垂直輸出位移方向上的尺寸較大，因此不適合安裝在空間狹小的場所。為了克服槓桿式放大器的缺點，本文提出了一撓性結構的壓電行程放大器設計。此設計使用尺寸為7736 mm3之積層式壓電元件，首先以壓電元件推動一菱形撓性放大機構，菱形機構再推動一對對稱之槓桿結構，槓桿結構再撐開一個半菱形結構，共可達到285 μm之致動行程，以及11.5倍之行程放大倍率。所提出之結構利用槓桿及菱形結構之特性互補，使得占用較大空間的槓桿式結構及積層式壓電元件能被配置在平行輸出位移之方向上，使得所設計之致動器尺寸可在604412 mm3以內。相較於同伸長量之其他致動器，所提出之致動器寬度尺寸可減少50%以上，並具有935 Hz之輸出方向共振頻率及0.16 N/μm之輸出剛性。 | zh_TW |
| dc.description.abstract | Through converting electrical energy into mechanical deformation, piezo-actuator can be used to actuate mechanical components. Piezoelectric actuators have advantages of high durability, large output force, and high bandwidth, which have been widely used in automatic manufacturing and precision instruments. Due to the small displacement of the piezoelectric actuator, amplification mechanism is necessary for many applications required long travel distance. The lever-type amplifier is a commonly used mechanism, which has simple structure. However, the lever-type amplifier usually has a larger dimension in the direction that paralleled to the output axis, making it difficult to fit in a narrow space. To overcome this limitation, this study proposed a nested-type amplified piezo actuator design using a compliant mechanism. This design employed a piezoelectric stack with dimensions of 7×7×36 mm3 to drive a rhombus-type amplifier. The displacement of the rhombus-type amplifier then actuated two symmetrical lever-type amplifiers. Finally, the two levers deformed a half rhombus-type amplifier to achieve a total displacement of 285 μm with an amplification ratio of 11.5. The proposed design integrated two types of the amplifiers to reduce the width, and the dimensions of the actuator were under 60×44×12 mm3, offering up to a 50% reduction in width compared to other actuator designs. The design also featured an output resonance frequency of 935 Hz and an output stiffness of 0.16 N/μm. | en |
| dc.description.provenance | Submitted by admin ntu (admin@lib.ntu.edu.tw) on 2024-07-30T16:16:39Z No. of bitstreams: 0 | en |
| dc.description.provenance | Made available in DSpace on 2024-07-30T16:16:39Z (GMT). No. of bitstreams: 0 | en |
| dc.description.tableofcontents | 口試委員審定書 i
致謝 ii 摘要 iii Abstract iv 目 次 v 圖 次 viii 表 次 xiii 第一章 緒論 1 1.1 研究背景 1 1.2 文獻回顧 2 1.2.1 壓電材料的原理 3 1.2.2 壓電材料的歷史 3 1.2.3 壓電致動器之類型 3 1.2.4 機械式位移放大機構 7 1.2.5 共振式位移放大機構 8 1.2.6 步進式壓電致動器 9 1.2.7 撓性結構之關節設計 11 1.2.8 槓桿式撓性放大結構 13 1.2.9 菱形式撓性放大結構 15 1.2.10 複合式撓性放大結構 20 1.3 研究目的 21 1.4 內容簡介 23 第二章 巢狀撓性放大機構 25 2.1 巢狀撓性放大機構之設計概念 25 2.2 巢狀撓性放大機構有限元素分析 28 2.3 巢狀撓性放大機構模態分析 31 第三章 實驗架構與設計 33 3.1 整體系統架構 33 3.2 壓電柱安裝 34 3.3 荷重元與應變規 38 3.3.1 應變規（Strain gauge） 38 3.3.2 惠斯通電橋（Wheatstone bridge） 39 3.3.3 荷重元（Load cell） 40 3.3.4 穩壓電路 41 3.3.5 前置放大器 44 3.3.6 校正裝置 45 3.4 位移量測系統 47 3.4.1 像散式光學輪廓儀 47 3.4.2 雷射位移計 51 3.5 控制系統 52 3.5.1 控制板 52 3.5.2 鎖相放大器 53 3.5.3 電壓放大器 54 第四章 實驗流程與結果 56 4.1 實驗流程 56 4.2 實驗前準備 56 4.2.1 荷重元校正 56 4.2.2 商用紅光讀取頭校正 58 4.2.3 積層式壓電元件無負載位移量 59 4.3 撓性結構軸向定義 60 4.4 行程與放大倍率實驗 61 4.4.1 總行程實驗結果 64 4.4.2 壓電元件伸長量實驗結果 65 4.4.3 半菱形撓性放大結構位移放大量實驗結果 66 4.4.4 總行程放大量實驗結果 67 4.5 巢狀撓性結構推力實驗 67 4.5.1 巢狀撓性結構推力實驗結果 69 4.6 頻率響應實驗 71 4.6.1 共振模態掃頻實驗 72 4.6.2 輸出端主軸(A, Y)頻率響應 78 4.6.3 第二階槓桿臂(D, X)頻率響應 79 4.6.4 撓性末端(C, X)頻率響應 80 4.6.5 撓性末端(B, Z)頻率響應 81 4.6.6 壓電柱輸入端(E, Z)頻率響應 82 4.7 結果與討論 82 第五章 結論與未來展望 83 參考文獻 84 附錄 86 | - |
| dc.language.iso | zh_TW | - |
| dc.subject | 壓電行程放大器 | zh_TW |
| dc.subject | 壓電式致動器 | zh_TW |
| dc.subject | 菱形式放大結構 | zh_TW |
| dc.subject | 槓桿式放大結構 | zh_TW |
| dc.subject | 撓性結構 | zh_TW |
| dc.subject | compliant mechanism | en |
| dc.subject | lever-type amplifier | en |
| dc.subject | rhombus-type amplifier | en |
| dc.subject | piezo electric amplifier | en |
| dc.subject | piezo-electric actuator | en |
| dc.title | 巢狀式位移放大壓電致動器之設計與開發 | zh_TW |
| dc.title | Design and Development of a Nested-Type Amplified Piezoelectric Actuator | en |
| dc.type | Thesis | - |
| dc.date.schoolyear | 112-2 | - |
| dc.description.degree | 碩士 | - |
| dc.contributor.oralexamcommittee | 高豐生;胡恩德 | zh_TW |
| dc.contributor.oralexamcommittee | Feng-Sheng Gao;En-Te Hwu | en |
| dc.subject.keyword | 壓電式致動器,壓電行程放大器,撓性結構,槓桿式放大結構,菱形式放大結構, | zh_TW |
| dc.subject.keyword | piezo-electric actuator,piezo electric amplifier,compliant mechanism,lever-type amplifier,rhombus-type amplifier, | en |
| dc.relation.page | 91 | - |
| dc.identifier.doi | 10.6342/NTU202401983 | - |
| dc.rights.note | 同意授權(全球公開) | - |
| dc.date.accepted | 2024-07-22 | - |
| dc.contributor.author-college | 工學院 | - |
| dc.contributor.author-dept | 機械工程學系 | - |
| 顯示於系所單位： | 機械工程學系 | |
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