壓電能量擷取器之製程最佳化和真空封裝設計與研究

Abstract

隨著人類文明進步，日新月異的科技產品讓我們生活於不受空間、時間限制的數位世界，但同時伴隨的問題是，大量科技產品所需的電源供應。近年來，電力議題成為台灣社會關注的焦點，減少火力發電、提升綠電比例，已成為世界共同的趨勢。除了常見的風力、太陽能、水力…，振動能也是一種極具發電潛力的能量來源，特別適合應用於物聯網的穿戴型裝置。 壓電材料是種可將能量轉換於力學能、電能之間的特殊材料，若是能與環境中的振動能搭配，大量的穿戴式裝置、無人裝置，可不受電力限制所苦。本實驗室所研發的懸臂樑模型，就是專注於擷取生活中的振動能，將其轉換為電能，再儲存以供後端裝置使用，目標達成實現自供電的理想。 本論文研究氣膠沉積法中的各項參數，透過設計實驗再互相比較結果，以求歸納出最佳化的製程參數，並詳細列出逐步製程說明。以XRD、EDS、SEM等儀器，驗證目前所採用的參數，並不會使壓電粉末變質。為提升元件表現且使元件可以攜帶，設計與製作專屬於壓電能量擷取器的真空封裝，透過實驗證明，經過真空封裝後的壓電能量擷取器，開路電壓、輸出功率分別有8.77 %與24.9 %的提升。另外也展示真空封裝的真空度可以維持一定時間。最後講述以真空封裝為基準，所設計的真空封裝且可調頻的機構，以彌補壓電能量擷取器，頻寬較窄的問題。

With the progress of human civilization, technology products allow us to live in a digital world without constraints of space and time. However, a critical issue is the power usage required by related devices. Recently, the focus on electrical power has become a debate in Taiwan. Reducing thermal power generation and raising the scale of green energy has become a global trend. Apart from common sources like wind, solar, and hydropower, vibration may also be a highly potential source. Particularly suitable for wearable devices within the Internet of Things. Piezoelectric materials can convert energy between mechanical and electrical energy. Combining piezoelectric materials with ambient vibration provides a solution to wearable and unmanned devices, which are constrained by power. The cantilever beam model developed in our laboratory is designed to focus on extracting vibration from our daily lives, converting it into electrical energy, and storing it for the usage of backend devices. The final goal is to achieve the realization of self-power. This thesis discusses various parameters of the aerosol deposition method. Via experimental design and result comparisons, the aim is to generalize the optimal parameters and provide a detailed step-by-step process explanation. Instruments such as XRD, EDS, and SEM are used to ensure the quality of piezoelectric powders. To enhance device performance and portability, a vacuumed package for piezoelectric energy harvester (PEH) is designed and implemented. The results after vacuum sealing show that the open-circuit voltage and output power increase by 8.77 % and 24.9 %, respectively. Furthermore, the vacuum level of the package can be maintained for a certain period. A vacuum and tunable package is introduced, which aims to compensate for the narrow bandwidth of the PEH.