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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 傅立成 | zh_TW |
dc.contributor.advisor | Li-Chen Fu | en |
dc.contributor.author | 魏向泓 | zh_TW |
dc.contributor.author | Hsiang-Hung Wei | en |
dc.date.accessioned | 2023-10-03T17:23:31Z | - |
dc.date.available | 2023-11-10 | - |
dc.date.copyright | 2023-10-03 | - |
dc.date.issued | 2023 | - |
dc.date.submitted | 2023-08-05 | - |
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dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/90735 | - |
dc.description.abstract | 原子力顯微鏡是一種用於量測奈米尺度的高解析度儀器,目前被廣泛運用在諸多領域,如半導體檢測、奈米材料科學、生物科學等。儘管原子力顯微鏡有相當的優勢,但仍存在固有的缺點。由於使用物理探針量測,在掃描過程會受限於探針本身的幾何形狀,探針的幾何形狀可能導致在與掃描方向平行的側壁出現和下降面側壁失真。此外,常見的掃描方法是由致動器的 X-Y 軸控制掃描軌跡,而 Z 軸控制探針與樣本的相對距離。然而,這樣的控制架構在遇到傾角大的側壁時,會使得樣本側壁的取樣點過於稀疏,可能會忽略側壁重要的特徵,而進一步影響結果的準確性。本篇研究設計了一種新穎的全向式原子力顯微鏡,以解決掃描側壁失真和取樣點稀疏的問題,並開發一套旋轉平台與可旋轉探針的原子力顯微鏡系統,使得樣本安裝於旋轉平台上以實現全向掃描,並以可旋轉式探針進行側壁精準掃描。我們還提出一個對齊的方法,用於定位旋轉平台的旋轉圓心並將其與掃描區域對齊,這個過程可以確保即使在樣本旋轉後,待掃描的樣本仍保持在掃描區域內。最後亦提出相應的掃描策略,可以處理多邊形樣本與圓柱樣本,透過重建方法獲得精準無失真的樣本拓樸。 | zh_TW |
dc.description.abstract | Atomic force microscopy (AFM) is a cutting-edge instrument capable of achieving high-resolution measurements of nanoscale surfaces. Nowadays, AFM is widely used in various fields such as semiconductor inspection, nanomaterials science, and bioscience. Despite its considerable advantages, AFM does have some inherent drawbacks. The use of a physical probe influences the scanning result. The geometry of the probe can lead to distortions on the falling sidewall and on the sidewalls that are parallel to the scanning direction. Moreover, the common scanning method employs the X-Y axis actuators to track the scanning trajectory, while the Z axis actuator is used to maintain the tip-sample relative position. However, the control scheme may pose concerns about the accuracy of measurements on the sidewall. The steeper the sidewall, the sparser the sampling points are, which could potentially neglect significant features on the sidewall due to this sparse sampling. In this research, we design a novel omnidirectional AFM to address the sidewall distortion and sparse sampling points on the sidewalls. The AFM system is integrated with a rotating stage and a rotatable probe. The rotating stage, placed beneath the sample, achieves omnidirectional scanning by rotating the sample. The rotatable probe allows for precise scanning of the sidewall topography. An alignment process is also introduced to identify the center position of the rotating stage and align it with the AFM scanning region. This process ensures that the target sample stays within the scanning region even after sample rotation. Additionally, the scanning strategy is also developed which can deal with the polygonal samples and the circular samples. With the reconstruction method, the precise artifact-free of the sample topography can be obtained. | en |
dc.description.provenance | Submitted by admin ntu (admin@lib.ntu.edu.tw) on 2023-10-03T17:23:31Z No. of bitstreams: 0 | en |
dc.description.provenance | Made available in DSpace on 2023-10-03T17:23:31Z (GMT). No. of bitstreams: 0 | en |
dc.description.tableofcontents | 口試委員會審定書
誌謝 I 摘要 II TABLE OF CONTENTS IV LIST OF FIGURES VII LIST OF TABLES X Chapter 1 Introduction 1 1.1 Motivation 1 1.2 Literature Review 3 1.2.1 Advanced probe 4 1.2.2 System modification 6 1.3 Contribution 9 1.4 Thesis Organization 10 Chapter 2 Preliminaries 11 2.1 Piezoelectric Actuator 11 2.1.1 Piezoelectric effect 11 2.1.2 Hysteresis effect 13 2.2 Working Principle of AFM 14 2.2.1 Contact Mode 16 2.2.2 Non-contact Mode 17 2.2.3 Tapping Mode 18 Chapter 3 Hardware Design 19 3.1 Overall System Structure 19 3.2 AFM system 21 3.2.1 Piezoelectric actuator 22 3.2.2 Measurement probe 23 3.3 Optical microscopy (OM) 25 3.4 Long-traveling range positioning stage (LTRPS) 26 3.5 Rotational Mechanism 28 3.5.1 Rotating Stage 29 3.5.2 Rotatable Probe 31 3.6 Hardware Devices for Control 34 Chapter 4 Scanning Methodology 38 4.1 Overview of the Scanning Process 38 4.2 Alignment Method 39 4.2.1 Feature matching algorithm 40 4.2.2 Eccentricity algorithm 42 4.2.3 OM and LTRPS calibration 44 4.3 Scanning Strategy 46 4.3.1 Polygonal Sample 48 4.3.2 Circular Sample 56 Chapter 5 Experiment and result 63 5.1 Rotatable Probe analysis 63 5.2 Alignment Validation 65 5.3 Omnidirectional Scan with multiple sidewall 67 5.3.1 Island sample 67 5.3.2 Cylinder sample 72 Chapter 6 Conclusion and future work 77 REFERENCES 78 | - |
dc.language.iso | en | - |
dc.title | 整合旋轉平台與可旋轉探針於新型全向式原子力顯微鏡之高精度掃描 | zh_TW |
dc.title | High Precision Scanning of a Novel Omnidirectional AFM Integrated with Rotating Stage and Rotatable Probe | en |
dc.type | Thesis | - |
dc.date.schoolyear | 111-2 | - |
dc.description.degree | 碩士 | - |
dc.contributor.oralexamcommittee | 陳永耀;張以全;練光祐;吳俊緯 | zh_TW |
dc.contributor.oralexamcommittee | Yung-Yaw Chen;I-Tsyuen Chang;Kuang-Yow Lian;Jim-Wei WU | en |
dc.subject.keyword | 原子力顯微鏡,側壁失真,取樣點分布,合作式旋轉系統,新型原子力顯微鏡系統, | zh_TW |
dc.subject.keyword | AFM,Sidewall distortion,Data distribution,Rotating mechanism,Novel AFM system, | en |
dc.relation.page | 80 | - |
dc.identifier.doi | 10.6342/NTU202302178 | - |
dc.rights.note | 同意授權(限校園內公開) | - |
dc.date.accepted | 2023-08-08 | - |
dc.contributor.author-college | 電機資訊學院 | - |
dc.contributor.author-dept | 電機工程學系 | - |
顯示於系所單位: | 電機工程學系 |
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