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  1. NTU Theses and Dissertations Repository
  2. 電機資訊學院
  3. 生醫電子與資訊學研究所
請用此 Handle URI 來引用此文件: http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/88607
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dc.contributor.advisor林致廷zh_TW
dc.contributor.advisorChih-Ting Linen
dc.contributor.author蘇子程zh_TW
dc.contributor.authorTzu-Cheng Suen
dc.date.accessioned2023-08-15T17:02:22Z-
dc.date.available2023-11-09-
dc.date.copyright2023-08-15-
dc.date.issued2023-
dc.date.submitted2023-08-02-
dc.identifier.citation[1] W. Baumann, M. Lehmann, A. Schwinde, R. Ehret, M. Brischwein, and B. Wolf. Microelectronic sensor system for microphysiological application on living cells. Sensors and Actuators B: Chemical, 55(1):77–89, 1999.
[2] P. Bergveld. Thirty years of isfetology: What happened in the past 30 years and what may happen in the next 30 years. Sensors and Actuators B: Chemical, 88(1):1–20, 2003.
[3] S. Cao, P. Sun, G. Xiao, Q. Tang, X. Sun, H. Zhao, S. Zhao, H. Lu, and Z. Yue. Isfetbased sensors for (bio) chemical applications: A review. Electrochemical Science Advances, page e2100207, 2022.
[4] U. Chadha, P. Bhardwaj, R. Agarwal, P. Rawat, R. Agarwal, I. Gupta, M. Panjwani, S. Singh, C. Ahuja, S. K. Selvaraj, et al. Recent progress and growth in biosensors technology: A critical review. Journal of Industrial and Engineering Chemistry, 109:21–51, 2022.
[5] W.-J. Cho and C.-M. Lim. Sensing properties of separative paper-based extendedgate ion-sensitive field-effect transistor for cost effective ph sensor applications. Solid-State Electronics, 140:96–99, 2018.
[6] N. Elgrishi, K. J. Rountree, B. D. McCarthy, E. S. Rountree, T. T. Eisenhart, and J. L.Dempsey. A practical beginner's guide to cyclic voltammetry. Journal of chemical education, 95(2):197–206, 2018.
[7] Estevezj. Sanger Sequencing. CC BY-SA 3.0, 2012.
[8] P. Gostelow, S. Parsons, and R. Stuetz. Odour measurements for sewage treatment works. Water research, 35(3):579–597, 2001.
[9] M. A. Islam, P. Mahbub, P. N. Nesterenko, B. Paull, and M. Macka. Prospects of pulsed amperometric detection in flow-based analytical systems-a review. Analytica chimica acta, 1052:10–26, 2019.
[10] S. Jamasb, S. Collins, and R. L. Smith. A physical model for drift in ph isfets. Sensors and Actuators B: Chemical, 49(1-2):146–155, 1998.
[11] D. S. Juang, C.-H. Lin, Y.-R. Huo, C.-Y. Tang, C.-R. Cheng, H.-S. Wu, S.-F. Huang, A. Kalnitsky, and C.-C. Lin. Proton-elisa: Electrochemical immunoassay on a dualgated isfet array. Biosensors and Bioelectronics, 117:175–182, 2018.
[12] H. Li, X. Liu, L. Li, X. Mu, R. Genov, and A. J. Mason. Cmos electrochemical instrumentation for biosensor microsystems: A review. Sensors, 17(1):74, 2016.
[13] S. Libertino, F. Giannazzo, V. Aiello, A. Scandurra, F. Sinatra, M. Renis, and M. Fichera. Xps and afm characterization of the enzyme glucose oxidase immobilized on sio2 surfaces. Langmuir, 24(5):1965–1972, 2008.
[14] K. Nakazato. An integrated isfet sensor array. Sensors, 9(11):8831–8851, 2009.
[15] K. B. Oldham. A gouy–chapman–stern model of the double layer at a (metal)/(ionic liquid) interface. Journal of Electroanalytical Chemistry, 613(2):131–138, 2008.
[16] A. Ortiz-Conde, F. G. Sánchez, J. J. Liou, A. Cerdeira, M. Estrada, and Y. Yue. A review of recent mosfet threshold voltage extraction methods. Microelectronics reliability, 42(4-5):583–596, 2002.
[17] A. Saito, S. Miyamoto, J. Kimura, and T. Kuriyama. Isfet glucose sensor for undiluted serum sample measurement. Sensors and Actuators B: Chemical, 5(1-4):237–239, 1991.
[18] T. Sakata, S. Matsumoto, Y. Nakajima, and Y. Miyahara. Potential behavior of biochemically modified gold electrode for extended-gate field-effect transistor. Japanese Journal of Applied Physics, 44(4S):2860, 2005.
[19] I. Sarangadharan, S.-L. Wang, R. Sukesan, P.-c. Chen, T.-Y. Dai, A. K. Pulikkathodi, C.-P. Hsu, H.-H. K. Chiang, L. Y.-M. Liu, and Y.-L. Wang. Single drop whole blood diagnostics: portable biomedical sensor for cardiac troponin i detection. Analytical chemistry, 90(4):2867–2874, 2018.
[20] S. Sari. surface plasmon resonance (spr), 2011.
[21] M. J. Schöning and A. Poghossian. Recent advances in biologically sensitive fieldeffect transistors (biofets). Analyst, 127(9):1137–1151, 2002.
[22] M. Sohbati and C. Toumazou. Dimension and shape effects on the isfet performance. IEEE Sensors Journal, 15(3):1670–1679, 2014.
[23] P. Sun, Y. Cong, M. Xu, H. Si, D. Zhao, and D. Wu. An isfet microarray sensor system for detecting the dna base pairing. Micromachines, 12(7):731, 2021.
[24] Y. Wang, T. Liu, M. Yang, C. Wu, W. Zhang, Z. Chu, and W. Jin. A handheld testing device for the fast and ultrasensitive recognition of cardiac troponin i via an ionsensitive field-effect transistor. Biosensors and Bioelectronics, 193:113554, 2021.
[25] wikipedia. Wikipedia introduction of diabetes.
[26] D. E. Yates, S. Levine, and T. W. Healy. Site-binding model of the electrical double layer at the oxide/water interface. Journal of the Chemical Society, Faraday Transactions 1: Physical Chemistry in Condensed Phases, 70:1807–1818, 1974.
[27] H. Yoon, S. Ko, and J. Jang. Field-effect-transistor sensor based on enzymefunctionalized polypyrrole nanotubes for glucose detection. The Journal of Physical Chemistry B, 112(32):9992–9997, 2008.
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dc.identifier.urihttp://tdr.lib.ntu.edu.tw/jspui/handle/123456789/88607-
dc.description.abstract本論文探討了寄生閘極離子敏感型場效電晶體(ISFET)在葡萄糖檢測中的應用。本次研究使用TSMC D35標準CMOS技術設計了兩組晶片,其中包含不同的ISFET結構,並搭配類似雙閘極結構之寄生閘以放大訊號。

研究的目標是分析各種ISFET結構,並找出對閾值電壓(Threshold Voltage)反應最佳的結構。其中2D和3D ISFETs表現出最佳的閾值電壓敏感度,被選中用於測量葡萄糖濃度。

本研究採用的葡萄糖感測機制為葡萄糖氧化酶反應,將電晶體改質後將氧化酶固定於表面,分別加入不同濃度之葡萄糖溶液進行電性量測。並針對不同模式下的晶片進行線性度、靈敏度、選擇性的分析,結果顯示,其擁有很高的線性度以及量測極限,具有葡萄糖監測裝置的潛力。

總結而言,本論文對寄生閘ISFETs在葡萄糖檢測中進行了研究。其中2D 寄生閘極 ISFET 被認為測量葡萄糖濃度的最佳結構,為醫療保健和生物技術領域的應用提供了有希望的前景。
zh_TW
dc.description.abstractThis thesis investigates the application of Parasitic Gate Ion Sensitive Field Effect Transistors (ISFETs) for glucose detection. Two sets of chips were designed using TSMC D35 standard CMOS Technology, incorporating different ISFET structures with a parasitic gate resembling a dual-gate configuration to amplify the signal.

The objective of this research was to analyze various ISFET structures and identify the ones with the best threshold voltage response. The 2D and 3D ISFETs exhibited superior sensitivity to threshold voltage changes and were selected for glucose concentration measurement.

The glucose sensing mechanism employed glucose oxidase reaction, where the enzyme was immobilized on the modified transistor surface. The chips were subjected to electrical measurements with different concentrations of glucose solutions. The linearity, sensitivity, and selectivity of the devices in different modes were analyzed. The results demonstrated high linearity and measurement limits, indicating the potential of the glucose monitoring device.

In conclusion, this thesis presents a study on Parasitic Gate ISFETs for glucose detection. The 2D parasitic gate ISFET was identified as the optimal structure for measuring glucose concentration, offering promising prospects for applications in healthcare and biotechnology.
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dc.description.provenanceSubmitted by admin ntu (admin@lib.ntu.edu.tw) on 2023-08-15T17:02:21Z
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dc.description.provenanceMade available in DSpace on 2023-08-15T17:02:22Z (GMT). No. of bitstreams: 0en
dc.description.tableofcontentsVerification Letter from the Oral Examination Committee i
Acknowledgments iii
摘要 v
Abstract vii
Contents ix
List of Figures xiii
List of Tables xv
Denotation xvii

Chapter 1 Introduction 1
1.1 Preamble 1
1.2 Research Motivation 2
1.3 Thesis Structure 4

Chapter 2 Background 5
2.1 Biomedical Sensing Technology 5
2.1.1 Chemistry Reaction Method 6
2.1.2 Optical Method 6
2.1.3 Electrochemical Method 8
2.2 Ion Sensitive Field Effect Transistor 10
2.2.1 Theory 11
2.2.2 Types of ISFET 19
2.2.3 Applications 23
2.2.4 Non-ideal Effect of ISFET 26

Chapter 3 Device Design and Experimental Method 29
3.1 Design and Fabrication of CMOS Compatible ISFET 29
3.1.1 Design of 3D-ISFET 30
3.1.2 Design of 2D-ISFET 32
3.1.3 Design of TiN-ISFET 32
3.1.4 Design of PG-ISFET 35
3.1.5 Wire Bonding and Packaging 35
3.2 Experimental Method 36
3.2.1 Experimental Design 36
3.2.2 Surface Modification and Glucose Immobilization 39

Chapter 4 Experimental Result 43
4.1 Performance of different types of ISFETs 44
4.1.1 Solution Gate Mode(SG) 44
4.1.2 Parasitic Gate Mode(PG) 46
4.1.3 Summary 50
4.2 Glucose Response 53
4.2.1 2D-ISFET 54
4.2.2 3D-ISFET 55
4.2.3 Selectivity 56
4.2.4 Summary 59

Chapter 5 Conclusion and Future Work 59
5.1 Conclusion 59
5.2 Future Work 60
Reference 63
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dc.language.isoen-
dc.subject葡萄糖zh_TW
dc.subject離子敏感型場效電晶體zh_TW
dc.subject氮化鈦離子敏感型電晶體zh_TW
dc.subject感測器zh_TW
dc.subject寄生閘極zh_TW
dc.subject雙閘極zh_TW
dc.subject延伸閘極zh_TW
dc.subjectTiNen
dc.subjectISFETen
dc.subjectGlucoseen
dc.subjectIon Sensitiveen
dc.subjectSensoren
dc.subjectDual Gateen
dc.subjectExtended Gateen
dc.subjectCMOS Sensoren
dc.subjectBio Sensoren
dc.title寄生閘極離子敏感型場效電晶體於葡萄糖濃度檢測之研究zh_TW
dc.titleResearch of Parasitic Gate Ion Sensitive Field Effect Transistor in Glucose Detectionen
dc.typeThesis-
dc.date.schoolyear111-2-
dc.description.degree碩士-
dc.contributor.oralexamcommittee黃建璋;黃念祖zh_TW
dc.contributor.oralexamcommitteeJian-Jang Huang;Nien Tsu Huangen
dc.subject.keyword寄生閘極,離子敏感型場效電晶體,葡萄糖,感測器,雙閘極,延伸閘極,氮化鈦離子敏感型電晶體,zh_TW
dc.subject.keywordISFET,Glucose,Ion Sensitive,Sensor,Dual Gate,Extended Gate,CMOS Sensor,Bio Sensor,TiN,en
dc.relation.page66-
dc.identifier.doi10.6342/NTU202302019-
dc.rights.note同意授權(限校園內公開)-
dc.date.accepted2023-08-04-
dc.contributor.author-college電機資訊學院-
dc.contributor.author-dept生醫電子與資訊學研究所-
dc.date.embargo-lift2026-07-31-
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