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  1. NTU Theses and Dissertations Repository
  2. 電機資訊學院
  3. 電子工程學研究所
請用此 Handle URI 來引用此文件: http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/87721
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dc.contributor.advisor林宗賢zh_TW
dc.contributor.advisorTsung-Hsien Linen
dc.contributor.author張家翔zh_TW
dc.contributor.authorChia-Hsiang Changen
dc.date.accessioned2023-07-19T16:06:39Z-
dc.date.available2023-11-09-
dc.date.copyright2023-07-19-
dc.date.issued2023-
dc.date.submitted2023-06-06-
dc.identifier.citation[1] K. Myny, "The Development of Flexible Integrated Circuits Based on Thin-Film Transistors," Nature Electronics, vol. 1, no. 1, pp. 30-39, Jan. 2018.
[2] C. Garripoli, J.-L. P. J. Van Der Steen, E. Smits, G. H. Gelinck, A. H. M. Van Roermund and E. Cantatore, "An a-IGZO Asynchronous Delta-Sigma Modulator on Foil Achieving up to 43dB SNR and 40dB SNDR in 300Hz Bandwidth," IEEE International Solid-State Circuits Conference, pp. 260-261, Feb. 2017.
[3] Y.-H. Tai, S.-C. Huang, W.-P. Chen, Y.-T. Chao, Y.-P. Chou and G.-F. Peng, "A Statistical Model for Simulating the Effect of LTPS TFT Device Variation for SOP Applications," Journal of Display Technology, vol. 3, no. 4, pp. 426-433, Dec. 2007.
[4] B. Razavi, Design of Analog CMOS Integrated Circuits, McHraw Hill, 2001.
[5] T. Moy, L. Huang, W. Rieutort-Louis, P. Cuff, S. Wagner, J. C. Sturm and N. Verma, "An EEG Acquisition and Biomarker-Extraction System Using Low-Noise-Amplifier and Compressive-Sensing Circuits Based on Flexible, Thin-Film Electronics," IEEE Journal of Solid-State Circuits, vol. 52, no. 1, pp. 309-321, Jan. 2017.
[6] W.-M. Lin, C.-F. Lin and S.-I. Liu, "A CBSC Second-Order Sigma-Delta Modulator in 3μm LTPS-TFT Technology," IEEE Asian Solid-State Circuits Conference, pp. 133-136, Nov. 2009.
[7] D. Raiteri, P. Van Lieshout, A. Van Roermund and E. Cantatore, "An Organic VCO-Based ADC for Quasi-Static Signals Achieving 1LSB INL at 6b Resolution," IEEE International Solid-State Circuits Conference, pp. 108-110, Feb. 2013.
[8] N. P. Papadopoulos, F. De Roose, J.-L. P. Van Der Steen, E. C. Smits, M. Ameys, W. Dehaene, J. Genoe and K. Myny, "Toward Temperature Tracking with Unipolar Metal-Oxide Thin-Film SAR C-2C ADC on Plastic," IEEE Journal of Solid-State Circuits, vol. 53, no. 8, pp. 2263-2272, Aug. 2018.
[9] M. Zulqarnain, S. Stanzione, J.-L. P. van der Steen, G. H. Gelinck, K. Myny, S. Abdinia and E. Cantatore, "A 52 µW Heart-Rate Measurement Interface Fabricated on A Flexible Foil with A-IGZO TFTs," IEEE 44th European Solid-State Circuits Conference, pp. 222-225, Sep. 2018.
[10] Z. Tang, R. Zamparette, Y. Furuta, T. Nezuka and K. A. A. Makinwa, "A ±25A Versatile Shunt-Based Current Sensor with 10kHz Bandwidth and ±0.25% Gain Error from -40°C to 85°C Using 2-Current Calibration," IEEE International Solid-State Circuits Conference, pp. 66-68, Feb. 2022.
[11] C.-L. Hsu and D. A. Hall, "A Current-Measurement Front-End with 160dB Dynamic Range and 7ppm INL," IEEE International Solid-State Circuits Conference, pp. 326-328, Feb. 2018.
[12] H. Ha, R. V. Wegberg, J. Xu, M. Konijnenburg, P. Vis, A. Breeschoten, S. Song, C. V. Hoof and N. V. Helleputte, "A Bio-Impedance Readout IC With Digital-Assisted Baseline Cancellation for Two-Electrode Measurement," IEEE Journal of Solid-State Circuits, vol. 54, no. 11, pp. 2969-2979, Nov. 2019.
[13] K.-C. Woo and B.-D. Yang, "0.3-V RC-to-Digital Converter Using a Negative Charge-Pump Switch," IEEE Transactions on Circuits and Systems II: Express Briefs, vol. 67, no. 2, pp. 245-249, Feb. 2020.
[14] W. Choi, Y. Lee, S. Kim, S. Lee, J. Jang, J. Chun, K. A. A. Makinwa and Y. Chae, " A Compact Resistor-Based CMOS Temperature Sensor with an Inaccuracy of 0.12 ◦C (3σ) and a Resolution FoM of 0.43 pJ·K2 in 65-nm CMOS," IEEE Journal of Solid-State Circuits, vol. 53, no. 12, pp. 3356-3367, Dec. 2018.
[15] K. Myny, A. K. Tripathi, J.-L. Van Der Steen and B. Cobb, "Flexible thin-film NFC tags," IEEE Communications Magazine, vol. 53, no. 10, pp. 182-189, Oct. 2015.
[16] E. Sacco, J. Vergauwen and G. Gielen, "A 96.9-dB-Resolution 109-μW Second-Order Robust Closed-Loop VCO-Based Sensor Interface for Multiplexed Single-Ended Resistance Readout in 180-nm CMOS," IEEE Journal of Solid-State Circuits, vol. 57, no. 9, pp. 2764-2777, Sept. 2022.
[17] J.-Y. Lin, The Research of low damage plasma surface modification with graphene-based gas sensor, Master Thesis, 2022.
[18] C.-L. Chen and T.-H. Lin, "An Open-loop VCO-based ADC with Quasi-Chopping and Non-linearity Cancellation for Bio-Sensor Applications," IEEE Biomedical Circuits and Systems Conference, pp. 317-320, Oct. 2022.
[19] J. Borgmans, R. Riem and P. Rombouts, "The Analog Behavior of Pseudo Digital Ring Oscillators Used in VCO ADCs," IEEE Transactions on Circuits and Systems I: Regular Papers, vol. 68, no. 7, pp. 2827-2840, Jul. 2021.
[20] C.-C. Tu, Y.-K. Wang and T.-H. Lin, "A Low-Noise Area-Efficient Chopped VCO-Based CTDSM for Sensor Applications in 40-nm CMOS," IEEE Journal of Solid-State Circuits, vol. 52, no. 10, pp. 2523-2532, Oct. 2017.
[21] P.-H. Huang, C.-C. Tu and T.-H. Lin, "An Area-Efficient VCO-Based Hall Sensor Readout System for Autofocus Applications," IEEE International Symposium on Circuits and Systems, pp. 1-5, May 2019.
[22] W. Jiang, V. Hokhikyan, H. Chandrakumar, V. Karkare and D. Marković, "A ±50-mV Linear-Input-Range VCO-Based Neural-Recording Front-End with Digital Nonlinearity Correction," IEEE Journal of Solid-State Circuits, vol. 52, no. 1, pp. 173-184, Jan. 2017.
[23] H. Hu and S. Gupta, "A 0.22-μW Single-Bit VCO-Based Time-Domain Sensor-to-Digital Front-End with Reduced Supply Sensitivity," IEEE Transactions on Circuits and Systems I: Regular Papers, vol. 69, no. 1, pp. 148-159, Jan. 2022.
[24] A. Paidimarri, D. Griffith, A. Wang, G. Burra and A. P. Chandrakasan, "An RC Oscillator with Comparator Offset Cancellation," IEEE Journal of Solid-State Circuits, vol. 51, no. 8, pp. 1866-1877, Aug. 2016.
[25] S. Vasishta, K. R. Raghunandan, A. Dodabalapur and T. R. Viswanathan, "A Single-Step Subranging Relaxation Oscillator-Based Open-Loop Sigma-Delta ADC," IEEE Transactions on Circuits and Systems I: Regular Papers, vol. 70, no. 3, pp. 993-1005, Mar. 2023.
[26] C. Lee, T. Jeon, M. Jang, S. Park, J. Kim, J. Lim, J.-H. Ahn, Y. Huh and Y. Chae, "A 6.5-μW 10-kHz BW 80.4-dB SNDR Gm-C-Based CT ∆∑ Modulator with A Feedback-Assisted Gm Linearization for Artifact-Tolerant Neural Recording," IEEE Journal of Solid-State Circuits, vol. 55, no. 11, pp. 2889-2901, Nov. 2020.
[27] K.-M. Lei, P.-I. Mak and R. P. Martins, "A 0.35-V 5,200-μm2 2.1-MHz Temperature-Resilient Relaxation Oscillator With 667 fJ/Cycle Energy Efficiency Using an Asymmetric Swing-Boosted RC Network and a Dual-Path Comparator," IEEE Journal of Solid-State Circuits, vol. 56, no. 9, pp. 2701-2710, Sept. 2021.
[28] V. Medina, R. Garvi, E. Gutierrez, S. Paton and L. Hernandez, "A Gray-Encoded Ring Oscillator for Efficient Frequency-to-Digital Conversion in VCO-Based ADCs," IEEE Transactions on Circuits and Systems II: Express Briefs, vol. 70, no. 3, pp. 870-874, Mar. 2023.
[29] S. Rao, K. Reddy, B. Young and P. K. Hanumolu, "A Deterministic Digital Background Calibration Technique for VCO-Based ADCs," IEEE Journal of Solid-State Circuits, vol. 49, no. 4, pp. 950-960, Apr. 2014.
[30] S. Abdinia, M. Benwadih, R. Coppard, S. Jacob, G. Maiellaro, G. Palmisano, M. Rizzo, A. Scuderi, F. Tramontana, A. Van Roermund and E. Cantatore, "A 4b ADC Manufactured in A Fully-Printed Organic Complementary Technology Including Resistors," IEEE International Solid-State Circuits Conference, pp. 106-108, Feb. 2013.
[31] P. Prabha, S. J. Kim, K. Reddy, S. Rao, N. Griesert, A. Rao, G. Winter and P. K. Hanumolu, "A Highly Digital VCO-Based ADC Architecture for Current Sensing Applications," IEEE Journal of Solid-State Circuits, vol. 50, no. 8, pp. 1785-1795, Aug. 2015.
[32] C. S. Park, H. Kim, K. Lee, D. S. Keum, D. P. Jang and J. J. Kim, "A 145.2dB-DR Baseline-Tracking Impedance Plethysmogram IC for Neckband-Based Blood Pressure and Cardiovascular Monitoring," IEEE International Solid-State Circuits Conference, pp. 1-3, Feb. 2022.
[33] C.-L. Chen, Design of CMOS Sensor Interface Circuits for EEG and Open-Loop VCO-Based ADC, Master Thesis, 2022.
[34] N. Papadopoulos, S. Steudel, A. J. Kronemeijer, M. Ameys and K. Myny, "Flexible 16nJ/c.s. 134S/s 6b MIM C-2C ADC using Dual Gate Self-Aligned Unipolar Metal-Oxide TFTs," IEEE Custom Integrated Circuits Conference, pp. 1–4, Apr. 2019.
[35] H. Çeliker, A. Sou, B. Cobb, W. Dehaene and K. Myny, "Flex6502: A Flexible 8b Microprocessor in 0.8µm Metal-Oxide Thin-Film Transistor Technology Implemented with a Complete Digital Design Flow Running Complex Assembly Code," IEEE International Solid-State Circuits Conference, pp. 272-274, Feb. 2022.
[36] S. Li, D. Z. Pan and N. Sun, "An OTA-Less Second-Order VCO-Based CT ∆∑ Modulator Using an Inherent Passive Integrator and Capacitive Feedback," IEEE Journal of Solid-State Circuits, vol. 55, no. 5, pp. 1337-1350, May 2020.
[37] H. Ha, C. Van Hoof and N. Van Helleputte, "Measurement and Analysis of Input-Signal Dependent Flicker Noise Modulation in Chopper Stabilized Instrumentation Amplifier," IEEE Solid-State Circuits Letters, vol. 1, no. 4, pp. 90-93, Apr. 2018.
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dc.identifier.urihttp://tdr.lib.ntu.edu.tw/jspui/handle/123456789/87721-
dc.description.abstract本作品呈現了實作於 3 微米低溫多晶矽-薄膜電晶體製程的類比數位轉換器,主要應用於近靜態信號的感測。在類比數位轉換器的設計方面,選用時域操作的架構,解決電晶體嚴重不匹配所引起的電壓偏移,可能會導致電路飽和的問題,使得電路可以正確運作。時域的電路設計上,使用壓控振盪器取代傳統的積分器,以達到面積的高效運用。此外,採用了單端的系統級斬波技術,近一步消除電路貢獻的雜訊,提升整體的解析度和動態範圍。在電路的輸出端加入線性補償的演算法,大幅提升電路的線性度。此晶片的核心面積僅 3.6 mm2,功率消耗為 505 µW (操作在5 V 電源下),在 0.6 V 的輸入和 250 赫茲的頻寬下,可以達到 48.2 dB 的信噪比。
而最小的輸入端積分等效雜訊為 0.63 mVrms,實現了 59.6 dB 的動態範圍。在品質因素方面分別達到 FoMs = 105.2 dB 及 FoMw = 4.8 nJ/conv.。
zh_TW
dc.description.abstractIn this dissertation, an analog-to-digital converter (ADC) implemented in 3-µm low temperature polycrystalline silicon thin-film transistor (LTPS-TFT) is presented. The primary objective of this work is to develop an ADC that offers high resolution and good energy efficiency for quasi-signal sensing applications. The proposed voltage-controlled oscillator (VCO)-based ADC features an area efficient and digitally intensive architecture for low-voltage operation. By employing time-domain operation, the circuit is able to mitigate issues arising from transistor mismatch and prevent saturation. Additionally, the system-level chopping technique is employed to cancel out offset voltage and flicker noise, resulting in an improved signal to-noise ratio (SNR) and dynamic range (DR). Moreover, a linear compensation method is adopted to improve the overall linearity.The core area of the ADC is 3.6 mm2, and it consumes only 505 µW of power under a 5-V power supply voltage. When operating at full-scale input voltage of 0.6 V, the SNR is measured at 48.2 dB, and the effective number of bits (ENOB) is 7.72 bits. For minimum input voltage of 1 mV and a frequency bandwidth of 250 Hz, the integrated input-referred noise is 0.63 mVrms, resulting in a DR of 59.6 dB. The FoMs of the ADC is 105.2 dB, while the FoMw is 4.8 nJ/conv.en
dc.description.provenanceSubmitted by admin ntu (admin@lib.ntu.edu.tw) on 2023-07-19T16:06:39Z
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dc.description.provenanceMade available in DSpace on 2023-07-19T16:06:39Z (GMT). No. of bitstreams: 0en
dc.description.tableofcontents審定書 i
致謝 iii
摘要 v
Abstract vii
List of Figures xi
List of Tables xv
Chapter 1 Introduction 1
1.1 Background 1
1.2 Dissertation Overview 3
Chapter 2 Fundamental of Sensor Design and Prior Art in TFT and CMOS Technology 5
2.1 Introduction of General TFT Technology 5
2.2 Fundamental of Circuit Design in LTPS-TFT Technology 7
2.2.1 Mismatch of Transistors’ Threshold Voltage and Mobility 8
2.2.2 Noise Analysis 9
2.2.3 Other Consideration 12
2.3 Prior ADCs in TFT technologies 13
2.3.1 Organic TFT 13
2.3.2 Indium-Gallium-Zinc Oxide (IGZO) TFT 13
2.3.3 LTPS-TFT 15
2.4 Fundamental of General Sensor Design 17
2.4.1 Current Sensor 18
2.4.2 Resistance Sensor 18
2.5 Performance of DC Sensing ADC 20
2.5.1 Effective Resolution 20
2.5.2 Input-Referred Noise and Dynamic Range (DR) 22
Chapter 3 Design of A VCO-based ADC in LTPS-TFT Technology for Quasi-Static Sensing Signal 25
3.1 Introduction 25
3.1.1 Motivation 25
3.1.2 Introduction of Gas Sensor 25
3.1.3 Architecture of ADC 28
3.2 Fundamental of VCO-Based ADC 29
3.3 Proposed VCO-Based ADC for Gas Sensing 34
3.3.1 Introduction 34
3.3.2 Proposed System Block Diagram and Analysis 35
3.4 Circuit Implementation and Analysis 42
3.4.1 The Gm-CCO Structure 42
3.4.2 CCO Architecture 46
3.4.3 Quantizer 51
3.4.4 Linearity Compensation 52
Chapter 4 Measurement Results 55
4.1 Chip Micrograph 55
4.2 Measurement Environment and Setup 56
4.3 Measured Results 57
Chapter 5 Conclusions and Future Works 71
5.1 Conclusions 71
5.2 Future Works 72
References 77
-
dc.language.isoen-
dc.subject線性補償zh_TW
dc.subject時域zh_TW
dc.subject近靜態信號偵測zh_TW
dc.subject低溫多晶矽-薄膜電晶體zh_TW
dc.subject感測器zh_TW
dc.subject壓控振盪器zh_TW
dc.subject類比數位轉換器zh_TW
dc.subject系統級斬波技術zh_TW
dc.subjectSensoren
dc.subjectLinearity compensationen
dc.subjectSystem-level choppingen
dc.subjectVoltage-Controlled Oscillator (VCO)en
dc.subjectLow-temperature polycrystalline silicon thin-film transistor (LTPS-TFT))en
dc.subjectQuasi-signal sensingen
dc.subjectEnergy efficiencyen
dc.subjectAnalog-to-Digital Converteren
dc.title低溫多晶矽製程下基於壓控振盪器的近靜態信號感測 器讀取電路設計zh_TW
dc.titleDesign of VCO-Based Sensor Readout Circuits for Quasi -Static Sensing Signals in LTPS-TFT Technologyen
dc.typeThesis-
dc.date.schoolyear111-2-
dc.description.degree碩士-
dc.contributor.oralexamcommittee劉深淵;李泰成;陳忠宏zh_TW
dc.contributor.oralexamcommitteeShen-Iuan Liu;Tai-Cheng Lee;Jhong-Hong Chenen
dc.subject.keyword感測器,低溫多晶矽-薄膜電晶體,近靜態信號偵測,時域,壓控振盪器,系統級斬波技術,線性補償,類比數位轉換器,zh_TW
dc.subject.keywordLow-temperature polycrystalline silicon thin-film transistor (LTPS-TFT)),Analog-to-Digital Converter,Energy efficiency,Quasi-signal sensing,Sensor,Voltage-Controlled Oscillator (VCO),System-level chopping,Linearity compensation,en
dc.relation.page82-
dc.identifier.doi10.6342/NTU202300942-
dc.rights.note未授權-
dc.date.accepted2023-06-06-
dc.contributor.author-college電機資訊學院-
dc.contributor.author-dept電子工程學研究所-
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