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Title: | 噴射式大氣電漿系統製備高光伏性能透明電極——氧化鋅摻鎵薄膜與奈米銀線複合材料 High Photovoltaic Performance Transparent Conductive Thin Film Electrodes Deposited by Atmospheric Pressure Plasma Jet——Ga-doped Zinc Oxides and Silver Nanowire Composite Materials |
Authors: | 羅毓棠 Yu-Tang Luo |
Advisor: | 莊嘉揚 Jia-Yang Juang |
Keyword: | 噴射式大氣電漿,透明導電薄膜,霧度性質,氧化鋅摻鎵,鈣鈦礦,太陽能電池,奈米銀線,複合材料, Atmospheric pressure plasma jet (APPJ),Transparent conductive oxide (TCO),Haze factor,Gallium doped zinc oxide (GZO),Perovskite,Solar cell,Silver nanowire (AgNW),Composite material, |
Publication Year : | 2023 |
Degree: | 碩士 |
Abstract: | 在環保意識抬頭的今天,可再生能源的研究日趨重要,太陽能電池是其中被廣泛研究的項目,如何改善其光電轉換效率是當今一大研究課題。太陽能電池的結構中作為電極的透明導電薄膜(Transparent conductive thin film)的霧度提升在許多研究中曾提及能有效提升矽基太陽能電池的光電轉換效率,然而本實驗室先前研究發現高霧度透明導電薄膜反而降低了鈣鈦礦太陽能電池的效率,與矽基的結果相左,因此本研究深入探討其原因,並找出實際能改善光電轉換效率的方法。
本研究使用電子顯微鏡(Scanning electron microscopy, SEM)、原子力顯微鏡(Atomic force microscopy, AFM)、X射線衍射儀(X-ray Diffractometer, XRD)以及光激螢光光譜儀(Photoluminescence spectrum, PL)量測對以噴射式大氣電漿(Atmospheric pressure plasma jet, APPJ)系統鍍製的透明導電薄膜作為前電極製作的鈣鈦礦太陽能電池進行深度分析,推論出高霧度薄膜表面過多的凸起物是造成短路並影響晶格成長造成光電轉換效率低下的關鍵原因,此外本研究使用影像分析軟體分析了在低倍率SEM照片下表面凸起在薄膜表面的比例多寡,以此為基準量化討論了凸起物多寡與效率之間的關係,並且給出當面積占比小於0.1 %時才能製作出品質較佳的鈣鈦礦太陽能電池這個標準。 在此之上本研究根據薄膜沉積理論,提出了以改變掃描速度穩定改善APPJ系統鍍製透明導電薄膜表面凸起的方法,並用此方法成功做出高品質GZO透明導電薄膜具有高達84 %以上的穿透率以及低於20Ω/sq的片電阻並且凸起站比僅有0.043 %,此薄膜能作為前電極使鈣鈦礦太陽能電池光電轉換效率提高到13.15 %。 更進一步本研究還提出另一種改善APPJ系統製前電極的方法,就是引入奈米銀線(Silver Nanowire, AgNW)製作奈米銀線複合材料薄膜。本研究開發了使用APPJ系統完成同時鍍膜與奈米銀線預處理的多工製程,使用此製程能使奈米銀線複合材料薄膜擁有良好的光電性能(片電阻約12 Ω/sq,可見光波段穿透度大於80 %),且在大氣環境下超過半年片電阻幾乎不改變。若利用奈米銀線複合材料薄膜的高近紅外線穿透(在1000 nm的波段穿透仍大於70 %)本薄膜還適用矽基太陽能電池的前電極。本研究採用此種複合材料薄膜作為前電極製作鈣鈦礦太陽能電池達到13.58 %的高光電轉換效率,證明了此方法的有效性。 Due to the rising awareness of environmental protection, research on renewable energy is becoming increasingly important. Solar cells are one of the most widely researched projects, and how to improve their photoelectric conversion efficiency (PCE) has been an important research topic these years. The increase of the haze of the transparent conductive film used as the front electrode in the silicon-based solar cell has been proposed in many studies as an effective means to improve the PCE. However, our previous study showed that this trend does not hold for perovskite solar cells—hazy front electrodes actually decrease their PCE. This thesis aims to investigate the cause of this phenomenon and propose methods to improve the PCE. In this study, scanning electron microscopy (SEM), atomic force microscope (AFM), X-ray diffractometer (XRD), and laser fluorescence spectrometer (PL) were used to determine the optoelectronic properties of the transparent conductive oxide (TCO) deposited by the Atmospheric pressure plasma jet (APPJ) system. This study prepared perovskite solar cells using APPJ-deposited TCO with a wide range of haze factors and conducted an in-depth analysis of their properties and performance. This thesis shows that the excessive protrusions on the surface of the high-haze film are the key reasons for low PCE, as they cause short circuits and influence lattice growth. Using image analysis software to analyze the proportion of surface protrusions on the surface of the film under low-magnification SEM photos, we quantify and discuss the relationship between the coverage ratio of protrusions and PCE. Our results suggest that the coverage ratio of the TCO should be less than 0.1 % to be used as a front electrode for qualified perovskite solar cells. On top of this, based on the theory of thin film deposition, this study proposes a method to improve the performance of TCO produced by the APPJ system by changing the scanning speed and successfully making high-quality gallium-doped ZnO (GZO) transparent conductive film with a more than 84% visible transmittance, sheet resistance lower than 20 Ω/sq and the coverage ratio is only 0.043%, this film can be used as the front electrode to increase the PCE of perovskite solar cells to 13.15%. Furthermore, this study also proposes another method to improve the front electrode of the APPJ system, which is to introduce silver nanowires (AgNW) to make AgNW/GZO composite films. This study developed a multi-functional process that uses the APPJ system to complete the simultaneous coating of GZO film and welding AgNW. Using this process can make the AgNW/GZO composite film have good photoelectric properties (sheet resistance is about 12 Ω/sq, visible transmittance more than 80 %), and the sheet resistance hardly changes in the atmospheric environment for more than half a year. Furthermore, the high near-infrared transmittance (over 70% at a wavelength of 1000 nm) AgNW/GZO composite film is also suitable for the front electrode of silicon-based solar cells. In this study, the composite film was used as the front electrode to fabricate a perovskite solar cell with a high PCE of 13.58%, proving this method's effectiveness. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/87157 |
DOI: | 10.6342/NTU202300379 |
Fulltext Rights: | 同意授權(全球公開) |
metadata.dc.date.embargo-lift: | 2025-02-09 |
Appears in Collections: | 機械工程學系 |
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ntu-111-1.pdf Until 2025-02-09 | 7.36 MB | Adobe PDF |
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