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| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 王昭男(Chao-Nan Wang) | |
| dc.contributor.author | Peng-Kai Chuang | en |
| dc.contributor.author | 莊芃鍇 | zh_TW |
| dc.date.accessioned | 2023-03-19T22:29:55Z | - |
| dc.date.copyright | 2022-08-30 | |
| dc.date.issued | 2022 | |
| dc.date.submitted | 2022-08-29 | |
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Sawaguchi, 'Ferroelectricity versus Antiferroelectricity in the Solid Solutions of PbZrO3 and PbTiO3,' Journal of the Physical Society of Japan, vol. 8, pp. 615-629, 1953. [22] T. Hehn and Y. Manoli, 'Introduction,' in CMOS Circuits for Piezoelectric Energy Harvesters: Efficient Power Extraction, Interface Modeling and Loss Analysis, T. Hehn and Y. Manoli Eds. Dordrecht: Springer Netherlands, 2015, pp. 1-20. [23] S. Priya, J. Ryu, C.-S. Park, J. Oliver, J.-J. Choi, and D.-S. Park, 'Piezoelectric and Magnetoelectric Thick Films for Fabricating Power Sources in Wireless Sensor Nodes,' Sensors, vol. 9, no. 8, pp. 6362-6384, 2009. [24] B. Leclerc, 'Process optimization for sol-gel PZT films,' MSc Thesis, Queen’s University, Canada, 1999. Google Scholar, 1999. [25] S. Berg and T. Nyberg, 'Fundamental understanding and modeling of reactive sputtering processes,' Thin Solid Films, vol. 476, no. 2, pp. 215-230, 2005/04/08/ 2005. [26] D. Nakahira, T. Kanda, K. Suzumori, M. Kabuto, Y. 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Levenspiel, and H. Brenner, Fluidization Engineering. Elsevier Science, 1991. [32] D. Geldart, 'Types of gas fluidization,' Powder Technology, vol. 7, no. 5, pp. 285-292, 1973/05/01/ 1973. [33] 郭修伯 and 黃安婗, '你是風兒我是沙──流體化床,' 科學發展月刊, pp. 10-15, 2015. | |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/84868 | - |
| dc.description.abstract | 壓電氣膠沉積製程作為微機電（MEMS）壓電元件製作重要的一環，改良其製程設備以獲得更佳的成膜品質及製程效率，可為壓電材料的應用帶來更多的自由度與可能性。本研究中提出一個新的氣膠產生系統，包含混合室及補粉器，新設計之混合室得以提高固氣混合之效率及品質；補粉器以穩定且連續的固定速率對混合室補充鋯鈦酸鉛（PZT）粉末，以維持氣膠產生之效率且免去舊製程中停機補粉之步驟，實現更高的連續噴塗時長，有效節省不少時間，提高單位時間的產率。 使用本研究所提出之氣膠產生系統所製備出厚度約10 μm的壓電厚膜，經鐵電分析量測獲得，在300 Vpp的三角波條件下具備殘餘極化量為15.14 μC/cm2、矯頑電場為2.68 MV/m，相較舊系統擁有較高的飽和極化量、殘餘極化量，較小的矯頑電場，介電損耗由11 %降至7.7 ¬%。由量測數據顯示改良後的製程設備所製備出之壓電膜擁有較優異之壓電特性。 | zh_TW |
| dc.description.abstract | Piezoelectric aerosol deposition (AD) plays a significant role in manufacturing piezoelectric micro-electromechanical systems (MEMS). To make piezoelectric materials more flexible in different applications, we refine the current AD apparatus to achieve higher efficiency and better film quality. We propose a new aerosol generation system composed of a self-designed mixing chamber and an innovative powder feeder. This mixing chamber boosts not only the quality but also the efficiency of powder fluidization. Our uninterrupted powder feeder reaches a longer spray time and prevents the drop in efficiency during aerosol generation. Since this novel powder feeder can refill the lead zirconate titanate (PZT) powder automatically. The system can eliminate the interruption of re-packing powder compared to previous procedures. The 10μm PZT thick film, produced by our aerosol generation system, attains 15.14 μC/cm2 in remnant polarization (Pr) and 2.68 MV/m in coercive electric (Ec) field through the ferroelectric analysis under the condition of 300 Vpp triangular wave. The products of the proposed system lead to greater values in saturated polarization (Ps) and remnant polarization (Pr) than those of the former designs. Besides, the products have relatively small values in coercive electric (Ec) field. Furthermore, we reduce the dielectric loss of the thick film from 11% to 7.7%. With the experimental data, our proposed aerosol generation system produces piezoelectric films with better piezoelectric properties. | en |
| dc.description.provenance | Made available in DSpace on 2023-03-19T22:29:55Z (GMT). No. of bitstreams: 1 U0001-2508202216562000.pdf: 6970204 bytes, checksum: 08f2ed547ed0cb2b177b699fefaf5353 (MD5) Previous issue date: 2022 | en |
| dc.description.tableofcontents | 口試委員會審定書 # 誌謝 i 摘要 ii ABSTRACT iii 目錄 iv 圖目錄 vii 表目錄 x 第1章 緒論 1 1.1 研究背景與動機 1 1.2 文獻回顧 2 1.3 研究目標 5 1.4 論文架構 6 第2章 壓電原理及製程技術 7 2.1 壓電效應 7 2.1.1 正壓電效應 7 2.1.2 逆壓電效應 8 2.2 壓電材料 9 2.2.1 鋯鈦酸鉛（PZT） 10 2.3 製程技術 11 2.3.1 溶膠凝膠法（Sol-gel Method） 11 2.3.2 濺鍍法（Sputtering method） 12 2.3.3 水熱合成法（Hydrothermal Method） 12 2.3.4 網版印刷法（Screen printing） 13 2.3.5 氣膠沉積法（Aerosol Deposition Method） 14 2.3.6 製程比較 15 第3章 原始設備之簡介 16 3.1 團隊設備介紹 16 3.1.1 沉積室 17 3.1.2 氣膠產生系統 17 3.1.3 控制系統 18 3.2 氣膠產生系統之原理及分析 19 第4章 氣膠產生系統設計與分析 21 4.1 粉粒體介紹與流體化床之應用 21 4.2 混合室 24 4.2.1 流體化床 24 4.2.2 集粉管 24 4.2.3 氣密設計 28 4.3 震動補粉器 29 4.4 系統整合 31 4.5 製程順序 33 4.6 厚膜分析方法 36 4.6.1 雷射掃描共軛焦顯微鏡 36 4.6.2 掃描式電子顯微鏡 36 4.6.3 鐵電分析儀 37 第5章 實驗結果與討論 38 5.1 氣膠產生系統設計之探討 38 5.1.1 混合室 38 5.1.2 震動補粉器 40 5.2 壓電膜分析 41 5.2.1 表面分析 41 5.2.2 剖面分析 44 5.2.3 鐵電性分析 45 5.3 新舊系統差異之探討 47 第6章 結論與未來展望 50 6.1 結論 50 6.2 未來展望 50 REFERENCE 51 | |
| dc.language.iso | zh-TW | |
| dc.title | 壓電厚膜氣膠沉積製程設備之連續噴塗系統開發 | zh_TW |
| dc.title | Development of Continuous Spraying System for Piezoelectric Thick Film Aerosol Deposition Apparatus | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 110-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.coadvisor | 吳文中(Wen-Jong Wu) | |
| dc.contributor.oralexamcommittee | 謝宗霖(Shieh Tzong-Lin),田維誠(Wei-Cheng Tian) | |
| dc.subject.keyword | 氣膠沉積法,鋯鈦酸鉛,壓電厚膜,氣膠產生系統,流體化床,震動給料機,白努力定律, | zh_TW |
| dc.subject.keyword | aerosol deposition method,piezoelectric thick film,PZT,aerosol generator,fluidized bed,vibration feeder,Bernoulli's principle, | en |
| dc.relation.page | 53 | |
| dc.identifier.doi | 10.6342/NTU202202817 | |
| dc.rights.note | 同意授權(限校園內公開) | |
| dc.date.accepted | 2022-08-29 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 工程科學及海洋工程學研究所 | zh_TW |
| dc.date.embargo-lift | 2022-08-30 | - |
| 顯示於系所單位： | 工程科學及海洋工程學系 | |
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