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| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 彭隆瀚(Lung-Han Peng) | |
| dc.contributor.author | Ti-JU Hsieh | en |
| dc.contributor.author | 謝䔶如 | zh_TW |
| dc.date.accessioned | 2022-11-24T03:11:47Z | - |
| dc.date.available | 2022-02-16 | |
| dc.date.available | 2022-11-24T03:11:47Z | - |
| dc.date.copyright | 2022-02-16 | |
| dc.date.issued | 2022 | |
| dc.date.submitted | 2022-02-08 | |
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| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/80650 | - |
| dc.description.abstract | 本論文內容主要探討利用剝離成形法，在多晶矽基板上製作以氧化鎵為主動層的發光二極體元件，進行氧化銦錫(ITO)波導層折射率與厚度調整、元件側面發光研磨、布拉格光柵多層反射鏡、電性量測與光譜量測等實驗，我們先以軟體模擬分析製成參數後，再以實驗加以驗證，量測元件各種物理特性及發光參數來進行比較，製作出能調整發光頻寬與波長的色心自發光二極體。 內容首先介紹氧化銦錫(ITO)、氧化鎵(GaOx)等材料的特性與用途，並探討在不同厚度與氣體通量下作為發光二極體材料的優缺。再以剝離成形法在元件側面製作出垂直型分散式布拉格光柵多層反射鏡(Distributed Bragg Reflector DBR)，以調整色心自發光二極體的發光光譜的波長範圍，並進行電性量測與發光角度量測分析，與Matlab模擬的元件光電場分析進行比較。 相較於一般市面上 LED使用彩色濾玻片或螢光粉來改變發光的光譜波段，吾人製作的自發光二極體以微型的光柵設計使顏色波段能更簡單並有效率的調整，讓色心自發光二極體未來能有更多邁向雷射、AR、VR等領域的應用層面。 關鍵字: 發光二極體、剝離成形法、分佈式布拉格反射鏡、氧化銦錫、矽基氧化鎵 | zh_TW |
| dc.description.provenance | Made available in DSpace on 2022-11-24T03:11:47Z (GMT). No. of bitstreams: 1 U0001-0802202212300400.pdf: 5212369 bytes, checksum: 330da35cc1250022f82b05e1a19b46c7 (MD5) Previous issue date: 2022 | en |
| dc.description.tableofcontents | 目錄 口試委員會審定書 I 摘要 II Abstract III 目錄 V Chapter 1 緒論 1 1.1 簡介 1 1.2 研究動機與目的 2 1.3 論文內容概述 4 Chapter 2 色心自發光二極體及多層膜波導之特性 5 2.1 色心自發光二極體的發光原理 5 2.2 多層膜共振腔之結構與特性 7 Chapter 3 實驗材料介紹及材料特性分析 10 3.1 氧化銦錫(ITO)材料介紹與特性分析 10 3.1.1 透明導電薄膜(Transparent Conductive Films TCF) 10 3.1.2 電性與穿透率 12 3.2 氧化鎵(GaOx)材料介紹與特性分析 15 3.2.1 氧化鎵晶格結構與物理性質 16 3.2.2 氧化鎵組成與氧元素比例 18 Chapter 4 發光二極體研製及製程參數制定 20 4.1 發光二極體設計概念 20 4.2 發光二極體元件製作 23 Chapter 5 發光二極體透光率與共振腔長 30 5.1 鍍膜材料參數與光譜透光率模擬 31 5.2 LED元件電性量測與電激發光譜量測 35 5.3 矽基氧化鎵發光二極體電性分析 37 5.4 ITO加厚與共振腔理論印證 48 Chapter 6 分佈式布拉格光柵反射鏡 50 6.1 DBR結構週期模擬 53 6.2 DBR光柵製程與光罩設計 56 6.3 DBR光柵結構與側發光量測結果 59 Chapter 7 結論與未來展望 62 參考文獻 64 附錄 66 | |
| dc.language.iso | zh-TW | |
| dc.subject | 矽基氧化鎵 | zh_TW |
| dc.subject | 發光二極體 | zh_TW |
| dc.subject | 剝離成形法 | zh_TW |
| dc.subject | 分佈式布拉格反射鏡 | zh_TW |
| dc.subject | 氧化銦錫 | zh_TW |
| dc.subject | GaOx light emitter on Poly-Si | en |
| dc.subject | ITO | en |
| dc.subject | LED | en |
| dc.subject | lift-off method | en |
| dc.subject | Distributed Bragg Reflectors | en |
| dc.title | 在多晶矽基板上以剝離成形法製成具分佈式布拉格反射鏡之矽基氧化鎵發光元件 | zh_TW |
| dc.title | GaOx light emitter with distributed Bragg reflectors on Poly-Si substrates by a lift-off method | en |
| dc.date.schoolyear | 110-1 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 毛明華,李君浩,吳忠幟 | |
| dc.subject.keyword | 發光二極體,剝離成形法,分佈式布拉格反射鏡,氧化銦錫,矽基氧化鎵, | zh_TW |
| dc.subject.keyword | LED,lift-off method,Distributed Bragg Reflectors,ITO,GaOx light emitter on Poly-Si, | en |
| dc.relation.page | 68 | |
| dc.identifier.doi | 10.6342/NTU202200368 | |
| dc.rights.note | 同意授權(限校園內公開) | |
| dc.date.accepted | 2022-02-08 | |
| dc.contributor.author-college | 電機資訊學院 | zh_TW |
| dc.contributor.author-dept | 光電工程學研究所 | zh_TW |
| 顯示於系所單位： | 光電工程學研究所 | |
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