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http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/78973完整後設資料紀錄
| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 陳奕君(I-Chun Cheng) | |
| dc.contributor.author | Cheng-Fu Hsu | en |
| dc.contributor.author | 許承富 | zh_TW |
| dc.date.accessioned | 2021-07-11T15:33:24Z | - |
| dc.date.available | 2025-08-01 | |
| dc.date.copyright | 2020-08-28 | |
| dc.date.issued | 2020 | |
| dc.date.submitted | 2020-08-18 | |
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| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/78973 | - |
| dc.description.abstract | 本研究目標為開發應用於心電訊號量測之可撓性電子元件，共設計兩種不同的可拉伸式乾式電極，皆以聚二甲基矽氧烷做為基底材料，並分別使用銀及奈米銀線作為感測電極。導線的部分特別設計彎曲的結構，使得電極貼片與皮膚能夠服貼，進而提高訊號雜訊比。兩者之表現與使用市售銀/氯化銀(Ag/AgCl)電極之量測結果相近。 接著於聚醯亞胺基板上製作可撓性差分放大電路，其由八個非晶氧化銦鎵鋅薄膜電晶體組成(放大倍率約3.5 V/V)。其中四個薄膜電晶體組成主動式負載NMOS差分放大器，而另外四個薄膜電晶體組成雙輸入轉單輸出電路。電路之差模增益約為3.5 V/V，共模增益約為0.6 V/V，共模抑制比約為15.3 dB。 最後，將電極貼片與感測電路整合於心電圖訊號量測。先利用可拉伸式乾式電極接收皮膚上的訊號，再透過可撓性非晶氧化銦鎵鋅薄膜電晶體之前端差分放大電路進行初步放大(放大倍率約3.5 V/V)，而後利用自組之後段濾波電路(放大倍率約101 V/V，頻寬為0.4 ~ 48 Hz、 60 Hz帶拒)進行雜訊濾除，從而於示波器上擷取ECG波形。所得心電訊號之QRS平均波峰約為85.73 mV，雜訊約為22.21 mV，得訊雜比值約為11.73 dB。 | zh_TW |
| dc.description.abstract | In this research, developing flexible electronic devices for Electrocardiogram (ECG) measurement is demonstrated. First of all, two types of stretchable dry electrodes are designed, both of which are based on Polydimethylsiloxane (PDMS), and the electrodes use silver (Ag) and silver nanowires (AgNW) respectively. It’s worth mentioning that the design of matrix networks makes the patches conformably adhere to the skin surface, so that the signal-to-noise ratio can be improved. Both of their performance are similar to the measurement results using commercial silver/silver chloride (Ag/AgCl) reference electrodes. Next, the flexible differential amplifier circuit which is composed of eight amorphous indium gallium zinc oxide thin film transistors (a-IGZO TFTs) is fabricated on polyimide substrate. Four of them act as a differential pair, and the other form a differential to single ended converter. The differential mode gain of the circuit is about 3.5 V/V, and the common mode gain is about 0.6 V/V, so the common mode rejection ratio (CMRR) is about 15.3 dB. Finally, the patches and circuit are integrated into ECG measurement. The ECG signal is received from the skin surface by three pairs of stretchable dry electrodes, and then the signal will be amplified by a-IGZO TFT based differential amplifier circuit (gain is about 3.5 V/V). After that, the breadboard filter circuit (gain is about 101 V/V, and bandwidth is 0.4 ~ 48 Hz 60 Hz notch) is used for noise filtering, so as to monitor the ECG waveform on the oscilloscope. The average peak of the QRS wave obtained is about 85.73 mV, the noise is about 22.21 mV, and the signal-to-noise ratio is about 11.73 dB. | en |
| dc.description.provenance | Made available in DSpace on 2021-07-11T15:33:24Z (GMT). No. of bitstreams: 1 U0001-1808202013012200.pdf: 50965795 bytes, checksum: e2820eab9c1eb6d873173e22df80c279 (MD5) Previous issue date: 2020 | en |
| dc.description.tableofcontents | 誌謝 II 中文摘要 IV Abstract V 目錄 VII 圖目錄 XI 表目錄 XIX 第一章 緒論 1 1.1 心電圖發展背景 1 1.2 研究動機 2 1.3 論文架構 3 第二章 理論與文獻回顧 5 2.1 心電圖原理 5 2.1.1 心臟的電化傳導 5 2.1.2 心電訊號的組成 7 2.1.3 十二導程 8 2.2 感測電極簡介 11 2.2.1 濕式電極 11 2.2.2 乾式電極 12 2.3 濾波器簡介 13 2.4 薄膜電晶體簡介 14 2.4.1 薄膜電晶體之元件結構 14 2.4.2 薄膜電晶體之工作原理 15 2.4.3 薄膜電晶體之特徵參數 16 2.4.4 薄膜電晶體之介電層電性分析 21 2.5 NMOS差分放大電路簡介 22 2.5.1 電壓轉換特性曲線 22 2.5.2 雜訊邊界 23 2.5.3 電阻式負載NMOS反相器 25 2.5.4 增強型負載NMOS反相器 27 2.5.5 NMOS差分放大器 29 2.5.6 雙輸入轉單輸出電路簡介 30 2.5.7 頻率響應 32 2.6 可拉伸式乾式電極文獻回顧 36 2.7 a-IGZO薄膜電晶體差分放大電路之文獻回顧 44 2.8 可拉伸式電極整合電晶體於生理訊號感測之文獻回顧 49 第三章 實驗方法與步驟 53 3.1 聚二甲基矽氧烷(PDMS)製備 53 3.2 薄膜沉積方法 55 3.2.1 電子束蒸鍍系統 55 3.2.2 射頻磁控濺鍍系統 57 3.2.3 電漿輔助化學氣相沉積系統 59 3.2.4 原子層沉積系統 60 3.3 微影製程 62 3.4 蝕刻製程 65 3.4.1 濕式蝕刻製程 65 3.4.2 乾式蝕刻製程 65 3.5 銀/聚醯亞胺/聚二甲基矽氧烷(Ag/PI/PDMS)電極製備 67 3.6 奈米銀線/聚二甲基矽氧烷(AgNWs/PDMS)電極製備 69 3.7 心電感測電路之設計 71 3.7.1 電壓隨耦器(Voltage Follower) 73 3.7.2 儀表放大器(Instrumentation Amplifier) 73 3.7.3 單位增益緩衝器(Unity-Gain Buffer) 74 3.7.4 二階高通濾波器 74 3.7.5 帶拒濾波器(Twin-T notch filter) 75 3.7.6 後級放大電路 76 3.7.7 二階低通濾波器 76 3.8 金屬/絕緣層/金屬(MIM)電容製備流程 77 3.9 可撓性薄膜電晶體差分放大電路製備 78 3.9.1 NMOS差分放大電路光罩設計 78 3.9.2 可撓性氧化銦鎵鋅薄膜電晶體差分放大電路製作流程 80 3.10 量測分析 86 3.10.1 心電訊號量測方法(市售感測模組) 86 3.10.2 心電訊號量測方法(自組麵包板電路) 87 3.10.3 心電訊雜比(SNR)取樣方法 88 3.10.4 二氧化鉿介電層電容-電壓量測方法 89 3.10.5 薄膜電晶體特性量測方法 89 3.10.6 NMOS反相器轉換特性量測方法 90 3.10.7 NMOS反相器與差分放大電路動態訊號量測方法 91 第四章 結果與討論 93 4.1 心電訊號量測(不同電極貼片搭配AD8232市售感測模組) 93 4.1.1 市售Ag/AgCl貼片搭配市售感測模組 93 4.1.2 自製Ag/PI/PDMS電極貼片搭配市售感測模組 94 4.1.3 自製AgNWs/PDMS電極貼片搭配市售感測模組 94 4.2 心電訊號量測(不同電極貼片搭配自組麵包板電路) 100 4.2.1 心電感測電路之實作與優化(自組麵包板電路) 100 4.2.2 自製Ag/PI/PDMS電極貼片搭配自組麵包板電路 109 4.2.3 自製AgNWs/PDMS電極貼片搭配自組麵包板電路 109 4.3 玻璃基板上之a-IGZO薄膜電晶體差分放大電路 112 4.3.1 二氧化鉿介電層電容-電壓特性分析 112 4.3.2 a-IGZO薄膜電晶體特性分析 113 4.3.3 主動式負載NMOS反相器 118 4.3.4 主動式負載NMOS差分放大器 121 4.4 心電訊號量測(玻璃基板上之差放搭配麵包板後段電路) 125 4.5 聚醯亞胺基板上之a-IGZO薄膜電晶體差分放大電路 133 4.5.1 可撓性a-IGZO薄膜電晶體特性分析 133 4.5.2 可撓性主動式負載NMOS反相器 136 4.5.3 可撓性主動式負載NMOS差分放大器 139 4.6 心電訊號量測(PI基板上之差放搭配麵包板後段電路) 143 第五章 結論與未來展望 145 5.1 結論 145 5.2 未來展望 147 A. 附錄 149 Ⅰ 心電訊號頻譜分析 149 參考文獻 153 | |
| dc.language.iso | zh-TW | |
| dc.subject | 心電訊號量測 | zh_TW |
| dc.subject | 感測電極 | zh_TW |
| dc.subject | 差分放大器 | zh_TW |
| dc.subject | 薄膜電晶體 | zh_TW |
| dc.subject | ECG measurement | en |
| dc.subject | differential amplifier | en |
| dc.subject | stretchable sensing electrode | en |
| dc.subject | thin-film transistor | en |
| dc.title | 可拉伸式感測電極與非晶氧化銦鎵鋅薄膜電晶體差分放大電路之整合於心電訊號量測之應用 | zh_TW |
| dc.title | Integration of Stretchable Sensing Electrodes with a-IGZO Thin-Film Transistor Based Differential Amplifier Circuits for ECG Measurement | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 108-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 陳建彰(Jian-Zhang Chen),李尉彰(Wei-Chang Li),張子璿(Tzu-Hsuan Chang) | |
| dc.subject.keyword | 感測電極,薄膜電晶體,差分放大器,心電訊號量測, | zh_TW |
| dc.subject.keyword | stretchable sensing electrode,thin-film transistor,differential amplifier,ECG measurement, | en |
| dc.relation.page | 159 | |
| dc.identifier.doi | 10.6342/NTU202003955 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2020-08-19 | |
| dc.contributor.author-college | 電機資訊學院 | zh_TW |
| dc.contributor.author-dept | 光電工程學研究所 | zh_TW |
| dc.date.embargo-lift | 2025-08-01 | - |
| 顯示於系所單位： | 光電工程學研究所 | |
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